[Scan]
initial_time=2015-12-15T23:53:26
final_time=2015-12-15T23:53:46
ip_count=19
run=1017
dataset=4
scan=245
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.80341E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-9.57358E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=6.57523E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.8419E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=3.30462E-9
mult1=-8.54837E-9
mult2=-2.71661E-9
rf_tmon=-3.77341E-3
rf_agc=3.22281E-2
counter1=6
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=4.92585E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70462E0
bslens_imon=2.6055E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19792E1
lens5a_imon=1.98317E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12556E2
lens4a_imon=2.05214E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53905E1
cs_ef1b_imon=2.94234E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02044E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04725E1
cs_ea1_imon=2.2917E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04512E0
lens1_imon=1.09958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6405E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.58135E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.99423E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=2.16816E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11496E1
os_restr1_imon=3.07676E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15318E1
os_ea1_imon=1.95526E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63719E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28332E0
cs_ionrep_imon=1.24307E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=3.13046E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=7.401E-9
tplens_vset=1.4E-1
tplens_vmon=1.57226E0
tplens_imon=-7.14868E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2623E1
iondef3_imon=1.47741E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2638E1
iondef2_imon=1.57107E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=6.13999E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26801E0
ionrepsh_imon=1.91265E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.20906E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74501E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.52832E-1
os_ea2_imon=-4.87144E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06127E2
lens4b_imon=2.00457E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70819E1
cs_ef2a_imon=3.1647E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55311E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.69483E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=2.96828E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01671E1
cs_anode2_imon=2.27236E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.0675E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67734E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.7885E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=1.24943E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10311E0
cs_ionaccel_imon=-2.03206E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.60495E-6
window_vset=0.0E0
window_vmon=1.88511E-1
window_imon=-1.28604E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39016E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92674E3
multa_neg_imon=8.14801E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93651E3
defgrida_imon=5.71283E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.50619E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43419E0
defgridb_imon=5.79731E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33474E1
os_fil1_imon=8.96902E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.7262E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65572E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30769E1
cs_fil1_imon=1.00201E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62306E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65625E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62181E-2
os_fil2_imon=-2.90623E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.71595E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82153E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35478E-1
cs_fil2_imon=-2.67197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.33773E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.80406E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.76711E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.148E3	4.0E0	1.47E2	4.1E1	-7.38649E-2	-8.80016E1	-6.4373E-4	-8.80002E1	-2.38419E-5	5.36442E-3	9.36747E-2	2.72808E1	-3.26503E1	-3.26359E1	2.68124E1	1.17032E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.80179E-1
2.0E0	4.553E3	5.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80018E1	-9.29832E-4	-8.80005E1	1.43051E-4	5.45979E-3	9.32932E-2	2.72608E1	-3.26479E1	-3.26703E1	2.67878E1	1.16674E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.79639E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80012E1	-8.82149E-4	-8.79999E1	4.76837E-5	5.65052E-3	9.33647E-2	2.73712E1	-3.2682E1	-3.25877E1	2.678E1	1.16886E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.81061E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-7.45602E-2	-8.80011E1	-9.53674E-4	-8.79999E1	-1.43051E-4	5.91278E-3	9.34362E-2	2.73309E1	-3.26705E1	-3.26092E1	2.68028E1	1.16774E-7	2.52815E-3	2.52815E-3	6.3074E-3	1.79945E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80013E1	-1.21593E-3	-8.80001E1	2.38419E-5	5.8651E-3	9.31501E-2	2.73341E1	-3.26544E1	-3.26272E1	2.67856E1	1.16778E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.80022E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44831E-2	-8.80014E1	-8.82149E-4	-8.80001E1	-1.43051E-4	5.48363E-3	9.28879E-2	2.73057E1	-3.26789E1	-3.26206E1	2.68136E1	1.16823E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.79945E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80015E1	-8.58307E-4	-8.8E1	-1.43051E-4	5.76973E-3	9.32932E-2	2.73033E1	-3.26537E1	-3.26284E1	2.67986E1	1.16727E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.79866E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80017E1	-8.10623E-4	-8.79999E1	4.05312E-4	5.4121E-3	9.35078E-2	2.73141E1	-3.26699E1	-3.26603E1	2.6843E1	1.16818E-7	2.52553E-3	2.52553E-3	6.31798E-3	1.79871E-1
1.2E1	2.45E2	0.0E0	4.85E2	3.23E2	-7.37874E-2	-8.80018E1	-8.10623E-4	-8.79996E1	9.53674E-5	5.45979E-3	9.30309E-2	2.73398E1	-3.26243E1	-3.26221E1	2.68094E1	1.16778E-7	2.51334E-3	2.51334E-3	6.3074E-3	1.79866E-1
1.3E1	1.4E1	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.80018E1	-4.05312E-4	-8.79999E1	3.33786E-4	5.31673E-3	9.3317E-2	2.73445E1	-3.26298E1	-3.26896E1	2.68138E1	1.16808E-7	2.52058E-3	2.52058E-3	6.32784E-3	1.80022E-1
1.4E1	9.245E3	7.0E0	5.66E2	3.82E2	-7.41738E-2	-8.80017E1	-6.19888E-4	-8.79999E1	1.66893E-4	5.29289E-3	9.3317E-2	2.72962E1	-3.26372E1	-3.26549E1	2.68105E1	1.17116E-7	2.51874E-3	2.51874E-3	6.31902E-3	1.80271E-1
1.5E1	1.35E2	0.0E0	6.06E2	4.11E2	-7.40192E-2	-8.80016E1	-8.58307E-4	-8.80001E1	0.0E0	5.53131E-3	9.32693E-2	2.72673E1	-3.26874E1	-3.26484E1	2.67824E1	1.16973E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.79639E-1
1.6E1	3.218E3	0.0E0	6.47E2	4.41E2	-7.37874E-2	-8.80016E1	-6.67572E-4	-8.79999E1	1.90735E-4	5.76973E-3	9.36508E-2	2.73237E1	-3.26278E1	-3.2653E1	2.67884E1	1.16778E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.80022E-1
1.7E1	9.402E3	5.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80014E1	-5.00679E-4	-8.79997E1	-2.38419E-5	5.43594E-3	9.32693E-2	2.73086E1	-3.26885E1	-3.26048E1	2.67962E1	1.16624E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.79792E-1
1.8E1	4.1163E4	2.6E1	7.27E2	5.0E2	-7.37874E-2	-8.80018E1	-6.4373E-4	-8.79999E1	-1.90735E-4	5.26905E-3	9.34839E-2	2.73207E1	-3.26711E1	-3.2614E1	2.68605E1	1.17439E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.79866E-1
1.9E1	2.71E3	1.0E0	7.68E2	5.29E2	-7.24736E-2	-8.80019E1	-6.67572E-4	-8.79999E1	3.09944E-4	5.14984E-3	9.31501E-2	2.73273E1	-3.26945E1	-3.26134E1	2.67852E1	1.16829E-7	2.51443E-3	2.51443E-3	6.29645E-3	1.79866E-1
2.0E1	7.85E2	2.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80015E1	-7.62939E-4	-8.8E1	1.90735E-4	5.29289E-3	9.30786E-2	2.73169E1	-3.26254E1	-3.26077E1	2.68082E1	1.17123E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.79792E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.80015E1	-8.10623E-4	-8.8E1	2.14577E-4	5.22137E-3	9.30071E-2	2.73279E1	-3.26296E1	-3.26422E1	2.67613E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.80335E-1
2.2E1	6.9E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80015E1	-9.29832E-4	-8.8E1	3.33786E-4	5.76973E-3	9.31025E-2	2.72048E1	-3.25228E1	-3.26673E1	2.68412E1	1.17073E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.80099E-1
2.3E1	6.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80014E1	-8.58307E-4	-8.80001E1	1.90735E-4	5.57899E-3	9.29594E-2	2.73351E1	-3.2638E1	-3.2623E1	2.67734E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.80406E-1