[Scan]
initial_time=2015-12-15T23:50:44
final_time=2015-12-15T23:51:03
ip_count=19
run=1017
dataset=4
scan=239
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.82555E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-1.37849E-9
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=6.603E-10
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-4.10457E-9
ql4_vset=
ql4_vmon=1.43051E-4
ql4_imon=3.41784E-9
mult1=-9.80059E-9
mult2=-2.79646E-9
rf_tmon=-4.28411E-3
rf_agc=3.2174E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=5.42176E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68957E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20169E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04667E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53893E1
cs_ef1b_imon=2.95855E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.01923E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04712E1
cs_ea1_imon=2.31869E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04797E0
lens1_imon=1.4815E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64656E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03991E1
cs_ea2_imon=1.55264E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84562E1
cs_ef1a_imon=2.9654E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=2.15549E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=3.10379E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14771E1
os_ea1_imon=1.94053E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.10487E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27613E0
cs_ionrep_imon=1.22171E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93301E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01917E1
cs_anode1_imon=3.12974E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=7.45167E-9
tplens_vset=1.4E-1
tplens_vmon=1.56993E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49857E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=6.05118E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2545E0
ionrepsh_imon=1.89078E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.16728E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.11749E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.52061E-1
os_ea2_imon=-7.5357E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00619E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55371E0
os_ef2alow_imon=-2.76727E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.83298E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10805E1
os_restr2_imon=2.94918E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.25254E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68184E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.81705E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=1.2299E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14636E0
cs_ionaccel_imon=-2.05008E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57288E1
einzel_imon=7.98697E-6
window_vset=0.0E0
window_vmon=1.42861E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.38875E-4
mask2_vset=0.0E0
mask2_vmon=-1.86224E1
mask2_imon=-7.20213E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.62795E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.08863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=5.95885E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33454E1
os_fil1_imon=8.96085E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76524E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65571E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30728E1
cs_fil1_imon=1.00119E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61633E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65751E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-2.99633E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.89615E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75331E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38586E-1
cs_fil2_imon=-2.68999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.14823E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22437E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=1.79945E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.32573E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.956E3	8.0E0	1.47E2	4.1E1	-7.44059E-2	-8.80004E1	-6.91414E-4	-8.80001E1	1.19209E-4	5.55515E-3	9.28879E-2	2.73448E1	-3.26789E1	-3.26392E1	2.6818E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.80022E-1
2.0E0	4.339E3	5.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80002E1	-6.4373E-4	-8.8E1	4.29153E-4	5.43594E-3	9.30309E-2	2.73146E1	-3.26523E1	-3.26048E1	2.68004E1	1.19239E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.8056E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80003E1	-8.10623E-4	-8.80003E1	3.57628E-4	5.14984E-3	9.27925E-2	2.73045E1	-3.26329E1	-3.26372E1	2.68348E1	1.1929E-7	2.51679E-3	2.51679E-3	6.3074E-3	1.79948E-1
4.0E0	1.3E1	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80002E1	-6.19888E-4	-8.80006E1	2.86102E-4	5.53131E-3	9.30071E-2	2.73093E1	-3.26585E1	-3.25942E1	2.68088E1	1.1929E-7	2.51725E-3	2.51725E-3	6.3074E-3	1.80022E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80002E1	-7.39098E-4	-8.80005E1	3.8147E-4	5.72205E-3	9.27925E-2	2.73235E1	-3.26817E1	-3.26499E1	2.68316E1	1.1929E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.80022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80005E1	-7.86781E-4	-8.80005E1	4.76837E-5	5.65052E-3	9.29356E-2	2.7334E1	-3.26655E1	-3.26402E1	2.68208E1	1.19237E-7	2.51804E-3	2.51804E-3	6.32418E-3	1.79783E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80005E1	-7.39098E-4	-8.80004E1	4.76837E-5	5.76973E-3	9.26971E-2	2.72974E1	-3.26425E1	-3.26119E1	2.6792E1	1.1929E-7	2.52384E-3	2.52384E-3	6.30202E-3	1.80099E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80002E1	-5.00679E-4	-8.80004E1	4.29153E-4	5.55515E-3	9.27448E-2	2.72847E1	-3.26951E1	-3.26428E1	2.67998E1	1.1929E-7	2.51525E-3	2.51525E-3	6.33977E-3	1.79945E-1
1.2E1	2.34E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80004E1	-4.05312E-4	-8.80006E1	3.09944E-4	5.62668E-3	9.27925E-2	2.73075E1	-3.26518E1	-3.25858E1	2.68202E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.80179E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80007E1	-6.67572E-4	-8.80003E1	2.38419E-4	5.38826E-3	9.26971E-2	2.73187E1	-3.2698E1	-3.26077E1	2.67848E1	1.1929E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.79398E-1
1.4E1	8.951E3	1.0E0	5.66E2	3.82E2	-7.47923E-2	-8.80007E1	-4.52995E-4	-8.80004E1	-4.76837E-5	5.34058E-3	9.29594E-2	2.73161E1	-3.26878E1	-3.26315E1	2.67938E1	1.18438E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.7971E-1
1.5E1	1.25E2	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80007E1	-5.48363E-4	-8.80003E1	1.43051E-4	5.50747E-3	9.28402E-2	2.7312E1	-3.26428E1	-3.26422E1	2.67984E1					
1.6E1	3.239E3	4.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80007E1	-5.00679E-4	-8.80002E1	-7.15256E-5	5.05447E-3	9.27687E-2	2.73339E1	-3.26506E1	-3.26446E1	2.6819E1	1.17801E-7	2.52342E-3	2.52342E-3	6.31798E-3	1.80626E-1
1.7E1	9.288E3	3.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80006E1	-8.82149E-4	-8.80002E1	1.19209E-4	5.26905E-3	9.30548E-2	2.73526E1	-3.26242E1	-3.26338E1	2.67992E1	1.19238E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.80492E-1
1.8E1	4.1085E4	2.2E1	7.27E2	5.0E2	-7.42513E-2	-8.80004E1	-7.86781E-4	-8.80001E1	2.38419E-4	5.48363E-3	9.28402E-2	2.73021E1	-3.26815E1	-3.26107E1	2.68028E1	1.1929E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.79866E-1
1.9E1	2.828E3	0.0E0	7.68E2	5.29E2	-7.35556E-2	-8.80003E1	-6.67572E-4	-8.80001E1	1.19209E-4	5.05447E-3	9.29356E-2	2.73279E1	-3.26759E1	-3.26398E1	2.68134E1	1.19239E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.80099E-1
2.0E1	8.08E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80004E1	-3.8147E-4	-8.80001E1	1.43051E-4	5.36442E-3	9.29356E-2	2.73045E1	-3.2649E1	-3.26467E1	2.68064E1	1.19239E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.79792E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80007E1	-5.72205E-4	-8.80003E1	7.15256E-5	5.36442E-3	9.27448E-2	2.72663E1	-3.26695E1	-3.25988E1	2.68331E1	1.19238E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.79554E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.44831E-2	-8.80007E1	-3.33786E-4	-8.80003E1	3.09944E-4	5.43594E-3	9.28879E-2	2.72101E1	-3.25411E1	-3.26178E1	2.68058E1	1.1929E-7	2.51393E-3	2.51393E-3	6.31269E-3	1.7957E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80006E1	-4.05312E-4	-8.80006E1	1.43051E-4	5.67436E-3	9.28402E-2	2.72901E1	-3.26729E1	-3.262E1	2.68184E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.79945E-1