[Scan]
initial_time=2015-12-15T23:52:59
final_time=2015-12-15T23:53:19
ip_count=19
run=1017
dataset=4
scan=244
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.40967E-2
qbias_imon=-3.81096E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-1.0095E-9
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=6.31428E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.91885E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=3.25416E-9
mult1=-9.06196E-9
mult2=-2.49788E-9
rf_tmon=-5.94294E-3
rf_agc=3.18285E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=4.95994E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64451E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53947E1
cs_ef1b_imon=2.94738E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04561E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05571E1
cs_ea1_imon=2.29598E-5
lens1_vset=-2.7E0
lens1_vmon=-2.97707E0
lens1_imon=1.78071E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64104E1
os_ef1alow_imon=2.95855E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0375E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85001E1
cs_ef1a_imon=2.99243E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=2.16166E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=3.07244E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15492E1
os_ea1_imon=1.94125E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63263E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26952E0
cs_ionrep_imon=1.2455E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.92959E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=3.15893E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=7.38294E-9
tplens_vset=1.4E-1
tplens_vmon=1.56513E0
tplens_imon=-4.25519E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.48306E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26838E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98335E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=5.88787E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30317E0
ionrepsh_imon=1.89691E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33868E1
lens5b_imon=2.20442E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74627E1
cs_ef2b_imon=3.12073E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.03394E-1
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00327E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.18308E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53449E0
os_ef2alow_imon=-2.99432E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.28037E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11286E1
os_restr2_imon=2.95026E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.30253E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01917E1
cs_anode2_imon=2.27704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73004E1
iondef1_imon=1.06561E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68534E1
iondef4_imon=1.05422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.81643E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=1.24693E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07668E0
cs_ionaccel_imon=-1.94196E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02108E2
cs_ionfocb_imon=1.47417E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55546E1
einzel_imon=7.33465E-6
window_vset=0.0E0
window_vmon=1.68689E-1
window_imon=-1.12386E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.38907E-4
mask2_vset=0.0E0
mask2_vmon=-1.8656E1
mask2_imon=-3.9946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=6.87091E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.55367E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57901E0
defgridb_imon=5.87594E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33423E1
os_fil1_imon=8.95503E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.71539E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65769E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30792E1
cs_fil1_imon=1.003E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62288E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65542E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55781E-2
os_fil2_imon=-3.07442E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.49972E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.53677E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38068E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.45457E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.79792E-1
chamber_ion_pmon=1.18327E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.22962E-1
res40_imon=-2.58707E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.084E3	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80014E1	-4.05312E-4	-8.80001E1	2.38419E-5	4.86374E-3	9.3174E-2	2.73225E1	-3.26819E1	-3.26524E1	2.68226E1	1.1831E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.80963E-1
2.0E0	4.501E3	5.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80011E1	-3.8147E-4	-8.80001E1	-1.19209E-4	5.36442E-3	9.3174E-2	2.73131E1	-3.26523E1	-3.26181E1	2.67974E1	1.19137E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.79792E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80011E1	-3.09944E-4	-8.80002E1	-2.38419E-5	5.43594E-3	9.3317E-2	2.7253E1	-3.26758E1	-3.26341E1	2.68099E1	1.17717E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.80901E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-7.40967E-2	-8.80012E1	-7.15256E-4	-8.80001E1	-3.09944E-4	5.45979E-3	9.32455E-2	2.73311E1	-3.2675E1	-3.26738E1	2.67675E1	1.16965E-7	2.51919E-3	2.51919E-3	6.3074E-3	1.79871E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80013E1	-7.39098E-4	-8.80003E1	-2.6226E-4	5.48363E-3	9.30786E-2	2.73189E1	-3.26633E1	-3.26308E1	2.68192E1	1.1693E-7	2.52867E-3	2.52867E-3	6.31288E-3	1.80179E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80011E1	-7.15256E-4	-8.80002E1	-2.14577E-4	5.55515E-3	9.31501E-2	2.73045E1	-3.26549E1	-3.26098E1	2.67944E1	1.18226E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.80253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80011E1	-6.19888E-4	-8.80003E1	2.38419E-5	5.74589E-3	9.34362E-2	2.72979E1	-3.26687E1	-3.2644E1	2.67852E1	1.1803E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.79306E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80013E1	-5.24521E-4	-8.80001E1	2.86102E-4	5.96046E-3	9.3317E-2	2.73568E1	-3.26026E1	-3.2599E1	2.68613E1	1.17523E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.79332E-1
1.2E1	2.26E2	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80011E1	-7.39098E-4	-8.8E1	1.43051E-4	5.48363E-3	9.33409E-2	2.72585E1	-3.26443E1	-3.26278E1	2.6831E1	1.17414E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.79788E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.8001E1	-7.15256E-4	-8.80001E1	2.86102E-4	5.45979E-3	9.36508E-2	2.72378E1	-3.26344E1	-3.26705E1	2.68292E1					
1.4E1	9.105E3	2.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80017E1	-7.62939E-4	-8.80001E1	-2.38419E-5	5.60284E-3	9.34362E-2	2.72732E1	-3.26201E1	-3.26419E1	2.67769E1	1.1929E-7	2.5131E-3	2.5131E-3	6.30202E-3	1.80253E-1
1.5E1	1.3E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80015E1	-6.67572E-4	-8.80002E1	3.09944E-4	5.6982E-3	9.32932E-2	2.72721E1	-3.26461E1	-3.26325E1	2.68454E1	1.17924E-7	2.51954E-3	2.51954E-3	6.35601E-3	1.8056E-1
1.6E1	3.274E3	2.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80017E1	-5.96046E-4	-8.8E1	3.33786E-4	5.29289E-3	9.3174E-2	2.73267E1	-3.26855E1	-3.26026E1	2.68058E1	1.1831E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.79554E-1
1.7E1	9.488E3	5.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80016E1	-9.05991E-4	-8.80002E1	2.14577E-4	5.31673E-3	9.32932E-2	2.7355E1	-3.26651E1	-3.26242E1	2.68232E1	1.18479E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.80099E-1
1.8E1	4.1114E4	2.5E1	7.27E2	5.0E2	-7.40967E-2	-8.80014E1	-9.77516E-4	-8.80002E1	4.29153E-4	5.43594E-3	9.3174E-2	2.73731E1	-3.26873E1	-3.25956E1	2.68124E1	1.1778E-7	2.52007E-3	2.52007E-3	6.32017E-3	1.80168E-1
1.9E1	2.825E3	2.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80017E1	-9.29832E-4	-8.8E1	3.33786E-4	5.45979E-3	9.32455E-2	2.72895E1	-3.26765E1	-3.26326E1	2.68076E1					
2.0E1	8.1E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80014E1	-5.72205E-4	-8.80001E1	4.05312E-4	5.34058E-3	9.31263E-2	2.73058E1	-3.26924E1	-3.26201E1	2.68785E1	1.19188E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.80099E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37874E-2	-8.80013E1	-6.91414E-4	-8.79999E1	3.09944E-4	5.00679E-3	9.36508E-2	2.73105E1	-3.26663E1	-3.26002E1	2.67884E1	1.1903E-7	2.51258E-3	2.51258E-3	6.32118E-3	1.80317E-1
2.2E1	7.8E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80013E1	-9.29832E-4	-8.80002E1	5.72205E-4	5.31673E-3	9.31501E-2	2.73116E1	-3.26649E1	-3.27192E1	2.68343E1	1.16923E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.79639E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.40967E-2	-8.80013E1	-6.4373E-4	-8.80001E1	3.57628E-4	5.22137E-3	9.35078E-2	2.73004E1	-3.26838E1	-3.26071E1	2.68534E1	1.18327E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.79792E-1