[Scan]
initial_time=2015-12-15T23:54:24
final_time=2015-12-15T23:54:46
ip_count=19
run=1017
dataset=4
scan=247
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.55652E-2
qbias_imon=-3.83912E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-9.23479E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=6.37984E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.6948E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=3.2344E-9
mult1=-1.05591E-8
mult2=-2.49305E-9
rf_tmon=-4.06781E-3
rf_agc=3.2925E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=4.91309E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68714E0
bslens_imon=2.54857E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19718E1
lens5a_imon=2.00408E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.0494E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54072E1
cs_ef1b_imon=2.96792E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04636E2
lens23_imon=1.02138E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04693E1
cs_ea1_imon=2.28253E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05161E0
lens1_imon=1.42575E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.93248E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03314E1
cs_ea2_imon=1.55357E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84041E1
cs_ef1a_imon=2.98461E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.16278E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11645E1
os_restr1_imon=3.08608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15641E1
os_ea1_imon=1.97141E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.09303E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26369E0
cs_ionrep_imon=1.23341E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93302E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01937E1
cs_anode1_imon=3.1184E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=7.30522E-9
tplens_vset=1.4E-1
tplens_vmon=1.58523E0
tplens_imon=-2.1154E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26008E1
iondef3_imon=1.46805E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26921E1
iondef2_imon=1.58868E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98224E-4
ql6_vset=1.0E-1
ql6_vmon=9.32932E-2
ql6_imon=5.95701E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28628E0
ionrepsh_imon=1.91162E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33797E1
lens5b_imon=2.17372E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75341E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.56975E-1
os_ea2_imon=-6.49541E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71443E1
cs_ef2a_imon=3.16984E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.54225E0
os_ef2alow_imon=-2.64756E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.09191E-1
os_ef2bup_imon=-5.42429E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11199E1
os_restr2_imon=2.97835E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23093E2
cs_ionfoca_imon=6.28503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01931E1
cs_anode2_imon=2.2548E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72901E1
iondef1_imon=1.08567E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09337E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.81736E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=1.23941E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13651E0
cs_ionaccel_imon=-2.1367E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02055E2
cs_ionfocb_imon=1.47473E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55519E1
einzel_imon=7.78167E-6
window_vset=0.0E0
window_vmon=1.66715E-1
window_imon=-1.12888E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.38768E-4
mask2_vset=0.0E0
mask2_vmon=-1.86153E1
mask2_imon=-4.79005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.89149E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9375E3
defgrida_imon=6.39325E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=7.07111E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42101E0
defgridb_imon=6.11515E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33459E1
os_fil1_imon=8.97398E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79218E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65816E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30737E1
cs_fil1_imon=1.00269E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.60559E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66059E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57347E-2
os_fil2_imon=-3.20785E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.64216E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61051E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35894E-1
cs_fil2_imon=-2.5128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39686E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2245E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.79639E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.74845E-1
res40_imon=-2.5016E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.09E3	7.0E0	1.47E2	4.1E1	-7.42513E-2	-8.80018E1	-4.76837E-4	-8.8E1	1.90735E-4	5.76973E-3	9.33647E-2	2.73737E1	-3.26836E1	-3.26083E1	2.67546E1	1.16774E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.80099E-1
2.0E0	4.253E3	4.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80018E1	-8.82149E-4	-8.8E1	-9.53674E-5	5.93662E-3	9.32217E-2	2.7355E1	-3.26759E1	-3.26134E1	2.68233E1	1.16778E-7	2.52867E-3	2.52867E-3	6.34037E-3	1.80179E-1
3.0E0	5.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80018E1	-9.77516E-4	-8.79998E1	7.15256E-5	5.62668E-3	9.31978E-2	2.73205E1	-3.26869E1	-3.26567E1	2.68366E1	1.16778E-7	2.52977E-3	2.52977E-3	6.31837E-3	1.79866E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-7.50241E-2	-8.80015E1	-1.0252E-3	-8.80001E1	7.15256E-5	5.76973E-3	9.32693E-2	2.72781E1	-3.26446E1	-3.26422E1	2.68046E1	1.16769E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.7927E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.46377E-2	-8.80019E1	-1.40667E-3	-8.79999E1	2.6226E-4	5.96046E-3	9.31978E-2	2.73626E1	-3.26646E1	-3.26346E1	2.68172E1	1.1688E-7	2.51443E-3	2.51443E-3	6.31837E-3	1.79554E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40967E-2	-8.80019E1	-1.23978E-3	-8.79999E1	3.8147E-4	5.79357E-3	9.31263E-2	2.73116E1	-3.2662E1	-3.26001E1	2.68178E1	1.17134E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.80022E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.41738E-2	-8.80016E1	-1.33514E-3	-8.80002E1	7.15256E-5	5.43594E-3	9.32693E-2	2.72871E1	-3.26615E1	-3.26392E1	2.6804E1	1.16823E-7	2.52707E-3	2.52707E-3	6.33436E-3	1.79945E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80019E1	-1.09673E-3	-8.80002E1	2.14577E-4	5.50747E-3	9.3174E-2	2.72721E1	-3.26627E1	-3.2629E1	2.68328E1	1.1693E-7	2.51662E-3	2.51662E-3	6.32386E-3	1.79866E-1
1.2E1	2.39E2	0.0E0	4.85E2	3.23E2	-7.49466E-2	-8.80017E1	-5.48363E-4	-8.80004E1	9.53674E-5	5.65052E-3	9.34362E-2	2.7348E1	-3.26718E1	-3.26156E1	2.68511E1	1.16778E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.79554E-1
1.3E1	2.0E1	0.0E0	5.25E2	3.53E2	-7.47149E-2	-8.80018E1	-8.58307E-4	-8.8E1	7.15256E-5	5.31673E-3	9.29356E-2	2.73302E1	-3.26487E1	-3.26266E1	2.68142E1	1.16769E-7	2.52448E-3	2.52448E-3	6.33388E-3	1.7957E-1
1.4E1	9.1E3	7.0E0	5.66E2	3.82E2	-7.43285E-2	-8.80016E1	-9.29832E-4	-8.80002E1	-1.90735E-4	5.72205E-3	9.28402E-2	2.72987E1	-3.26944E1	-3.26411E1	2.67902E1	1.16783E-7	2.52139E-3	2.52139E-3	6.29067E-3	1.79465E-1
1.5E1	1.16E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80015E1	-8.58307E-4	-8.79999E1	-2.38419E-5	5.57899E-3	9.34362E-2	2.73032E1	-3.26724E1	-3.26406E1	2.67732E1	1.16923E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.80406E-1
1.6E1	3.336E3	1.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80017E1	-1.0252E-3	-8.80002E1	4.76837E-5	5.43594E-3	9.32217E-2	2.73009E1	-3.26657E1	-3.26404E1	2.68004E1	1.1685E-7	2.52243E-3	2.52243E-3	6.32207E-3	1.80148E-1
1.7E1	9.348E3	6.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80016E1	-8.58307E-4	-8.79998E1	-9.53674E-5	5.76973E-3	9.31263E-2	2.73075E1	-3.26992E1	-3.26201E1	2.68285E1	1.16952E-7	2.52514E-3	2.52514E-3	6.32916E-3	1.80526E-1
1.8E1	4.0901E4	2.9E1	7.27E2	5.0E2	-7.42513E-2	-8.80016E1	-1.09673E-3	-8.79999E1	0.0E0	5.98431E-3	9.3317E-2	2.72276E1	-3.25143E1	-3.26194E1	2.68052E1					
1.9E1	2.951E3	6.0E0	7.68E2	5.29E2	-7.47923E-2	-8.80017E1	-1.0252E-3	-8.79996E1	-4.76837E-5	5.76973E-3	9.31025E-2	2.73165E1	-3.26669E1	-3.26206E1	2.68214E1	1.16981E-7	2.52647E-3	2.52647E-3	6.33486E-3	1.80649E-1
2.0E1	8.16E2	0.0E0	8.08E2	5.58E2	-7.47149E-2	-8.80015E1	-1.04904E-3	-8.79998E1	2.38419E-4	5.81741E-3	9.31263E-2	2.73157E1	-3.27056E1	-3.26113E1	2.68016E1	1.1688E-7	2.52428E-3	2.52428E-3	6.33486E-3	1.80806E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.52559E-2	-8.80015E1	-1.16825E-3	-8.79997E1	4.76837E-5	5.8651E-3	9.31025E-2	2.72915E1	-3.26767E1	-3.26225E1	2.68001E1	1.16973E-7	2.52384E-3	2.52384E-3	6.34518E-3	1.80099E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80018E1	-1.0252E-3	-8.8E1	1.19209E-4	6.00815E-3	9.29594E-2	2.73104E1	-3.2672E1	-3.26467E1	2.67908E1	1.16774E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.79945E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.55652E-2	-8.80019E1	-9.29832E-4	-8.79997E1	4.76837E-5	5.93662E-3	9.32932E-2	2.72901E1	-3.26921E1	-3.26008E1	2.6801E1	1.16873E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.79639E-1