[Scan]
initial_time=2015-12-15T23:49:22
final_time=2015-12-15T23:49:42
ip_count=19
run=1017
dataset=4
scan=236
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.81452E-6
ql1_vset=
ql1_vmon=-8.79987E1
ql1_imon=-3.64748E-9
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=8.06606E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-9.66717E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=3.9098E-9
mult1=-1.09771E-8
mult2=-2.47436E-9
rf_tmon=-4.44459E-3
rf_agc=3.39993E-2
counter1=5
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=7.10428E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65099E0
bslens_imon=2.83374E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2044E1
lens5a_imon=1.95956E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.05182E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54264E1
cs_ef1b_imon=2.91128E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.01909E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04925E1
cs_ea1_imon=2.29869E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00467E0
lens1_imon=1.49156E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64556E1
os_ef1alow_imon=3.01171E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04055E1
cs_ea2_imon=1.51968E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=2.94012E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=2.1626E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1117E1
os_restr1_imon=3.10624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15368E1
os_ea1_imon=1.95342E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63965E1
os_ef1bup_imon=3.06593E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24071E0
cs_ionrep_imon=1.2147E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93294E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0185E1
cs_anode1_imon=3.17053E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.60854E-9
tplens_vset=1.4E-1
tplens_vmon=1.57028E0
tplens_imon=-2.33129E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26119E1
iondef3_imon=1.46982E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26891E1
iondef2_imon=1.57399E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98206E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=7.66706E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2834E0
ionrepsh_imon=1.89604E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33845E1
lens5b_imon=2.19453E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74605E1
cs_ef2b_imon=3.10624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.2942E-1
os_ea2_imon=-8.44453E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06161E2
lens4b_imon=2.00589E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71571E1
cs_ef2a_imon=3.17887E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.50634E0
os_ef2alow_imon=-2.49118E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.12666E-1
os_ef2bup_imon=-4.92733E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1037E1
os_restr2_imon=2.98113E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.31329E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02331E1
cs_anode2_imon=2.25584E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72809E1
iondef1_imon=1.0798E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.11353E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.82743E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=1.24478E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.19385E0
cs_ionaccel_imon=-2.42167E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02047E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57453E1
einzel_imon=7.60443E-6
window_vset=0.0E0
window_vmon=1.42389E-1
window_imon=-7.84827E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.38792E-4
mask2_vset=0.0E0
mask2_vmon=-1.86807E1
mask2_imon=-4.02549E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92689E3
multa_neg_imon=7.41696E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.77148E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.07885E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34189E0
defgridb_imon=5.79132E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33437E1
os_fil1_imon=8.96952E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76612E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65826E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30742E1
cs_fil1_imon=1.00173E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62986E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65813E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67253E-2
os_fil2_imon=-3.13835E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.61899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58866E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3502E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21151E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22465E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=1.80649E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.11711E-1
res40_imon=-2.93253E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=192
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.873E3	3.0E0	1.47E2	4.1E1	-7.39421E-2	-8.7999E1	-9.53674E-4	-8.80008E1	5.96046E-4	5.45979E-3	9.30786E-2	2.72968E1	-3.26838E1	-3.26537E1	2.68569E1	1.1929E-7	2.51603E-3	2.51603E-3	6.31798E-3	1.79721E-1
2.0E0	4.324E3	1.0E0	3.16E2	1.6E2	-7.46377E-2	-8.79989E1	-1.3113E-3	-8.8001E1	5.00679E-4	5.4121E-3	9.31501E-2	2.72851E1	-3.26928E1	-3.26341E1	2.67726E1	1.1924E-7	2.52342E-3	2.52342E-3	6.3074E-3	1.80475E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.79993E1	-1.4782E-3	-8.80004E1	3.09944E-4	5.67436E-3	9.32455E-2	2.72941E1	-3.26712E1	-3.26312E1	2.68348E1	1.19182E-7	2.51498E-3	2.51498E-3	6.31879E-3	1.79536E-1
4.0E0	1.1E1	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.79991E1	-1.00136E-3	-8.80006E1	3.57628E-4	5.67436E-3	9.29117E-2	2.73189E1	-3.26639E1	-3.2638E1	2.68406E1	1.1924E-7	2.51498E-3	2.51498E-3	6.3074E-3	1.7957E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.79992E1	-1.12057E-3	-8.80009E1	1.43051E-4	5.50747E-3	9.28879E-2	2.73281E1	-3.26909E1	-3.26319E1	2.67788E1	1.19238E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.80022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.79992E1	-1.19209E-3	-8.8001E1	1.90735E-4	5.6982E-3	9.32217E-2	2.73147E1	-3.26476E1	-3.26633E1	2.6777E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.80406E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.79992E1	-1.19209E-3	-8.80006E1	2.38419E-5	5.53131E-3	9.31978E-2	2.72414E1	-3.2649E1	-3.26372E1	2.68082E1	1.1929E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.80179E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.7999E1	-1.04904E-3	-8.80007E1	1.66893E-4	5.43594E-3	9.32693E-2	2.73135E1	-3.26819E1	-3.25665E1	2.68911E1	1.1929E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.80714E-1
1.2E1	2.32E2	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.79989E1	-7.39098E-4	-8.80007E1	1.19209E-4	5.29289E-3	9.29356E-2	2.72787E1	-3.26639E1	-3.26014E1	2.6846E1	1.1929E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.7971E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.79989E1	-1.12057E-3	-8.80007E1	4.76837E-5	5.34058E-3	9.32217E-2	2.7337E1	-3.26472E1	-3.26213E1	2.67656E1	1.19264E-7	2.51593E-3	2.51593E-3	6.32916E-3	1.79906E-1
1.4E1	8.911E3	2.0E0	5.66E2	3.82E2	-7.38649E-2	-8.7999E1	-1.00136E-3	-8.80006E1	7.15256E-5	5.4121E-3	9.30309E-2	2.73003E1	-3.27059E1	-3.26044E1	2.68135E1					
1.5E1	1.23E2	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.79993E1	-8.34465E-4	-8.80005E1	-4.76837E-5	5.48363E-3	9.32932E-2	2.73381E1	-3.26891E1	-3.26116E1	2.67586E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.80022E-1
1.6E1	3.032E3	3.0E0	6.47E2	4.41E2	-7.37103E-2	-8.79994E1	-6.19888E-4	-8.80007E1	2.86102E-4	5.4121E-3	9.32455E-2	2.73169E1	-3.26526E1	-3.26325E1	2.68117E1	1.19238E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.7971E-1
1.7E1	9.25E3	5.0E0	6.87E2	4.7E2	-7.44059E-2	-8.79991E1	-1.04904E-3	-8.80007E1	2.14577E-4	5.45979E-3	9.30071E-2	2.73787E1	-3.26625E1	-3.26017E1	2.67926E1	1.1929E-7	2.50882E-3	2.50882E-3	6.32896E-3	1.80099E-1
1.8E1	4.0651E4	1.8E1	7.27E2	5.0E2	-7.40967E-2	-8.79993E1	-8.58307E-4	-8.8001E1	1.19209E-4	5.45979E-3	9.30071E-2	2.73776E1	-3.26909E1	-3.26527E1	2.68225E1	1.1929E-7	2.52342E-3	2.52342E-3	6.30212E-3	1.80022E-1
1.9E1	2.66E3	5.0E0	7.68E2	5.29E2	-7.41738E-2	-8.79995E1	-9.29832E-4	-8.80006E1	3.33786E-4	5.29289E-3	9.32455E-2	2.73021E1	-3.26785E1	-3.25812E1	2.67862E1	1.1929E-7	2.51411E-3	2.51411E-3	6.33065E-3	1.79443E-1
2.0E1	8.57E2	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.79994E1	-7.62939E-4	-8.80007E1	1.43051E-4	5.34058E-3	9.30309E-2	2.73538E1	-3.27005E1	-3.26308E1	2.6801E1	1.1858E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.79792E-1
2.1E1	1.0E0	1.0E0	8.49E2	5.88E2	-7.30918E-2	-8.79997E1	-7.15256E-4	-8.80004E1	1.19209E-4	5.38826E-3	9.32693E-2	2.73119E1	-3.26579E1	-3.26197E1	2.68238E1	1.18928E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.79866E-1
2.2E1	7.4E1	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.79998E1	-7.86781E-4	-8.80004E1	5.24521E-4	5.45979E-3	9.31263E-2	2.72919E1	-3.26314E1	-3.24692E1	2.68058E1	1.1929E-7	2.51886E-3	2.51886E-3	6.323E-3	1.79948E-1
2.3E1	5.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.79987E1	-8.82149E-4	-8.80005E1	1.19209E-4	5.57899E-3	9.32217E-2	2.72809E1	-3.26891E1	-3.26119E1	2.68262E1	1.1929E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.80649E-1