[Scan]
initial_time=2015-12-15T23:50:16
final_time=2015-12-15T23:50:36
ip_count=19
run=1017
dataset=4
scan=238
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.79943E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-1.55517E-9
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=7.04038E-10
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-4.68919E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=3.39088E-9
mult1=-1.07761E-8
mult2=-2.71542E-9
rf_tmon=-3.69541E-3
rf_agc=3.2967E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=5.22494E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67335E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.98884E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12484E2
lens4a_imon=2.04826E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53748E1
cs_ef1b_imon=2.95964E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04583E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=2.29093E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00471E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64741E1
os_ef1alow_imon=2.97333E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03877E1
cs_ea2_imon=1.55336E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83451E1
cs_ef1a_imon=2.9791E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.15174E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=3.08433E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=1.97081E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28274E0
cs_ionrep_imon=1.23144E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91857E2
cs_nozzle_imon=1.93305E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=3.13046E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=7.44228E-9
tplens_vset=1.4E-1
tplens_vmon=1.61019E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26585E1
iondef3_imon=1.48703E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26614E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02954E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=6.38855E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28635E0
ionrepsh_imon=1.89078E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33886E1
lens5b_imon=2.15755E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74357E1
cs_ef2b_imon=3.1092E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.49057E-1
os_ea2_imon=-6.02162E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00352E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71192E1
cs_ef2a_imon=3.17767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55191E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.72486E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.9445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23102E2
cs_ionfoca_imon=6.30181E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.2774E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72809E1
iondef1_imon=1.09121E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68346E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=2.81576E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=1.23972E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-1.96719E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47132E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55967E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.49468E-1
window_imon=-1.05538E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39008E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=6.89254E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93681E3
defgrida_imon=6.29411E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50107E3
multb_neg_imon=7.04755E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.23283E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33425E1
os_fil1_imon=8.97413E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75683E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65392E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30692E1
cs_fil1_imon=1.00126E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62594E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65675E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.6094E-2
os_fil2_imon=-3.12247E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.6619E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8719E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36255E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.92058E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22426E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.79792E-1
chamber_ion_pmon=1.19239E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.17556E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.153E3	4.0E0	1.47E2	4.1E1	-7.21643E-2	-8.79993E1	-1.09673E-3	-8.80004E1	-1.43051E-4	5.43594E-3	9.28402E-2	2.72903E1	-3.26891E1	-3.26225E1	2.68238E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.80335E-1
2.0E0	4.391E3	6.0E0	3.16E2	1.6E2	-7.24736E-2	-8.79996E1	-7.15256E-4	-8.80004E1	2.38419E-5	5.43594E-3	9.31978E-2	2.73192E1	-3.26523E1	-3.26297E1	2.68202E1	1.1929E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.80099E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.79996E1	-7.86781E-4	-8.80004E1	-2.38419E-5	5.38826E-3	9.31025E-2	2.72918E1	-3.267E1	-3.26515E1	2.68053E1	1.1929E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.79465E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.79998E1	-9.05991E-4	-8.80006E1	9.53674E-5	5.62668E-3	9.33409E-2	2.73277E1	-3.25948E1	-3.26627E1	2.68298E1	1.1929E-7	2.51701E-3	2.51701E-3	6.3074E-3	1.79906E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.79996E1	-9.29832E-4	-8.80006E1	-1.43051E-4	5.38826E-3	9.32455E-2	2.72727E1	-3.26633E1	-3.26074E1	2.68232E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.79994E1	-8.34465E-4	-8.80005E1	1.43051E-4	5.36442E-3	9.30071E-2	2.72732E1	-3.26338E1	-3.2621E1	2.68253E1	1.19265E-7	2.51761E-3	2.51761E-3	6.32328E-3	1.7957E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.79994E1	-7.15256E-4	-8.80008E1	2.38419E-5	5.19753E-3	9.33409E-2	2.73286E1	-3.26464E1	-3.26241E1	2.68349E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.79995E1	-6.91414E-4	-8.80006E1	-1.90735E-4	5.34058E-3	9.30786E-2	2.73128E1	-3.26779E1	-3.26124E1	2.68395E1	1.1929E-7	2.51411E-3	2.51411E-3	6.32483E-3	1.80603E-1
1.2E1	2.45E2	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.79997E1	-7.86781E-4	-8.80003E1	4.76837E-5	5.26905E-3	9.32455E-2	2.73578E1	-3.26138E1	-3.26347E1	2.67938E1	1.1929E-7	2.51287E-3	2.51287E-3	6.31798E-3	1.80022E-1
1.3E1	3.4E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.79997E1	-7.86781E-4	-8.80006E1	-1.66893E-4	5.62668E-3	9.30548E-2	2.72968E1	-3.26871E1	-3.26133E1	2.67845E1	1.1929E-7	2.51417E-3	2.51417E-3	6.31278E-3	1.80406E-1
1.4E1	8.924E3	8.0E0	5.66E2	3.82E2	-7.34782E-2	-8.8E1	-9.05991E-4	-8.80004E1	-1.66893E-4	5.45979E-3	9.31263E-2	2.73458E1	-3.26832E1	-3.26372E1	2.6829E1	1.1929E-7	2.51498E-3	2.51498E-3	6.29603E-3	1.80022E-1
1.5E1	1.36E2	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.79997E1	-7.15256E-4	-8.80003E1	-2.86102E-4	5.24521E-3	9.30548E-2	2.72787E1	-3.26404E1	-3.26645E1	2.68213E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.80022E-1
1.6E1	3.226E3	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.79999E1	-6.67572E-4	-8.80006E1	0.0E0	5.55515E-3	9.32693E-2	2.73219E1	-3.26518E1	-3.26062E1	2.6814E1	1.1929E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.80179E-1
1.7E1	9.25E3	4.0E0	6.87E2	4.7E2	-7.32464E-2	-8.79999E1	-3.09944E-4	-8.80003E1	3.33786E-4	5.50747E-3	9.32693E-2	2.73157E1	-3.26484E1	-3.26714E1	2.6816E1	1.17423E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.79485E-1
1.8E1	4.1458E4	2.0E1	7.27E2	5.0E2	-7.33239E-2	-8.79999E1	-6.19888E-4	-8.80005E1	5.48363E-4	5.31673E-3	9.31025E-2	2.73339E1	-3.26861E1	-3.26326E1	2.68232E1	1.1929E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.80492E-1
1.9E1	2.854E3	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.79998E1	-7.86781E-4	-8.80003E1	7.86781E-4	5.57899E-3	9.31978E-2	2.72797E1	-3.26413E1	-3.2629E1	2.68202E1	1.1929E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.80179E-1
2.0E1	8.0E2	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.79999E1	-7.15256E-4	-8.80007E1	6.4373E-4	5.67436E-3	9.32455E-2	2.72985E1	-3.26681E1	-3.26386E1	2.6825E1	1.1929E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.79792E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.8E1	-5.96046E-4	-8.80006E1	1.19209E-4	5.22137E-3	9.31978E-2	2.73303E1	-3.26753E1	-3.26092E1	2.68076E1	1.19238E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.79866E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80002E1	-8.10623E-4	-8.80006E1	3.09944E-4	5.65052E-3	9.33886E-2	2.74384E1	-3.28372E1	-3.26024E1	2.68186E1	1.1929E-7	2.51662E-3	2.51662E-3	6.28006E-3	1.79866E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80002E1	-7.15256E-4	-8.80005E1	3.09944E-4	5.8651E-3	9.32217E-2	2.72809E1	-3.26614E1	-3.26585E1	2.68346E1	1.19239E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.79792E-1