[Scan]
initial_time=2015-12-15T23:53:54
final_time=2015-12-15T23:54:16
ip_count=19
run=1017
dataset=4
scan=246
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.89186E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-9.49287E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=5.79309E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.62061E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=3.23373E-9
mult1=-8.89645E-9
mult2=-2.78205E-9
rf_tmon=-4.89881E-3
rf_agc=3.15158E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.81741E-3
ql5_imon=4.96697E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63429E0
bslens_imon=2.31425E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19881E1
lens5a_imon=1.99677E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.04729E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=2.90341E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=2.27219E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01973E0
lens1_imon=1.39498E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64632E1
os_ef1alow_imon=3.02162E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04483E1
cs_ea2_imon=1.55156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84526E1
cs_ef1a_imon=2.93224E-5
olens2_vset=9.7E-1
olens2_vmon=9.70578E-1
olens2_imon=2.16535E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.10895E1
os_restr1_imon=3.18272E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15053E1
os_ea1_imon=1.95207E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.00973E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29356E0
cs_ionrep_imon=1.23108E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93564E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=3.18921E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.37374E-9
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2662E1
iondef3_imon=1.48523E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26655E1
iondef2_imon=1.55516E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98227E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=5.84781E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30978E0
ionrepsh_imon=1.89187E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33634E1
lens5b_imon=2.17666E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74297E1
cs_ef2b_imon=3.10632E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.76695E-1
os_ea2_imon=-5.87742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71504E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53088E0
os_ef2alow_imon=-2.45012E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.51463E-1
os_ef2bup_imon=-5.4306E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10661E1
os_restr2_imon=2.94017E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01989E1
cs_anode2_imon=2.26443E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7308E1
iondef1_imon=1.09337E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67896E1
iondef4_imon=1.09602E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.78679E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82571E-1
olens1_imon=1.24673E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.81582E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.47093E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55168E1
einzel_imon=7.61216E-6
window_vset=0.0E0
window_vmon=7.73886E-2
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82683E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.85185E1
mask2_imon=-8.60768E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.04755E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.12108E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.35757E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.2148E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33433E1
os_fil1_imon=8.94926E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.74182E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65749E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30746E1
cs_fil1_imon=1.00101E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63345E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65737E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.54491E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.73397E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.75847E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.40139E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.578E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22453E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=1.79398E-1
chamber_ion_pmon=1.16677E-7
chamber_cvt_pmon=2.51443E-3
foreline_cvt_pmon=2.51443E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.71616E-1
res40_imon=-2.78889E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.154E3	1.0E0	1.47E2	4.1E1	-7.41738E-2	-8.80017E1	-1.38283E-3	-8.80003E1	9.53674E-5	5.76973E-3	9.30309E-2	2.73135E1	-3.26897E1	-3.26398E1	2.68314E1	1.1688E-7	2.52757E-3	2.52757E-3	6.29645E-3	1.79866E-1
2.0E0	4.434E3	6.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80018E1	-1.04904E-3	-8.80004E1	0.0E0	5.67436E-3	9.31263E-2	2.73324E1	-3.26476E1	-3.26528E1	2.67984E1	1.16823E-7	2.5131E-3	2.5131E-3	6.31817E-3	1.79792E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80018E1	-1.28746E-3	-8.80003E1	1.19209E-4	5.45979E-3	9.28879E-2	2.73207E1	-3.26861E1	-3.2632E1	2.67962E1	1.16965E-7	2.51709E-3	2.51709E-3	6.34982E-3	1.80173E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80017E1	-1.38283E-3	-8.80002E1	0.0E0	5.50747E-3	9.31025E-2	2.72967E1	-3.26741E1	-3.25719E1	2.67896E1	1.1693E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.80649E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80017E1	-1.12057E-3	-8.80002E1	1.43051E-4	5.60284E-3	9.30071E-2	2.73321E1	-3.26729E1	-3.26128E1	2.68106E1	1.16727E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.79398E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.80012E1	-9.05991E-4	-8.79999E1	3.57628E-4	5.4121E-3	9.32693E-2	2.73213E1	-3.26969E1	-3.25954E1	2.68124E1	1.16873E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.79792E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37874E-2	-8.80013E1	-9.29832E-4	-8.8E1	1.90735E-4	5.76973E-3	9.29832E-2	2.73139E1	-3.2698E1	-3.2616E1	2.67902E1	1.16829E-7	2.52538E-3	2.52538E-3	6.29645E-3	1.80335E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80014E1	-5.96046E-4	-8.8E1	3.09944E-4	5.93662E-3	9.3174E-2	2.73135E1	-3.26242E1	-3.26272E1	2.681E1	1.16778E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.80022E-1
1.2E1	2.1E2	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80018E1	-5.96046E-4	-8.8E1	1.90735E-4	5.98431E-3	9.31501E-2	2.73424E1	-3.26398E1	-3.25858E1	2.68018E1	1.16823E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.79792E-1
1.3E1	1.9E1	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80013E1	-5.00679E-4	-8.80002E1	2.14577E-4	5.88894E-3	9.31025E-2	2.72962E1	-3.26514E1	-3.26124E1	2.68502E1	1.1693E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.80335E-1
1.4E1	9.019E3	4.0E0	5.66E2	3.82E2	-7.27828E-2	-8.80015E1	-8.34465E-4	-8.80001E1	-2.38419E-5	5.81741E-3	9.29832E-2	2.72907E1	-3.26657E1	-3.25906E1	2.68436E1	1.16981E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.79866E-1
1.5E1	1.4E2	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80015E1	-7.39098E-4	-8.79999E1	1.19209E-4	5.50747E-3	9.31025E-2	2.73499E1	-3.26968E1	-3.25694E1	2.67644E1	1.16923E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.79945E-1
1.6E1	3.255E3	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80019E1	-8.10623E-4	-8.80004E1	1.66893E-4	5.31673E-3	9.31263E-2	2.7288E1	-3.26632E1	-3.2636E1	2.68273E1	1.16823E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.79639E-1
1.7E1	9.332E3	6.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80018E1	-8.34465E-4	-8.8E1	-7.15256E-5	5.74589E-3	9.31978E-2	2.7373E1	-3.26873E1	-3.25912E1	2.68034E1	1.16823E-7	2.52276E-3	2.52276E-3	6.33977E-3	1.80406E-1
1.8E1	4.1317E4	2.4E1	7.27E2	5.0E2	-7.38649E-2	-8.80019E1	-8.10623E-4	-8.80003E1	-1.19209E-4	5.93662E-3	9.3174E-2	2.73075E1	-3.26368E1	-3.26639E1	2.68088E1	1.16938E-7	2.52139E-3	2.52139E-3	6.32978E-3	1.79624E-1
1.9E1	2.814E3	1.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80017E1	-9.29832E-4	-8.79999E1	1.43051E-4	5.57899E-3	9.28402E-2	2.73039E1	-3.26747E1	-3.26753E1	2.6795E1	1.16724E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.79792E-1
2.0E1	7.73E2	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80018E1	-7.39098E-4	-8.80001E1	-1.90735E-4	5.79357E-3	9.29356E-2	2.72774E1	-3.26178E1	-3.2616E1	2.68268E1	1.17083E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.80649E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80017E1	-7.86781E-4	-8.8E1	2.38419E-5	5.74589E-3	9.29117E-2	2.7298E1	-3.26903E1	-3.25989E1	2.68169E1	1.16774E-7	2.52276E-3	2.52276E-3	6.34518E-3	1.80869E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80016E1	-9.05991E-4	-8.80001E1	0.0E0	5.29289E-3	9.28402E-2	2.74295E1	-3.28015E1	-3.26032E1	2.6774E1	1.17023E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.79485E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80016E1	-1.21593E-3	-8.80001E1	2.14577E-4	5.81741E-3	9.28402E-2	2.7308E1	-3.26655E1	-3.2662E1	2.67896E1	1.16677E-7	2.51443E-3	2.51443E-3	6.34037E-3	1.79398E-1