[Scan]
initial_time=2015-12-15T23:57:57
final_time=2015-12-15T23:58:19
ip_count=19
run=1017
dataset=4
scan=254
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.47149E-2
qbias_imon=-3.838E-6
ql1_vset=
ql1_vmon=-8.80022E1
ql1_imon=-8.35145E-10
ql2_vset=
ql2_vmon=-1.12057E-3
ql2_imon=6.63757E-10
ql3_vset=
ql3_vmon=-8.79997E1
ql3_imon=-2.44178E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=3.2516E-9
mult1=-8.47613E-9
mult2=-2.70663E-9
rf_tmon=-6.08058E-3
rf_agc=3.15011E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=4.9597E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.29622E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19977E1
lens5a_imon=1.95892E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52847E1
cs_ef1b_imon=2.9099E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04641E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=2.3068E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04917E0
lens1_imon=1.61849E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64434E1
os_ef1alow_imon=3.00937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.53894E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84953E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.16815E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=3.06559E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.94414E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63257E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21665E0
cs_ionrep_imon=1.22279E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93251E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02175E1
cs_anode1_imon=3.1802E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.43295E-9
tplens_vset=1.4E-1
tplens_vmon=1.58075E0
tplens_imon=-3.28186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02973E2
lens6_imon=2.98616E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=6.02472E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29656E0
ionrepsh_imon=1.90593E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33712E1
lens5b_imon=2.17522E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74435E1
cs_ef2b_imon=3.09875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.50259E-1
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06126E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70531E1
cs_ef2a_imon=3.15821E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.53689E0
os_ef2alow_imon=-2.19784E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.35846E-1
os_ef2bup_imon=-5.04858E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11045E1
os_restr2_imon=2.97153E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.29964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.30227E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73291E1
iondef1_imon=1.09157E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.05133E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.75778E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.2491E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-1.79059E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02155E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55919E1
einzel_imon=7.29501E-6
window_vset=0.0E0
window_vmon=2.07732E-1
window_imon=-1.2572E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82692E2
mask1_imon=2.39463E-4
mask2_vset=0.0E0
mask2_vmon=-1.86975E1
mask2_imon=-8.06708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.0151E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.14488E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=5.98769E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33441E1
os_fil1_imon=8.96692E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.73281E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65527E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30745E1
cs_fil1_imon=1.00265E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62726E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6585E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.80286E-2
os_fil2_imon=-2.81613E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.87813E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86932E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37679E-1
cs_fil2_imon=-2.94227E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22514E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.7927E-1
chamber_ion_pmon=1.17014E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.01048E-1
res40_imon=-2.31677E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.02E3	2.0E0	1.47E2	4.1E1	-7.54105E-2	-8.80023E1	-8.82149E-4	-8.79994E1	-2.38419E-5	5.65052E-3	9.30071E-2	2.72835E1	-3.26741E1	-3.26116E1	2.68641E1	1.16778E-7	2.52647E-3	2.52647E-3	6.33486E-3	1.79086E-1
2.0E0	4.542E3	2.0E0	3.16E2	1.6E2	-7.47923E-2	-8.80021E1	-6.4373E-4	-8.79998E1	-7.15256E-5	5.6982E-3	9.31025E-2	2.72955E1	-3.26476E1	-3.26699E1	2.67968E1	1.16677E-7	2.52318E-3	2.52318E-3	6.29645E-3	1.7862E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80022E1	-9.29832E-4	-8.79998E1	2.38419E-5	5.65052E-3	9.30309E-2	2.73375E1	-3.26797E1	-3.26248E1	2.68268E1	1.16626E-7	2.52538E-3	2.52538E-3	6.28552E-3	1.7862E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-7.47149E-2	-8.80022E1	-1.16825E-3	-8.79998E1	-2.38419E-5	5.8651E-3	9.30309E-2	2.72931E1	-3.26344E1	-3.26392E1	2.68376E1	1.16724E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.79332E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80021E1	-1.45435E-3	-8.79996E1	2.6226E-4	5.26905E-3	9.29832E-2	2.73204E1	-3.26956E1	-3.26461E1	2.67879E1	1.17032E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.78775E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.43285E-2	-8.80022E1	-1.19209E-3	-8.79999E1	-2.38419E-5	5.38826E-3	9.28879E-2	2.72791E1	-3.26349E1	-3.26272E1	2.68118E1	1.17173E-7	2.52169E-3	2.52169E-3	6.29665E-3	1.79332E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80022E1	-9.53674E-4	-8.79998E1	4.76837E-5	5.6982E-3	9.28402E-2	2.72763E1	-3.26687E1	-3.26032E1	2.67968E1	1.16778E-7	2.51716E-3	2.51716E-3	6.32661E-3	1.78931E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.33239E-2	-8.80024E1	-1.09673E-3	-8.79996E1	1.66893E-4	5.62668E-3	9.27925E-2	2.73135E1	-3.26561E1	-3.26266E1	2.68214E1					
1.2E1	2.57E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80023E1	-9.05991E-4	-8.8E1	-2.6226E-4	5.38826E-3	9.28879E-2	2.72696E1	-3.26392E1	-3.25954E1	2.68208E1	1.16727E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.78465E-1
1.3E1	2.3E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80021E1	-1.14441E-3	-8.79994E1	2.38419E-4	5.53131E-3	9.31501E-2	2.73063E1	-3.27011E1	-3.26032E1	2.67992E1	1.16829E-7	2.5188E-3	2.5188E-3	6.33486E-3	1.78465E-1
1.4E1	8.953E3	1.1E1	5.66E2	3.82E2	-7.34782E-2	-8.80023E1	-1.14441E-3	-8.79998E1	9.53674E-5	5.43594E-3	9.30548E-2	2.7212E1	-3.27053E1	-3.25924E1	2.6828E1	1.16826E-7	2.52134E-3	2.52134E-3	6.32916E-3	1.78671E-1
1.5E1	1.37E2	0.0E0	6.06E2	4.11E2	-7.44059E-2	-8.80024E1	-6.4373E-4	-8.79998E1	1.66893E-4	5.43594E-3	9.30548E-2	2.73122E1	-3.26703E1	-3.26502E1	2.68202E1					
1.6E1	3.276E3	1.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80024E1	-8.58307E-4	-8.79997E1	4.52995E-4	5.50747E-3	9.30786E-2	2.72715E1	-3.26524E1	-3.26488E1	2.67642E1	1.1693E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.79242E-1
1.7E1	9.438E3	6.0E0	6.87E2	4.7E2	-7.45602E-2	-8.80022E1	-3.33786E-4	-8.79999E1	5.72205E-4	5.24521E-3	9.29832E-2	2.72769E1	-3.27257E1	-3.26032E1	2.68136E1	1.16724E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.7918E-1
1.8E1	4.1425E4	2.3E1	7.27E2	5.0E2	-7.39421E-2	-8.80023E1	-6.67572E-4	-8.79997E1	3.09944E-4	5.29289E-3	9.3317E-2	2.73841E1	-3.27021E1	-3.25877E1	2.67944E1	1.16727E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.7862E-1
1.9E1	2.827E3	1.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80022E1	-1.00136E-3	-8.79995E1	1.66893E-4	5.50747E-3	9.28402E-2	2.72598E1	-3.2637E1	-3.26591E1	2.6801E1	1.1688E-7	2.51498E-3	2.51498E-3	6.34037E-3	1.78853E-1
2.0E1	7.92E2	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.80021E1	-9.29832E-4	-8.8E1	-1.43051E-4	5.74589E-3	9.26971E-2	2.72685E1	-3.27269E1	-3.26254E1	2.6783E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.42513E-2	-8.80022E1	-1.00136E-3	-8.80001E1	3.33786E-4	5.8651E-3	9.31025E-2	2.72871E1	-3.26849E1	-3.26386E1	2.68322E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31837E-3	1.79086E-1
2.2E1	6.1E1	0.0E0	8.89E2	6.17E2	-7.40967E-2	-8.80022E1	-5.00679E-4	-8.80002E1	9.53674E-5	6.00815E-3	9.31501E-2	2.73654E1	-3.26695E1	-3.26104E1	2.6796E1	1.16575E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.79027E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.47149E-2	-8.80022E1	-1.12057E-3	-8.79997E1	-1.43051E-4	5.8651E-3	9.32455E-2	2.73291E1	-3.2644E1	-3.26218E1	2.68142E1	1.17014E-7	2.52342E-3	2.52342E-3	6.31798E-3	1.7927E-1