[Scan]
initial_time=2015-12-15T23:55:25
final_time=2015-12-15T23:55:47
ip_count=19
run=1017
dataset=4
scan=249
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.88805E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-8.8222E-10
ql2_vset=
ql2_vmon=-9.53674E-4
ql2_imon=6.18529E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.5203E-9
ql4_vset=
ql4_vmon=-1.66893E-4
ql4_imon=3.22034E-9
mult1=-9.51162E-9
mult2=-2.57489E-9
rf_tmon=-4.59053E-3
rf_agc=3.18916E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.57899E-3
ql5_imon=5.0149E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69257E0
bslens_imon=2.68195E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20007E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12493E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53772E1
cs_ef1b_imon=3.02415E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04649E2
lens23_imon=1.01959E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=2.2985E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04376E0
lens1_imon=1.5536E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64957E1
os_ef1alow_imon=2.91999E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03889E1
cs_ea2_imon=1.55156E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.03532E-5
olens2_vset=9.7E-1
olens2_vmon=9.70507E-1
olens2_imon=2.17046E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=3.01117E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15438E1
os_ea1_imon=1.94234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.15785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=1.20981E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91847E2
cs_nozzle_imon=1.93449E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01869E1
cs_anode1_imon=3.13911E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=7.3505E-9
tplens_vset=1.4E-1
tplens_vmon=1.60418E0
tplens_imon=-4.86804E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25803E1
iondef3_imon=1.48162E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26512E1
iondef2_imon=1.56598E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98245E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=5.42724E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32059E0
ionrepsh_imon=1.90629E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34036E1
lens5b_imon=2.16296E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.10992E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.44851E-1
os_ea2_imon=-5.12038E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00396E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55611E0
os_ef2alow_imon=-2.68077E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.29839E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=2.95603E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.29135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01034E1
cs_anode2_imon=2.28461E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73069E1
iondef1_imon=1.08544E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68274E1
iondef4_imon=1.06215E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.81608E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82857E-1
olens1_imon=1.24603E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15657E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02002E2
cs_ionfocb_imon=1.47215E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57715E1
einzel_imon=7.6482E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-1.00493E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.3907E-4
mask2_vset=0.0E0
mask2_vmon=-1.85767E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.53061E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.75194E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=6.95022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39254E0
defgridb_imon=5.96967E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33472E1
os_fil1_imon=8.97256E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.7322E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65962E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3075E1
cs_fil1_imon=1.00172E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63153E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65671E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.5965E-2
os_fil2_imon=-3.08042E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.80605E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.64375E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38974E-1
cs_fil2_imon=-3.08643E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04612E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22366E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.78931E-1
chamber_ion_pmon=1.16727E-7
chamber_cvt_pmon=2.53196E-3
foreline_cvt_pmon=2.53196E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.13041E-1
res40_imon=-2.706E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.12E3	1.0E0	1.47E2	4.1E1	-7.40967E-2	-8.8002E1	-4.76837E-4	-8.79998E1	1.19209E-4	5.50747E-3	9.30548E-2	2.73057E1	-3.26649E1	-3.26826E1	2.68105E1	1.16829E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.80022E-1
2.0E0	4.408E3	3.0E0	3.16E2	1.6E2	-7.40967E-2	-8.8002E1	-7.86781E-4	-8.79997E1	9.53674E-5	5.74589E-3	9.28164E-2	2.72865E1	-3.26591E1	-3.26512E1	2.67627E1	1.16873E-7	2.52492E-3	2.52492E-3	6.29128E-3	1.79332E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.39421E-2	-8.8002E1	-7.39098E-4	-8.79997E1	7.15256E-5	5.81741E-3	9.3174E-2	2.72921E1	-3.26549E1	-3.26248E1	2.67422E1	1.16677E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.79242E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-7.35556E-2	-8.80018E1	-7.15256E-4	-8.79999E1	1.19209E-4	5.45979E-3	9.30309E-2	2.73252E1	-3.27133E1	-3.26119E1	2.68436E1	1.16724E-7	2.52276E-3	2.52276E-3	6.32896E-3	1.79485E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.8002E1	-6.67572E-4	-8.79994E1	-4.76837E-5	5.91278E-3	9.30309E-2	2.72868E1	-3.26756E1	-3.26567E1	2.68551E1	1.17073E-7	2.51954E-3	2.51954E-3	6.32356E-3	1.78874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80018E1	-6.67572E-4	-8.79999E1	7.15256E-5	5.67436E-3	9.29356E-2	2.73177E1	-3.26705E1	-3.26428E1	2.67992E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.80015E1	-5.00679E-4	-8.79999E1	-3.57628E-4	5.43594E-3	9.29117E-2	2.73189E1	-3.26152E1	-3.26446E1	2.67866E1	1.1688E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.78775E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.46377E-2	-8.80014E1	-6.19888E-4	-8.79999E1	-3.8147E-4	5.57899E-3	9.28879E-2	2.72437E1	-3.26077E1	-3.26396E1	2.68244E1	1.17185E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.79086E-1
1.2E1	2.43E2	1.0E0	4.85E2	3.23E2	-7.50241E-2	-8.80016E1	-5.00679E-4	-8.79999E1	-2.86102E-4	5.48363E-3	9.28402E-2	2.73151E1	-3.26496E1	-3.2639E1	2.68401E1	1.16823E-7	2.52492E-3	2.52492E-3	6.30202E-3	1.79485E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.51013E-2	-8.80015E1	-7.86781E-4	-8.80001E1	-1.90735E-4	5.84126E-3	9.31025E-2	2.72841E1	-3.26446E1	-3.26002E1	2.67499E1	1.16973E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.7918E-1
1.4E1	9.257E3	1.8E1	5.66E2	3.82E2	-7.50241E-2	-8.80017E1	-7.39098E-4	-8.79997E1	-4.76837E-5	5.34058E-3	9.32217E-2	2.73424E1	-3.26609E1	-3.25948E1	2.67421E1	1.1693E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.78931E-1
1.5E1	1.28E2	0.0E0	6.06E2	4.11E2	-7.48695E-2	-8.80016E1	-7.39098E-4	-8.80004E1	-2.6226E-4	5.88894E-3	9.30548E-2	2.73423E1	-3.26608E1	-3.26384E1	2.68218E1	1.16938E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.78831E-1
1.6E1	3.24E3	2.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80017E1	-7.86781E-4	-8.79999E1	-4.76837E-5	5.53131E-3	9.31978E-2	2.73149E1	-3.26909E1	-3.26413E1	2.68436E1	1.16823E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.78874E-1
1.7E1	9.399E3	4.0E0	6.87E2	4.7E2	-7.45602E-2	-8.80017E1	-8.58307E-4	-8.80001E1	7.15256E-5	5.57899E-3	9.3174E-2	2.73505E1	-3.2698E1	-3.26124E1	2.68166E1	1.17145E-7	2.5225E-3	2.5225E-3	6.32418E-3	1.78515E-1
1.8E1	4.1173E4	3.0E1	7.27E2	5.0E2	-7.30918E-2	-8.80018E1	-8.10623E-4	-8.80002E1	7.15256E-5	5.53131E-3	9.34839E-2	2.74421E1	-3.27786E1	-3.2498E1	2.67758E1	1.16873E-7	2.51203E-3	2.51203E-3	6.32896E-3	1.78722E-1
1.9E1	2.882E3	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.80019E1	-1.16825E-3	-8.80002E1	1.66893E-4	6.00815E-3	9.32217E-2	2.73428E1	-3.27051E1	-3.26119E1	2.6798E1	1.16981E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.79242E-1
2.0E1	7.39E2	2.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80016E1	-8.10623E-4	-8.8E1	7.15256E-5	5.48363E-3	9.3317E-2	2.72751E1	-3.26687E1	-3.26362E1	2.67193E1	1.16674E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.78874E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80017E1	-6.67572E-4	-8.80003E1	1.43051E-4	5.74589E-3	9.29117E-2	2.73257E1	-3.26502E1	-3.26549E1	2.68198E1	1.1693E-7	2.52647E-3	2.52647E-3	6.30192E-3	1.78931E-1
2.2E1	5.7E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80021E1	-5.96046E-4	-8.79999E1	-2.38419E-5	5.8651E-3	9.30309E-2	2.73219E1	-3.26741E1	-3.26867E1	2.68953E1	1.16973E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.7918E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80019E1	-9.53674E-4	-8.80001E1	-1.66893E-4	5.57899E-3	9.34601E-2	2.73069E1	-3.26512E1	-3.25803E1	2.68274E1	1.16727E-7	2.53196E-3	2.53196E-3	6.31288E-3	1.78931E-1