[Scan]
initial_time=2015-12-15T23:54:54
final_time=2015-12-15T23:55:17
ip_count=19
run=1017
dataset=4
scan=248
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.81757E-6
ql1_vset=
ql1_vmon=-8.80017E1
ql1_imon=-9.18269E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=6.47104E-10
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-2.66687E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=3.27809E-9
mult1=-1.04567E-8
mult2=-2.70362E-9
rf_tmon=-4.98685E-3
rf_agc=3.25448E-2
counter1=3
counter2=1
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=4.79865E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67211E0
bslens_imon=2.2955E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=2.00209E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12528E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5336E1
cs_ef1b_imon=2.96271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.0182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05318E1
cs_ea1_imon=2.3132E-5
lens1_vset=-2.7E0
lens1_vmon=-2.99408E0
lens1_imon=1.16997E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64157E1
os_ef1alow_imon=2.9714E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03861E1
cs_ea2_imon=1.58727E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=2.96167E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=2.16309E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11477E1
os_restr1_imon=3.09408E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15659E1
os_ea1_imon=1.96209E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64047E1
os_ef1bup_imon=3.084E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=1.23474E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93321E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02128E1
cs_anode1_imon=3.13335E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20577E0
olens4_imon=7.35447E-9
tplens_vset=1.4E-1
tplens_vmon=1.57359E0
tplens_imon=-6.95301E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26303E1
iondef3_imon=1.50126E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26383E1
iondef2_imon=1.56709E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.98473E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=6.2021E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31817E0
ionrepsh_imon=1.89874E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3361E1
lens5b_imon=2.17021E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73256E1
cs_ef2b_imon=3.10276E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.31852E-1
os_ea2_imon=-3.94451E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06031E2
lens4b_imon=2.00357E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71391E1
cs_ef2a_imon=3.18791E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59264E0
os_ef2alow_imon=-2.58153E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.71543E-1
os_ef2bup_imon=-5.35479E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10573E1
os_restr2_imon=2.91163E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31379E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.26349E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73259E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68425E1
iondef4_imon=1.08295E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.75658E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=1.24082E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1452E0
cs_ionaccel_imon=-1.70229E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47056E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55195E1
einzel_imon=7.8616E-6
window_vset=0.0E0
window_vmon=1.36597E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39046E-4
mask2_vset=0.0E0
mask2_vmon=-1.86251E1
mask2_imon=-1.07675E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92597E3
multa_neg_imon=7.29668E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93668E3
defgrida_imon=6.3906E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28449E0
defgridb_imon=6.37644E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33436E1
os_fil1_imon=8.97977E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76091E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6583E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=1.00225E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62824E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65688E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67342E-2
os_fil2_imon=-3.10938E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.77538E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.70023E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36893E-1
cs_fil2_imon=-2.86612E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.15938E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22441E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.79485E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.99375E-1
res40_imon=-2.12627E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.104E3	3.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80017E1	-9.53674E-4	-8.79999E1	-1.43051E-4	5.4121E-3	9.31263E-2	2.73393E1	-3.2688E1	-3.26183E1	2.67908E1	1.16873E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.80406E-1
2.0E0	4.429E3	2.0E0	3.16E2	1.6E2	-7.38649E-2	-8.8002E1	-1.26362E-3	-8.80001E1	7.15256E-5	5.76973E-3	9.33886E-2	2.73321E1	-3.26825E1	-3.26494E1	2.68028E1	1.16778E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.80179E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80018E1	-1.26362E-3	-8.8E1	-2.38419E-5	5.29289E-3	9.31501E-2	2.73334E1	-3.26366E1	-3.26172E1	2.6847E1	1.16873E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.80406E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80018E1	-9.29832E-4	-8.79998E1	-1.19209E-4	5.60284E-3	9.29832E-2	2.72799E1	-3.26633E1	-3.2644E1	2.68022E1	1.16923E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.79639E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80019E1	-9.29832E-4	-8.79999E1	-2.38419E-5	5.79357E-3	9.31501E-2	2.73045E1	-3.2641E1	-3.26302E1	2.67878E1	1.16981E-7	2.53087E-3	2.53087E-3	6.3074E-3	1.80179E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80016E1	-8.34465E-4	-8.80001E1	-7.15256E-5	5.96046E-3	9.32217E-2	2.7346E1	-3.26458E1	-3.26711E1	2.68683E1	1.1693E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.7971E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80016E1	-8.10623E-4	-8.80003E1	-1.43051E-4	5.8651E-3	9.31263E-2	2.73315E1	-3.26939E1	-3.26416E1	2.68286E1	1.16628E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.79783E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80017E1	-1.09673E-3	-8.80003E1	-1.90735E-4	5.91278E-3	9.30071E-2	2.72957E1	-3.26531E1	-3.25623E1	2.68382E1	1.16923E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.79945E-1
1.2E1	2.36E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80019E1	-8.58307E-4	-8.79999E1	-7.15256E-5	5.53131E-3	9.32217E-2	2.72961E1	-3.26681E1	-3.26705E1	2.67776E1	1.16823E-7	2.51525E-3	2.51525E-3	6.29128E-3	1.80253E-1
1.3E1	3.3E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80016E1	-6.91414E-4	-8.79996E1	1.43051E-4	5.81741E-3	9.28402E-2	2.73021E1	-3.26944E1	-3.25918E1	2.68522E1	1.16778E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.79866E-1
1.4E1	9.148E3	3.0E0	5.66E2	3.82E2	-7.47149E-2	-8.80019E1	-8.34465E-4	-8.79997E1	1.19209E-4	5.91278E-3	9.2864E-2	2.73027E1	-3.26946E1	-3.26242E1	2.67882E1	1.1693E-7	2.5188E-3	2.5188E-3	6.30192E-3	1.80179E-1
1.5E1	1.21E2	0.0E0	6.06E2	4.11E2	-7.45602E-2	-8.8002E1	-5.96046E-4	-8.79996E1	-1.19209E-4	6.00815E-3	9.32455E-2	2.73123E1	-3.26554E1	-3.2647E1	2.68111E1	1.16956E-7	2.52318E-3	2.52318E-3	6.30466E-3	1.80492E-1
1.6E1	3.233E3	2.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80019E1	-7.15256E-4	-8.79998E1	-7.15256E-5	5.65052E-3	9.29594E-2	2.73364E1	-3.27068E1	-3.2662E1	2.67926E1					
1.7E1	9.163E3	2.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80016E1	-6.4373E-4	-8.80001E1	-2.6226E-4	5.8651E-3	9.32217E-2	2.7346E1	-3.2647E1	-3.2626E1	2.68064E1	1.17023E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.79792E-1
1.8E1	4.1444E4	2.3E1	7.27E2	5.0E2	-7.36328E-2	-8.80017E1	-6.67572E-4	-8.8E1	2.38419E-5	5.53131E-3	9.31501E-2	2.72914E1	-3.25987E1	-3.26363E1	2.68001E1	1.16778E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.80179E-1
1.9E1	2.826E3	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.80018E1	-4.76837E-4	-8.8E1	-2.38419E-5	5.84126E-3	9.32932E-2	2.73207E1	-3.26497E1	-3.25904E1	2.68363E1	1.16957E-7	2.52301E-3	2.52301E-3	6.3282E-3	1.798E-1
2.0E1	8.37E2	2.0E0	8.08E2	5.58E2	-7.43285E-2	-8.8002E1	-4.76837E-4	-8.79999E1	0.0E0	5.74589E-3	9.27925E-2	2.72531E1	-3.26609E1	-3.26327E1	2.67559E1	1.16946E-7	2.52407E-3	2.52407E-3	6.33021E-3	1.8051E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80019E1	-8.34465E-4	-8.80001E1	1.66893E-4	5.50747E-3	9.27925E-2	2.73499E1	-3.27009E1	-3.26826E1	2.67944E1	1.1668E-7	2.5225E-3	2.5225E-3	6.32978E-3	1.79942E-1
2.2E1	6.0E1	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80019E1	-6.91414E-4	-8.79995E1	3.33786E-4	5.34058E-3	9.2864E-2	2.7344E1	-3.26089E1	-3.2626E1	2.68047E1	1.16923E-7	2.53031E-3	2.53031E-3	6.32356E-3	1.80253E-1
2.3E1	3.0E0	1.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80017E1	-6.67572E-4	-8.8E1	1.90735E-4	5.65052E-3	9.30309E-2	2.73259E1	-3.26383E1	-3.26303E1	2.68425E1	1.16774E-7	2.51739E-3	2.51739E-3	6.32896E-3	1.79485E-1