[Scan]
initial_time=2015-12-15T23:47:23
final_time=2015-12-15T23:47:43
ip_count=19
run=1017
dataset=3
scan=232
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08771E-4
ql1_vset=
ql1_vmon=-8.178E-1
ql1_imon=2.74142E-9
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=6.04892E-10
ql3_vset=
ql3_vmon=-9.13093E0
ql3_imon=6.87575E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.37801E-10
mult1=-8.64469E-9
mult2=-2.65274E-9
rf_tmon=-6.13465E-3
rf_agc=3.09964E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.13546E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6421E0
bslens_imon=2.33227E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20175E1
lens5a_imon=1.99533E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53953E1
cs_ef1b_imon=2.94306E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0466E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=2.26786E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43024E0
lens1_imon=2.69277E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64116E1
os_ef1alow_imon=2.99712E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03444E1
cs_ea2_imon=1.54291E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=2.96288E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=2.15136E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11165E1
os_restr1_imon=3.07064E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15684E1
os_ea1_imon=1.95856E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63461E1
os_ef1bup_imon=3.1092E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21064E0
cs_ionrep_imon=1.23901E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.022E1
cs_anode1_imon=3.15389E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.25277E-9
tplens_vset=1.4E-1
tplens_vmon=1.58015E0
tplens_imon=-3.71445E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27131E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.03E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=1.00019E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=1.91926E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3394E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7503E1
cs_ef2b_imon=3.08289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.73691E-1
os_ea2_imon=-8.11249E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06055E2
lens4b_imon=2.0081E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70831E1
cs_ef2a_imon=3.16975E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.52788E0
os_ef2alow_imon=-2.10774E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.41853E-1
os_ef2bup_imon=-5.44862E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11322E1
os_restr2_imon=3.01297E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.231E2
cs_ionfoca_imon=6.27693E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01965E1
cs_anode2_imon=2.26731E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7388E1
iondef1_imon=1.11356E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68134E1
iondef4_imon=1.05242E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.76827E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=1.2389E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07608E0
cs_ionaccel_imon=-1.78338E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02121E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56027E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=1.30847E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39044E-4
mask2_vset=0.0E0
mask2_vmon=-1.86668E1
mask2_imon=-9.47263E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.46933E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.26527E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=6.89614E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46472E0
defgridb_imon=6.20759E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33414E1
os_fil1_imon=8.97401E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.77305E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65656E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30697E1
cs_fil1_imon=1.00151E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63063E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66016E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55781E-2
os_fil2_imon=-3.0564E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.6619E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74558E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36384E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.83939E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22434E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.79792E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.11239E-1
res40_imon=-2.32037E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17633E-1	-7.98845E-1	-9.1311E0	-9.14207E0	5.36442E-3	9.28879E-2	2.73075E1	-3.27169E1	-3.25824E1	2.68024E1	1.19238E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.79398E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17609E-1	-7.9844E-1	-9.13112E0	-9.14187E0	5.19753E-3	9.3174E-2	2.73003E1	-3.26609E1	-3.265E1	2.68028E1	1.19239E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.79332E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09518E0	-8.178E-1	-7.98655E-1	-9.13093E0	-9.14197E0	5.00679E-3	9.30309E-2	2.73529E1	-3.2747E1	-3.25606E1	2.6816E1	1.19237E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.79465E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09634E0	-8.17633E-1	-7.98416E-1	-9.13072E0	-9.14185E0	5.53131E-3	9.30548E-2	2.73401E1	-3.26377E1	-3.2652E1	2.68471E1	1.19243E-7	2.51596E-3	2.51596E-3	6.31234E-3	1.796E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.17657E-1	-7.98321E-1	-9.13115E0	-9.14192E0	5.29289E-3	9.31263E-2	2.72856E1	-3.27145E1	-3.25841E1	2.68146E1	1.19234E-7	2.51793E-3	2.51793E-3	6.29558E-3	1.80191E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.17609E-1	-7.98273E-1	-9.1316E0	-9.14166E0	5.4121E-3	9.29832E-2	2.73069E1	-3.26278E1	-3.26434E1	2.68166E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.7971E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.17585E-1	-7.98368E-1	-9.13107E0	-9.14192E0	5.55515E-3	9.29832E-2	2.73249E1	-3.26518E1	-3.26368E1	2.68076E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.79554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.17537E-1	-7.98559E-1	-9.13084E0	-9.14166E0	5.4121E-3	9.29832E-2	2.72992E1	-3.26484E1	-3.26136E1	2.68262E1	1.1929E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.80099E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17633E-1	-7.98655E-1	-9.13081E0	-9.14166E0	5.29289E-3	9.2721E-2	2.72823E1	-3.26783E1	-3.26092E1	2.68082E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.79027E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.17823E-1	-7.9906E-1	-9.13074E0	-9.14173E0	5.17368E-3	9.29594E-2	2.73169E1	-3.26714E1	-3.26549E1	2.67523E1	1.19135E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.80179E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17728E-1	-7.99036E-1	-9.13053E0	-9.14202E0	4.91142E-3	9.31025E-2	2.73411E1	-3.27035E1	-3.26476E1	2.68442E1	1.19238E-7	2.51225E-3	2.51225E-3	6.34037E-3	1.80179E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.18086E-1	-7.98392E-1	-9.13084E0	-9.14199E0	5.24521E-3	9.30548E-2	2.72817E1	-3.26458E1	-3.26422E1	2.68082E1	1.19239E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.80099E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.17919E-1	-7.98965E-1	-9.13117E0	-9.14185E0	5.34058E-3	9.3174E-2	2.73187E1	-3.26791E1	-3.26101E1	2.67445E1	1.1929E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.79866E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.17585E-1	-7.99131E-1	-9.13136E0	-9.14176E0	5.62668E-3	9.30548E-2	2.73303E1	-3.26482E1	-3.26633E1	2.67589E1	1.19238E-7	2.51771E-3	2.51771E-3	6.33486E-3	1.80022E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.17752E-1	-7.98774E-1	-9.13103E0	-9.14178E0	5.57899E-3	9.29832E-2	2.72672E1	-3.26278E1	-3.26783E1	2.68615E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.78722E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.1768E-1	-7.99084E-1	-9.1311E0	-9.14199E0	5.62668E-3	9.31263E-2	2.73838E1	-3.26903E1	-3.26158E1	2.67514E1	1.1929E-7	2.51443E-3	2.51443E-3	6.30192E-3	1.79398E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17728E-1	-7.98774E-1	-9.13069E0	-9.14197E0	5.22137E-3	9.29594E-2	2.72648E1	-3.26464E1	-3.26783E1	2.67337E1	1.19238E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.80335E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.1799E-1	-7.98917E-1	-9.13093E0	-9.14214E0	5.36442E-3	9.29832E-2	2.73393E1	-3.26809E1	-3.26166E1	2.68065E1	1.1929E-7	2.51116E-3	2.51116E-3	6.31288E-3	1.79554E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1768E-1	-7.99179E-1	-9.13088E0	-9.14178E0	4.93526E-3	9.30786E-2	2.73529E1	-3.27989E1	-3.26714E1	2.68196E1	1.19188E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.79945E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.178E-1	-7.9875E-1	-9.13093E0	-9.14211E0	5.4121E-3	9.31501E-2	2.7388E1	-3.27131E1	-3.26254E1	2.68134E1	1.1929E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.79792E-1