[Scan]
initial_time=2015-12-15T23:48:17
final_time=2015-12-15T23:48:37
ip_count=19
run=1017
dataset=3
scan=234
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08827E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=2.69271E-9
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=6.22356E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=6.08265E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.46586E-10
mult1=-9.10224E-9
mult2=-2.73658E-9
rf_tmon=-4.47037E-3
rf_agc=3.29911E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=6.14178E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19899E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04718E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53929E1
cs_ef1b_imon=2.99495E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05252E1
cs_ea1_imon=2.28336E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40861E0
lens1_imon=2.82254E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64128E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04009E1
cs_ea2_imon=1.54399E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.00721E-5
olens2_vset=9.7E-1
olens2_vmon=9.70674E-1
olens2_imon=2.15418E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=3.08253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15636E1
os_ea1_imon=1.94017E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.0901E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=1.22315E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93099E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01695E1
cs_anode1_imon=3.1265E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=6.32546E-9
tplens_vset=1.4E-1
tplens_vmon=1.52187E0
tplens_imon=-2.77716E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26476E1
iondef3_imon=1.48234E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02944E2
lens6_imon=2.98202E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=1.04791E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=1.8843E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76868E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.5867E-1
os_ea2_imon=-7.06706E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0613E2
lens4b_imon=2.00576E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71864E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55311E0
os_ef2alow_imon=-2.74564E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.73087E-1
os_ef2bup_imon=-5.60719E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=2.95099E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23106E2
cs_ionfoca_imon=6.31767E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01443E1
cs_anode2_imon=2.26191E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.08003E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.09098E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.73649E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=1.23133E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14996E0
cs_ionaccel_imon=-1.89511E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47032E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5694E1
einzel_imon=7.97255E-6
window_vset=0.0E0
window_vmon=1.19435E-1
window_imon=-1.13467E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82673E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.25303E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93738E3
defgrida_imon=6.47076E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.99347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=6.18957E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33434E1
os_fil1_imon=8.96866E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.77605E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65731E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30699E1
cs_fil1_imon=1.00367E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62456E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65662E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.68678E-2
os_fil2_imon=-3.26062E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.62586E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70433E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.62993E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22399E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.79639E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.00738E-1
res40_imon=-2.6123E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.17728E-1	-7.98702E-1	-9.13115E0	-9.14209E0	5.24521E-3	9.32217E-2	2.72921E1	-3.26809E1	-3.26048E1	2.67485E1	1.19238E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.79866E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17847E-1	-7.98512E-1	-9.13138E0	-9.14178E0	4.98295E-3	9.29356E-2	2.7362E1	-3.27405E1	-3.2544E1	2.67196E1	1.19188E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.80406E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17752E-1	-7.98464E-1	-9.13146E0	-9.14211E0	5.38826E-3	9.34124E-2	2.72964E1	-3.26816E1	-3.26289E1	2.68012E1	1.1929E-7	2.51581E-3	2.51581E-3	6.34099E-3	1.80741E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.17609E-1	-7.98917E-1	-9.13148E0	-9.14195E0	5.45979E-3	9.30309E-2	2.73151E1	-3.27062E1	-3.25818E1	2.68172E1	1.1929E-7	2.51077E-3	2.51077E-3	6.32858E-3	1.79871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.17609E-1	-7.98845E-1	-9.13107E0	-9.14197E0	5.34058E-3	9.31025E-2	2.73219E1	-3.265E1	-3.26627E1	2.67854E1	1.19188E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.79485E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09449E0	-8.18038E-1	-7.98798E-1	-9.13115E0	-9.14221E0	5.48363E-3	9.30071E-2	2.72998E1	-3.26325E1	-3.26048E1	2.67526E1	1.19238E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.80022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17823E-1	-7.98893E-1	-9.13093E0	-9.14216E0	5.53131E-3	9.29594E-2	2.72835E1	-3.26705E1	-3.26218E1	2.67704E1	1.1929E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.79332E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.1811E-1	-7.98702E-1	-9.131E0	-9.14211E0	5.48363E-3	9.27925E-2	2.72598E1	-3.26456E1	-3.26132E1	2.6855E1	1.19186E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.7971E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.17633E-1	-7.98798E-1	-9.13112E0	-9.14223E0	5.45979E-3	9.31263E-2	2.73117E1	-3.26795E1	-3.26446E1	2.67644E1	1.19237E-7	2.51693E-3	2.51693E-3	6.30182E-3	1.79465E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.17823E-1	-7.98893E-1	-9.13091E0	-9.14214E0	5.65052E-3	9.33647E-2	2.73222E1	-3.26632E1	-3.26236E1	2.68319E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.79866E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.17847E-1	-7.98798E-1	-9.131E0	-9.14202E0	5.4121E-3	9.32217E-2	2.73249E1	-3.26711E1	-3.25894E1	2.68208E1	1.1929E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.79639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.178E-1	-7.98798E-1	-9.13103E0	-9.14197E0	5.48363E-3	9.31025E-2	2.73141E1	-3.26416E1	-3.26374E1	2.68094E1	1.19237E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.79942E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.18181E-1	-7.98678E-1	-9.13095E0	-9.14204E0	5.48363E-3	9.31501E-2	2.73189E1	-3.26543E1	-3.26434E1	2.68532E1	1.19188E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.80099E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.18086E-1	-7.9875E-1	-9.13107E0	-9.14195E0	5.34058E-3	9.31025E-2	2.73099E1	-3.26975E1	-3.25629E1	2.67553E1	1.1929E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.79866E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17966E-1	-7.98464E-1	-9.13126E0	-9.14192E0	5.29289E-3	9.31501E-2	2.72979E1	-3.2653E1	-3.26422E1	2.67878E1	1.1929E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.80179E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.1799E-1	-7.98297E-1	-9.131E0	-9.14171E0	5.38826E-3	9.3317E-2	2.73261E1	-3.26783E1	-3.2641E1	2.68106E1	1.19237E-7	2.51581E-3	2.51581E-3	6.3074E-3	1.80102E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.17728E-1	-7.98559E-1	-9.13088E0	-9.14173E0	5.10216E-3	9.30309E-2	2.73081E1	-3.26789E1	-3.2638E1	2.68286E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.80022E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.178E-1	-7.98273E-1	-9.131E0	-9.14211E0	5.29289E-3	9.30071E-2	2.72847E1	-3.26633E1	-3.26326E1	2.6852E1	1.19239E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.80406E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1749E-1	-7.98607E-1	-9.13081E0	-9.14159E0	5.43594E-3	9.3174E-2	2.71677E1	-3.26278E1	-3.28171E1	2.68695E1	1.1929E-7	2.5199E-3	2.5199E-3	6.35692E-3	1.79398E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.17513E-1	-7.98583E-1	-9.13119E0	-9.14183E0	5.19753E-3	9.28879E-2	2.73099E1	-3.26645E1	-3.26476E1	2.67908E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.79639E-1