[Scan]
initial_time=2015-12-15T23:52:05
final_time=2015-12-15T23:52:25
ip_count=19
run=1017
dataset=4
scan=242
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40192E-2
qbias_imon=-3.82207E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-1.04439E-9
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=6.40571E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-3.23023E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=3.24326E-9
mult1=-9.85401E-9
mult2=-2.72718E-9
rf_tmon=-4.60976E-3
rf_agc=3.19405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.43594E-3
ql5_imon=5.15378E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.19168E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20163E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12594E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53814E1
cs_ef1b_imon=2.95279E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0497E1
cs_ea1_imon=2.29959E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02213E0
lens1_imon=1.4094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64729E1
os_ef1alow_imon=2.96288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03925E1
cs_ea2_imon=1.54074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83956E1
cs_ef1a_imon=2.97693E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=2.16168E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=3.1056E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=1.94991E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64068E1
os_ef1bup_imon=3.06956E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27373E0
cs_ionrep_imon=1.23324E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93283E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02073E1
cs_anode1_imon=3.10235E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.36457E-9
tplens_vset=1.4E-1
tplens_vmon=1.58435E0
tplens_imon=-3.5342E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.259E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.60203E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=6.10614E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27493E0
ionrepsh_imon=1.90196E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33658E1
lens5b_imon=2.15286E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74441E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.02794E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.2202E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.51466E0
os_ef2alow_imon=-3.02315E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.61674E-1
os_ef2bup_imon=-5.53151E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=2.98594E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.29568E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01869E1
cs_anode2_imon=2.27056E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72951E1
iondef1_imon=1.08291E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.09386E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.78815E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=1.24477E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13855E0
cs_ionaccel_imon=-1.64643E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02046E2
cs_ionfocb_imon=1.46902E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57288E1
einzel_imon=7.7419E-6
window_vset=0.0E0
window_vmon=1.43461E-1
window_imon=-9.76095E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82606E2
mask1_imon=2.38789E-4
mask2_vset=0.0E0
mask2_vmon=-1.86074E1
mask2_imon=-7.23817E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=6.85649E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.68345E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.66039E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33429E1
os_fil1_imon=8.97575E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.8169E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65539E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=1.00158E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62504E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66001E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.50622E-2
os_fil2_imon=-3.17052E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.64988E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.81647E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3755E-1
cs_fil2_imon=-2.54584E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.91727E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22384E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.80179E-1
chamber_ion_pmon=1.1929E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34975E-1
res40_imon=-2.59788E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.229E3	3.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80012E1	-9.53674E-4	-8.79999E1	2.6226E-4	5.50747E-3	9.30548E-2	2.73134E1	-3.26791E1	-3.26396E1	2.67836E1	1.1867E-7	2.51552E-3	2.51552E-3	6.32936E-3	1.80335E-1
2.0E0	4.386E3	1.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80009E1	-8.82149E-4	-8.80003E1	2.6226E-4	5.62668E-3	9.30071E-2	2.72782E1	-3.26223E1	-3.26591E1	2.67986E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.80406E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80009E1	-7.15256E-4	-8.80001E1	2.38419E-4	5.50747E-3	9.27687E-2	2.73069E1	-3.26767E1	-3.26602E1	2.68106E1	1.1929E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.80581E-1
4.0E0	2.2E1	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80009E1	-7.86781E-4	-8.80002E1	1.90735E-4	5.67436E-3	9.33409E-2	2.72886E1	-3.26585E1	-3.26319E1	2.67821E1	1.1929E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.79945E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.8001E1	-8.10623E-4	-8.80003E1	-1.90735E-4	5.53131E-3	9.32932E-2	2.73271E1	-3.26352E1	-3.26193E1	2.68138E1	1.1929E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.79945E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.80009E1	-7.39098E-4	-8.80001E1	-7.15256E-5	5.50747E-3	9.30548E-2	2.7311E1	-3.26549E1	-3.26408E1	2.68001E1	1.18763E-7	2.52139E-3	2.52139E-3	6.35223E-3	1.80102E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.80009E1	-9.05991E-4	-8.80002E1	7.15256E-5	5.6982E-3	9.2864E-2	2.73231E1	-3.2635E1	-3.26146E1	2.68064E1	1.16873E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.7918E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80008E1	-9.29832E-4	-8.80001E1	2.38419E-4	5.38826E-3	9.27925E-2	2.73339E1	-3.26747E1	-3.26206E1	2.68406E1	1.1693E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.79866E-1
1.2E1	2.76E2	0.0E0	4.85E2	3.23E2	-7.43285E-2	-8.80007E1	-1.04904E-3	-8.8E1	-2.38419E-5	5.60284E-3	9.29117E-2	2.73478E1	-3.26633E1	-3.25797E1	2.68142E1	1.17573E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.79945E-1
1.3E1	2.1E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80008E1	-1.19209E-3	-8.8E1	1.43051E-4	6.00815E-3	9.30786E-2	2.73448E1	-3.26615E1	-3.26122E1	2.67944E1	1.19186E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.79866E-1
1.4E1	9.191E3	1.1E1	5.66E2	3.82E2	-7.35556E-2	-8.80007E1	-1.07288E-3	-8.80001E1	9.53674E-5	5.84126E-3	9.32455E-2	2.73399E1	-3.26644E1	-3.26585E1	2.6804E1	1.19238E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.79866E-1
1.5E1	1.57E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80009E1	-5.00679E-4	-8.8E1	2.38419E-5	5.45979E-3	9.34362E-2	2.73039E1	-3.26849E1	-3.26344E1	2.68028E1	1.1929E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.7971E-1
1.6E1	3.224E3	1.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80008E1	-6.67572E-4	-8.8E1	0.0E0	5.48363E-3	9.32455E-2	2.72862E1	-3.26685E1	-3.2636E1	2.68018E1	1.1929E-7	2.5131E-3	2.5131E-3	6.31278E-3	1.80253E-1
1.7E1	9.406E3	7.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80008E1	-2.86102E-4	-8.79999E1	1.66893E-4	5.57899E-3	9.35316E-2	2.73237E1	-3.26825E1	-3.26266E1	2.68154E1	1.1929E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.80179E-1
1.8E1	4.1211E4	1.6E1	7.27E2	5.0E2	-7.46377E-2	-8.80007E1	-3.8147E-4	-8.79999E1	9.53674E-5	5.50747E-3	9.31263E-2	2.72873E1	-3.26682E1	-3.26309E1	2.68004E1	1.1929E-7	2.51552E-3	2.51552E-3	6.29098E-3	1.80335E-1
1.9E1	2.744E3	0.0E0	7.68E2	5.29E2	-7.44831E-2	-8.80008E1	-3.57628E-4	-8.79997E1	2.14577E-4	5.34058E-3	9.30309E-2	2.73252E1	-3.26514E1	-3.26449E1	2.68148E1	1.1929E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.79398E-1
2.0E1	8.23E2	1.0E0	8.08E2	5.58E2	-7.50241E-2	-8.80009E1	-3.57628E-4	-8.79995E1	0.0E0	5.6982E-3	9.30548E-2	2.72793E1	-3.26573E1	-3.26242E1	2.68016E1	1.1929E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.79554E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80012E1	-4.05312E-4	-8.8E1	-9.53674E-5	5.74589E-3	9.30309E-2	2.73184E1	-3.26023E1	-3.26382E1	2.67926E1	1.1929E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.79792E-1
2.2E1	6.9E1	0.0E0	8.89E2	6.17E2	-7.47149E-2	-8.80013E1	-1.00136E-3	-8.79997E1	1.90735E-4	5.48363E-3	9.33886E-2	2.71573E1	-3.25263E1	-3.27312E1	2.68052E1	1.19239E-7	2.52061E-3	2.52061E-3	6.28592E-3	1.8056E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.40192E-2	-8.80013E1	-1.0252E-3	-8.8E1	2.6226E-4	5.43594E-3	9.3317E-2	2.72951E1	-3.26543E1	-3.259E1	2.68088E1	1.1929E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.80179E-1