[Scan]
initial_time=2015-12-15T23:47:50
final_time=2015-12-15T23:48:10
ip_count=19
run=1017
dataset=3
scan=233
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08802E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=2.7409E-9
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=6.34551E-10
ql3_vset=
ql3_vmon=-9.13124E0
ql3_imon=5.85091E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=5.37336E-10
mult1=-9.92494E-9
mult2=-3.05642E-9
rf_tmon=-5.62439E-3
rf_agc=3.09495E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=6.0699E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63729E0
bslens_imon=2.5504E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19627E1
lens5a_imon=1.99566E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.04854E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54025E1
cs_ef1b_imon=2.93837E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04648E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0519E1
cs_ea1_imon=2.28252E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39827E0
lens1_imon=2.59081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64897E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03825E1
cs_ea2_imon=1.55344E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84106E1
cs_ef1a_imon=3.0173E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=2.15292E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1125E1
os_restr1_imon=3.09767E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15116E1
os_ea1_imon=1.9391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.09587E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20986E0
cs_ionrep_imon=1.23095E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91868E2
cs_nozzle_imon=1.93236E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=3.13226E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=6.26037E-9
tplens_vset=1.4E-1
tplens_vmon=1.57654E0
tplens_imon=-4.61433E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27104E1
iondef3_imon=1.49246E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26036E1
iondef2_imon=1.57327E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.27925E-2
ql6_imon=1.02257E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28209E0
ionrepsh_imon=1.87886E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33327E1
lens5b_imon=2.16609E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.12974E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.77319E-1
os_ea2_imon=-8.39749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00759E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71474E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5495E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.70084E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=2.95855E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23112E2
cs_ionfoca_imon=6.30332E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01845E1
cs_anode2_imon=2.24641E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72673E1
iondef1_imon=1.09762E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08918E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.76941E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=1.24224E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-2.09332E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02039E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55264E1
einzel_imon=7.76352E-6
window_vset=0.0E0
window_vmon=7.3184E-2
window_imon=-1.02295E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82547E2
mask1_imon=2.3899E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.38771E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93748E3
defgrida_imon=6.28949E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.03143E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45258E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33435E1
os_fil1_imon=8.97094E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79708E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65643E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30693E1
cs_fil1_imon=1.00151E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62192E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65965E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66123E-2
os_fil2_imon=-3.1525E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.67391E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.76637E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-3.22458E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02209E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22433E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.7918E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.15444E-1
res40_imon=-2.59428E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17823E-1	-7.98845E-1	-9.131E0	-9.14216E0	5.55515E-3	9.30071E-2	2.72998E1	-3.26496E1	-3.26402E1	2.68154E1	1.19238E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.79866E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.17752E-1	-7.98702E-1	-9.13117E0	-9.14221E0	5.17368E-3	9.31978E-2	2.72996E1	-3.27252E1	-3.2585E1	2.68101E1	1.19239E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.79945E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17609E-1	-7.98845E-1	-9.13136E0	-9.14207E0	5.17368E-3	9.30786E-2	2.73248E1	-3.27118E1	-3.26023E1	2.68551E1	1.1929E-7	2.51581E-3	2.51581E-3	6.30182E-3	1.80901E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17418E-1	-7.98607E-1	-9.1315E0	-9.14216E0	5.19753E-3	9.29356E-2	2.73333E1	-3.26398E1	-3.26302E1	2.6807E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.79945E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.17418E-1	-7.99108E-1	-9.13119E0	-9.14178E0	4.79221E-3	9.28402E-2	2.72743E1	-3.26355E1	-3.26548E1	2.68333E1	1.1929E-7	2.51552E-3	2.51552E-3	6.36244E-3	1.80806E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17466E-1	-7.98798E-1	-9.13112E0	-9.14168E0	4.69685E-3	9.28402E-2	2.73231E1	-3.26903E1	-3.25972E1	2.6825E1	1.19219E-7	2.51591E-3	2.51591E-3	6.29991E-3	1.79755E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.17585E-1	-7.98845E-1	-9.13124E0	-9.1419E0	5.05447E-3	9.31025E-2	2.73003E1	-3.26284E1	-3.25894E1	2.68346E1	1.1929E-7	2.51096E-3	2.51096E-3	6.33436E-3	1.79792E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09487E0	-8.17919E-1	-7.98559E-1	-9.1311E0	-9.14185E0	5.26905E-3	9.30548E-2	2.72636E1	-3.27005E1	-3.25737E1	2.68088E1	1.18773E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.79866E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.17633E-1	-7.98893E-1	-9.13112E0	-9.14171E0	5.10216E-3	9.28879E-2	2.73102E1	-3.26277E1	-3.26368E1	2.68139E1	1.1929E-7	2.51225E-3	2.51225E-3	6.31837E-3	1.80022E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.17633E-1	-7.9875E-1	-9.13117E0	-9.14183E0	5.29289E-3	9.27687E-2	2.73248E1	-3.26915E1	-3.25923E1	2.67866E1	1.1929E-7	2.51369E-3	2.51369E-3	6.3126E-3	1.79948E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.17776E-1	-7.98178E-1	-9.1311E0	-9.14202E0	4.98295E-3	9.32217E-2	2.73653E1	-3.27558E1	-3.25871E1	2.68052E1	1.1929E-7	2.51874E-3	2.51874E-3	6.3016E-3	1.79443E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.17776E-1	-7.98464E-1	-9.13141E0	-9.1419E0	5.26905E-3	9.3317E-2	2.73099E1	-3.26434E1	-3.26416E1	2.68172E1	1.19238E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.80335E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17847E-1	-7.98583E-1	-9.13122E0	-9.14207E0	5.4121E-3	9.30071E-2	2.73123E1	-3.26621E1	-3.26218E1	2.68331E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.80179E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17776E-1	-7.98726E-1	-9.13103E0	-9.14199E0	5.4121E-3	9.30548E-2	2.72931E1	-3.27017E1	-3.26062E1	2.67695E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.8056E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0948E0	-8.17752E-1	-7.98869E-1	-9.13126E0	-9.14187E0	5.62668E-3	9.31501E-2	2.72714E1	-3.26933E1	-3.25709E1	2.67806E1	1.1929E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.7971E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.17847E-1	-7.98488E-1	-9.13103E0	-9.14185E0	5.26905E-3	9.28879E-2	2.73263E1	-3.26296E1	-3.26514E1	2.68052E1	1.1929E-7	2.51915E-3	2.51915E-3	6.33538E-3	1.79624E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.17871E-1	-7.98869E-1	-9.13081E0	-9.14185E0	5.14984E-3	9.3174E-2	2.73532E1	-3.26879E1	-3.26068E1	2.68288E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.79792E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.18014E-1	-7.98297E-1	-9.13141E0	-9.14195E0	5.24521E-3	9.30071E-2	2.73105E1	-3.26999E1	-3.26368E1	2.68259E1	1.19238E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.7971E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09418E0	-8.17895E-1	-7.98535E-1	-9.1311E0	-9.14209E0	4.95911E-3	9.30548E-2	2.74538E1	-3.27275E1	-3.25245E1	2.6795E1	1.19238E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.80335E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.17966E-1	-7.98678E-1	-9.13124E0	-9.1419E0	5.29289E-3	9.27925E-2	2.72673E1	-3.26036E1	-3.27104E1	2.67938E1	1.19239E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.7918E-1