[Scan]
initial_time=2015-12-15T23:58:27
final_time=2015-12-15T23:58:50
ip_count=19
run=1017
dataset=4
scan=255
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78088E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.26514E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=6.23631E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.34847E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=3.24415E-9
mult1=-1.02678E-8
mult2=-2.69582E-9
rf_tmon=-3.81929E-3
rf_agc=3.22355E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.62668E-3
ql5_imon=4.70281E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65172E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.91782E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05536E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54037E1
cs_ef1b_imon=2.9081E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.01797E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04934E1
cs_ea1_imon=2.31329E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01973E0
lens1_imon=1.45627E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63851E1
os_ef1alow_imon=2.92107E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03985E1
cs_ea2_imon=1.54904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.02379E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=2.17094E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.12301E1
os_restr1_imon=3.12253E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=1.96433E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63221E1
os_ef1bup_imon=3.01514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26291E0
cs_ionrep_imon=1.21738E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93481E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01293E1
cs_anode1_imon=3.15101E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=7.36016E-9
tplens_vset=1.4E-1
tplens_vmon=1.52127E0
tplens_imon=-3.85865E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26531E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=5.61953E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24669E0
ionrepsh_imon=1.89727E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34685E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75901E1
cs_ef2b_imon=3.16434E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.71551E-1
os_ea2_imon=-6.45421E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71276E1
cs_ef2a_imon=3.12542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.4558E0
os_ef2alow_imon=-3.00152E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.52975E-1
os_ef2bup_imon=-5.09903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11628E1
os_restr2_imon=3.01838E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0274E1
cs_anode2_imon=2.29542E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73252E1
iondef1_imon=1.08616E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.09566E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.73372E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=1.2343E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.03704E0
cs_ionaccel_imon=-2.57265E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.4772E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57907E1
einzel_imon=7.99418E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.75455E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82557E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.87365E1
mask2_imon=-3.90635E-8
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9269E3
multa_neg_imon=8.08938E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.31574E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.71589E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=5.88675E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33453E1
os_fil1_imon=8.95773E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.77485E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65505E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30799E1
cs_fil1_imon=1.00168E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62035E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65806E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.71258E-2
os_fil2_imon=-3.2426E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.25945E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.73785E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36126E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=1.1182E-1
res40_imon=-2.19063E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.097E3	3.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80021E1	-8.34465E-4	-8.80001E1	2.14577E-4	5.6982E-3	9.30309E-2	2.7308E1	-3.26968E1	-3.26195E1	2.67254E1	1.1693E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.78775E-1
2.0E0	4.416E3	3.0E0	3.16E2	1.6E2	-7.286E-2	-8.8002E1	-7.86781E-4	-8.80003E1	5.00679E-4	5.96046E-3	9.33409E-2	2.73093E1	-3.25998E1	-3.26642E1	2.68213E1	1.16823E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.79485E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.44059E-2	-8.80023E1	-6.4373E-4	-8.80002E1	1.19209E-4	5.72205E-3	9.32932E-2	2.73462E1	-3.26712E1	-3.26654E1	2.68036E1	1.16785E-7	2.52084E-3	2.52084E-3	6.33093E-3	1.79153E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-7.42513E-2	-8.80021E1	-5.72205E-4	-8.79998E1	7.15256E-5	5.81741E-3	9.31263E-2	2.73321E1	-3.26362E1	-3.26206E1	2.68286E1	1.17023E-7	2.52599E-3	2.52599E-3	6.31278E-3	1.7918E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.46377E-2	-8.80022E1	-6.67572E-4	-8.8E1	2.14577E-4	5.72205E-3	9.32217E-2	2.73033E1	-3.26615E1	-3.26338E1	2.68124E1	1.16981E-7	2.51935E-3	2.51935E-3	6.31014E-3	1.79242E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80021E1	-4.29153E-4	-8.8E1	4.76837E-5	5.74589E-3	9.29117E-2	2.73122E1	-3.26708E1	-3.26502E1	2.68064E1					
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80021E1	-3.8147E-4	-8.80002E1	0.0E0	5.6982E-3	9.28402E-2	2.73147E1	-3.26482E1	-3.26573E1	2.68286E1	1.16774E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.78874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.32464E-2	-8.80021E1	-6.19888E-4	-8.8E1	4.76837E-5	5.48363E-3	9.30071E-2	2.73003E1	-3.26494E1	-3.26536E1	2.68505E1	1.1688E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.78465E-1
1.2E1	2.24E2	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80022E1	-9.29832E-4	-8.79999E1	2.6226E-4	5.76973E-3	9.30786E-2	2.72841E1	-3.26422E1	-3.26404E1	2.68058E1	1.16873E-7	2.52492E-3	2.52492E-3	6.3074E-3	1.78569E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.45602E-2	-8.80021E1	-7.15256E-4	-8.79999E1	1.90735E-4	5.34058E-3	9.30548E-2	2.73234E1	-3.26614E1	-3.26113E1	2.68328E1	1.16981E-7	2.51225E-3	2.51225E-3	6.31288E-3	1.78931E-1
1.4E1	9.19E3	8.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80018E1	-6.19888E-4	-8.80001E1	-7.15256E-5	5.81741E-3	9.3317E-2	2.7278E1	-3.26738E1	-3.26785E1	2.68058E1	1.1693E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.78775E-1
1.5E1	1.67E2	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80018E1	-7.39098E-4	-8.80003E1	-1.19209E-4	5.84126E-3	9.29356E-2	2.73327E1	-3.26524E1	-3.265E1	2.68065E1	1.16923E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.78874E-1
1.6E1	3.278E3	2.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80019E1	-8.34465E-4	-8.80001E1	-3.8147E-4	5.88894E-3	9.30071E-2	2.73171E1	-3.26524E1	-3.25731E1	2.67982E1	1.16575E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.78569E-1
1.7E1	9.504E3	6.0E0	6.87E2	4.7E2	-7.42513E-2	-8.80017E1	-8.10623E-4	-8.80002E1	-9.53674E-5	5.43594E-3	9.27687E-2	2.73069E1	-3.26349E1	-3.27015E1	2.68186E1	1.17093E-7	2.51693E-3	2.51693E-3	6.32418E-3	1.79148E-1
1.8E1	4.1523E4	3.3E1	7.27E2	5.0E2	-7.40192E-2	-8.80019E1	-7.15256E-4	-8.80003E1	-4.05312E-4	5.62668E-3	9.30548E-2	2.73538E1	-3.26296E1	-3.26927E1	2.67956E1	1.16801E-7	2.52134E-3	2.52134E-3	6.32644E-3	1.79365E-1
1.9E1	2.814E3	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80021E1	-7.86781E-4	-8.80002E1	-4.76837E-5	5.81741E-3	9.31501E-2	2.7298E1	-3.25871E1	-3.27599E1	2.68528E1					
2.0E1	8.09E2	1.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80019E1	-8.10623E-4	-8.8E1	-2.38419E-5	5.53131E-3	9.31025E-2	2.73504E1	-3.26266E1	-3.26853E1	2.68024E1	1.16965E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.7897E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.8002E1	-9.53674E-4	-8.79997E1	-1.66893E-4	5.67436E-3	9.32455E-2	2.73076E1	-3.27418E1	-3.26858E1	2.68213E1	1.16909E-7	2.52509E-3	2.52509E-3	6.3126E-3	1.78914E-1
2.2E1	6.5E1	0.0E0	8.89E2	6.17E2	-7.20871E-2	-8.80023E1	-5.96046E-4	-8.79999E1	-1.43051E-4	5.36442E-3	9.29832E-2	2.72898E1	-3.2626E1	-3.26644E1	2.6814E1	1.16678E-7	2.52395E-3	2.52395E-3	6.3074E-3	1.78646E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80021E1	-9.29832E-4	-8.79999E1	0.0E0	5.62668E-3	9.28402E-2	2.73252E1	-3.26531E1	-3.26549E1	2.67752E1