[Scan]
initial_time=2015-12-15T23:57:27
final_time=2015-12-15T23:57:49
ip_count=19
run=1017
dataset=4
scan=253
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78451E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-8.36337E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=6.24955E-10
ql3_vset=
ql3_vmon=-8.79995E1
ql3_imon=-2.44825E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=3.22471E-9
mult1=-1.0185E-8
mult2=-2.59195E-9
rf_tmon=-5.08758E-3
rf_agc=3.16043E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=4.85909E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64463E0
bslens_imon=2.42185E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19805E1
lens5a_imon=1.98024E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12517E2
lens4a_imon=2.0503E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52994E1
cs_ef1b_imon=2.98289E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=2.29097E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02737E0
lens1_imon=1.48157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65775E1
os_ef1alow_imon=3.02107E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04584E1
cs_ea2_imon=1.57915E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84475E1
cs_ef1a_imon=2.95258E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=2.1663E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.10681E1
os_restr1_imon=3.03529E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15189E1
os_ea1_imon=1.93983E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64172E1
os_ef1bup_imon=3.11875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22455E0
cs_ionrep_imon=1.20965E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02152E1
cs_anode1_imon=3.14682E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20537E0
olens4_imon=7.36583E-9
tplens_vset=1.4E-1
tplens_vmon=1.57103E0
tplens_imon=-3.69609E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.4943E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26413E1
iondef2_imon=1.57841E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02972E2
lens6_imon=2.98269E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=5.72443E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26863E0
ionrepsh_imon=1.88694E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33823E1
lens5b_imon=2.17049E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73909E1
cs_ef2b_imon=3.07122E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.45486E-1
os_ea2_imon=-5.67949E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06082E2
lens4b_imon=2.00744E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70952E1
cs_ef2a_imon=3.21419E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.6646E0
os_ef2alow_imon=-2.40964E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-9.49087E-2
os_ef2bup_imon=-5.34008E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.09944E1
os_restr2_imon=2.92339E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.31214E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01173E1
cs_anode2_imon=2.24935E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73175E1
iondef1_imon=1.08219E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.1E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.81882E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=1.23868E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.23431E0
cs_ionaccel_imon=-1.58627E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.46916E-4
einzel_vset=-2.1E1
einzel_vmon=-2.54914E1
einzel_imon=7.25744E-6
window_vset=0.0E0
window_vmon=1.12181E-1
window_imon=-7.40451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82715E2
mask1_imon=2.39354E-4
mask2_vset=0.0E0
mask2_vmon=-1.86263E1
mask2_imon=-1.30184E-6
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.946E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93728E3
defgrida_imon=6.22705E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.14529E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39742E0
defgridb_imon=6.08748E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33438E1
os_fil1_imon=8.97122E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.82355E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65659E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30741E1
cs_fil1_imon=1.00132E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62197E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65832E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.72694E-2
os_fil2_imon=-2.96191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.11978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.58383E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36643E-1
cs_fil2_imon=-3.01805E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38195E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.7918E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=6.50682E-1
res40_imon=-2.79138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.151E3	2.0E0	1.47E2	4.1E1	-7.31692E-2	-8.8002E1	-5.24521E-4	-8.79996E1	1.43051E-4	5.126E-3	9.32693E-2	2.73051E1	-3.26764E1	-3.26388E1	2.68076E1	1.16783E-7	2.5225E-3	2.5225E-3	6.29067E-3	1.78515E-1
2.0E0	4.343E3	5.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80021E1	-6.67572E-4	-8.79999E1	1.43051E-4	5.50747E-3	9.32932E-2	2.73002E1	-3.26897E1	-3.2615E1	2.68172E1	1.16823E-7	2.52707E-3	2.52707E-3	6.31278E-3	1.78874E-1
3.0E0	2.0E0	1.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80022E1	-3.57628E-4	-8.79998E1	9.53674E-5	5.43594E-3	9.31978E-2	2.73425E1	-3.2692E1	-3.26392E1	2.68311E1	1.17197E-7	2.5225E-3	2.5225E-3	6.30182E-3	1.78199E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80021E1	-6.4373E-4	-8.79999E1	3.57628E-4	5.55515E-3	9.31978E-2	2.73135E1	-3.26771E1	-3.26122E1	2.68286E1	1.1689E-7	2.52483E-3	2.52483E-3	6.31727E-3	1.7862E-1
5.0E0	1.0E0	1.0E0	8.24E2	5.17E2	-7.33239E-2	-8.8002E1	-9.53674E-4	-8.79997E1	7.15256E-5	5.38826E-3	9.2864E-2	2.72892E1	-3.26915E1	-3.26431E1	2.68018E1	1.16783E-7	2.52697E-3	2.52697E-3	6.31858E-3	1.78831E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80022E1	-9.29832E-4	-8.79995E1	1.90735E-4	5.4121E-3	9.29832E-2	2.72829E1	-3.27059E1	-3.26038E1	2.68124E1	1.16674E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.79945E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80021E1	-1.21593E-3	-8.79997E1	1.43051E-4	5.53131E-3	9.29832E-2	2.73334E1	-3.26938E1	-3.26313E1	2.68082E1	1.16776E-7	2.52189E-3	2.52189E-3	6.31827E-3	1.79288E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.8002E1	-1.26362E-3	-8.79995E1	2.38419E-5	5.43594E-3	9.29356E-2	2.72684E1	-3.26242E1	-3.26104E1	2.68106E1					
1.2E1	2.43E2	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80019E1	-9.53674E-4	-8.79996E1	9.53674E-5	5.55515E-3	9.30548E-2	2.73145E1	-3.26868E1	-3.26437E1	2.68166E1	1.16829E-7	2.52099E-3	2.52099E-3	6.29645E-3	1.79554E-1
1.3E1	1.6E1	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80019E1	-1.09673E-3	-8.79998E1	2.38419E-5	5.57899E-3	9.33886E-2	2.73303E1	-3.265E1	-3.26026E1	2.68304E1	1.16624E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.78874E-1
1.4E1	9.223E3	4.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80018E1	-1.21593E-3	-8.79996E1	9.53674E-5	5.55515E-3	9.31978E-2	2.72835E1	-3.26819E1	-3.26314E1	2.68123E1	1.16727E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.78931E-1
1.5E1	1.12E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80019E1	-9.53674E-4	-8.79998E1	4.52995E-4	5.50747E-3	9.31025E-2	2.72937E1	-3.26392E1	-3.26717E1	2.67988E1	1.16702E-7	2.52373E-3	2.52373E-3	6.32112E-3	1.79242E-1
1.6E1	3.177E3	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80022E1	-8.82149E-4	-8.79998E1	3.09944E-4	5.60284E-3	9.29594E-2	2.73189E1	-3.26897E1	-3.26404E1	2.68322E1					
1.7E1	9.23E3	2.0E0	6.87E2	4.7E2	-7.25507E-2	-8.8002E1	-8.58307E-4	-8.79996E1	-1.66893E-4	5.24521E-3	9.24826E-2	2.73273E1	-3.26002E1	-3.2635E1	2.6804E1	1.1693E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.7831E-1
1.8E1	4.1238E4	2.2E1	7.27E2	5.0E2	-7.25507E-2	-8.80021E1	-9.29832E-4	-8.79996E1	2.6226E-4	5.6982E-3	9.29356E-2	2.726E1	-3.26008E1	-3.25677E1	2.67938E1	1.1688E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.78775E-1
1.9E1	2.727E3	1.0E0	7.68E2	5.29E2	-7.3401E-2	-8.8002E1	-6.67572E-4	-8.79997E1	4.52995E-4	5.38826E-3	9.31263E-2	2.73111E1	-3.26284E1	-3.25858E1	2.68412E1	1.17185E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.79242E-1
2.0E1	7.57E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80019E1	-9.05991E-4	-8.79996E1	4.05312E-4	5.60284E-3	9.3317E-2	2.73145E1	-3.26626E1	-3.26219E1	2.67763E1	1.16677E-7	2.52867E-3	2.52867E-3	6.31288E-3	1.79086E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80022E1	-9.53674E-4	-8.79996E1	3.09944E-4	5.38826E-3	9.29832E-2	2.73129E1	-3.26332E1	-3.26368E1	2.68244E1	1.16774E-7	2.5131E-3	2.5131E-3	6.32356E-3	1.78265E-1
2.2E1	6.2E1	0.0E0	8.89E2	6.17E2	-7.35556E-2	-8.80023E1	-8.82149E-4	-8.79999E1	2.86102E-4	5.65052E-3	9.31025E-2	2.73588E1	-3.27469E1	-3.26685E1	2.67989E1	1.16823E-7	2.51632E-3	2.51632E-3	6.32896E-3	1.79027E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80023E1	-8.58307E-4	-8.79995E1	1.90735E-4	5.45979E-3	9.31263E-2	2.73175E1	-3.26413E1	-3.26142E1	2.67872E1	1.16774E-7	2.51954E-3	2.51954E-3	6.3074E-3	1.7918E-1