[Scan]
initial_time=2015-12-15T23:56:25
final_time=2015-12-15T23:56:48
ip_count=19
run=1017
dataset=4
scan=251
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.41738E-2
qbias_imon=-3.87544E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-9.29821E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=6.23024E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.51037E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=3.24781E-9
mult1=-8.94571E-9
mult2=-2.69266E-9
rf_tmon=-4.54847E-3
rf_agc=3.30452E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.29289E-3
ql5_imon=4.97735E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.85473E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19695E1
lens5a_imon=1.94793E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53694E1
cs_ef1b_imon=2.96792E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02032E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05242E1
cs_ea1_imon=2.28842E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0277E0
lens1_imon=1.29739E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64068E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.56674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84124E1
cs_ef1a_imon=2.95675E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.16771E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11051E1
os_restr1_imon=3.08361E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=1.93307E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20668E0
cs_ionrep_imon=1.22377E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91904E2
cs_nozzle_imon=1.933E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=3.13263E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=7.41373E-9
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.4825E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26795E1
iondef2_imon=1.57806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.9831E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=5.64861E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.22673E0
ionrepsh_imon=1.90971E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34012E1
lens5b_imon=2.15463E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74886E1
cs_ef2b_imon=3.11352E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.67836E-1
os_ea2_imon=-5.25409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00467E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71318E1
cs_ef2a_imon=3.18236E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56812E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.31041E-1
os_ef2bup_imon=-5.36212E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10745E1
os_restr2_imon=2.94089E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.30247E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.26119E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67782E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.77878E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=1.24308E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17579E0
cs_ionaccel_imon=-1.86267E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56447E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.30847E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82656E2
mask1_imon=2.39091E-4
mask2_vset=0.0E0
mask2_vmon=-1.86242E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=8.4116E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.21009E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=5.66148E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2963E0
defgridb_imon=5.35709E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33433E1
os_fil1_imon=8.97142E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76344E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30768E1
cs_fil1_imon=1.00101E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62786E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66107E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.52146E-2
os_fil2_imon=-3.01435E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.73998E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69644E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36514E-1
cs_fil2_imon=-2.55184E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.77932E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22448E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.7918E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.55998E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.3E3	5.0E0	1.47E2	4.1E1	-7.37874E-2	-8.8002E1	-1.09673E-3	-8.80004E1	1.90735E-4	5.36442E-3	9.35078E-2	2.73424E1	-3.26705E1	-3.26482E1	2.68454E1	1.17273E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.78569E-1
2.0E0	4.441E3	3.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80023E1	-9.53674E-4	-8.8E1	1.19209E-4	5.53131E-3	9.32455E-2	2.73486E1	-3.26762E1	-3.25966E1	2.68256E1	1.16727E-7	2.51662E-3	2.51662E-3	6.31837E-3	1.78775E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.40967E-2	-8.8002E1	-9.29832E-4	-8.8E1	1.90735E-4	5.62668E-3	9.33647E-2	2.7297E1	-3.26579E1	-3.26544E1	2.67885E1	1.16938E-7	2.51915E-3	2.51915E-3	6.32418E-3	1.79148E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-7.54105E-2	-8.80021E1	-9.05991E-4	-8.79999E1	-2.38419E-5	5.76973E-3	9.32693E-2	2.72997E1	-3.2638E1	-3.26494E1	2.67974E1	1.16818E-7	2.51498E-3	2.51498E-3	6.32328E-3	1.7957E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80021E1	-6.4373E-4	-8.79999E1	7.15256E-5	5.45979E-3	9.29117E-2	2.72919E1	-3.26368E1	-3.26128E1	2.68448E1	1.16823E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.78265E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80021E1	-9.53674E-4	-8.8E1	2.38419E-5	6.07967E-3	9.30309E-2	2.73075E1	-3.26693E1	-3.26146E1	2.68118E1	1.16886E-7	2.51915E-3	2.51915E-3	6.31858E-3	1.79465E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80022E1	-8.34465E-4	-8.80001E1	4.76837E-5	5.67436E-3	9.31025E-2	2.72892E1	-3.26573E1	-3.26307E1	2.67914E1	1.16823E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.7918E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80023E1	-5.72205E-4	-8.79997E1	2.86102E-4	5.48363E-3	9.31978E-2	2.73087E1	-3.26825E1	-3.26044E1	2.68001E1	1.16626E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.78465E-1
1.2E1	2.34E2	1.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80027E1	-9.53674E-4	-8.79996E1	2.14577E-4	5.8651E-3	9.30548E-2	2.72898E1	-3.26455E1	-3.26313E1	2.67949E1	1.1688E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.7862E-1
1.3E1	2.7E1	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80023E1	-1.00136E-3	-8.79999E1	-9.53674E-5	5.81741E-3	9.31025E-2	2.733E1	-3.2668E1	-3.26544E1	2.68123E1	1.16873E-7	2.51417E-3	2.51417E-3	6.29128E-3	1.78874E-1
1.4E1	9.136E3	5.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-6.19888E-4	-8.79998E1	2.38419E-4	5.79357E-3	9.30309E-2	2.73177E1	-3.26686E1	-3.26168E1	2.67982E1	1.16928E-7	2.52509E-3	2.52509E-3	6.33237E-3	1.79003E-1
1.5E1	1.33E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80019E1	-6.91414E-4	-8.79997E1	0.0E0	5.65052E-3	9.31263E-2	2.72851E1	-3.26703E1	-3.26354E1	2.68288E1	1.16847E-7	2.52305E-3	2.52305E-3	6.30989E-3	1.78855E-1
1.6E1	3.278E3	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80023E1	-7.86781E-4	-8.79999E1	-1.19209E-4	5.84126E-3	9.31263E-2	2.73255E1	-3.26831E1	-3.26194E1	2.68178E1					
1.7E1	9.347E3	7.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80021E1	-5.48363E-4	-8.79997E1	9.53674E-5	5.72205E-3	9.31978E-2	2.73411E1	-3.27041E1	-3.26056E1	2.678E1	1.16626E-7	2.52428E-3	2.52428E-3	6.34588E-3	1.7862E-1
1.8E1	4.1595E4	2.4E1	7.27E2	5.0E2	-7.37103E-2	-8.80022E1	-5.24521E-4	-8.79996E1	1.90735E-4	5.34058E-3	9.32217E-2	2.73988E1	-3.27726E1	-3.25906E1	2.67968E1	1.16727E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.79242E-1
1.9E1	2.898E3	1.0E0	7.68E2	5.29E2	-7.35556E-2	-8.8002E1	-7.15256E-4	-8.79998E1	2.86102E-4	5.55515E-3	9.3317E-2	2.72865E1	-3.26332E1	-3.26446E1	2.68064E1	1.17083E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.79242E-1
2.0E1	7.78E2	1.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80019E1	-5.48363E-4	-8.79996E1	7.15256E-5	5.72205E-3	9.35078E-2	2.7347E1	-3.26638E1	-3.26219E1	2.67848E1	1.1693E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.78775E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80018E1	-7.15256E-4	-8.79995E1	4.76837E-5	5.38826E-3	9.29594E-2	2.72769E1	-3.26398E1	-3.26524E1	2.68064E1	1.16873E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.79332E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80018E1	-5.72205E-4	-8.79997E1	7.15256E-5	5.88894E-3	9.32217E-2	2.72845E1	-3.26703E1	-3.26272E1	2.68401E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.78155E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.41738E-2	-8.80016E1	-5.72205E-4	-8.79997E1	4.76837E-5	5.29289E-3	9.30071E-2	2.73375E1	-3.26795E1	-3.26194E1	2.67782E1	1.16973E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.7918E-1