[Scan]
initial_time=2015-12-15T23:58:58
final_time=2015-12-15T23:59:20
ip_count=19
run=1017
dataset=4
scan=256
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.84322E-6
ql1_vset=
ql1_vmon=-8.80021E1
ql1_imon=-8.28612E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=6.05524E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-2.39563E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=3.27157E-9
mult1=-1.02359E-8
mult2=-2.7687E-9
rf_tmon=-4.22777E-3
rf_agc=3.31264E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=4.72188E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6497E0
bslens_imon=2.49017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20084E1
lens5a_imon=1.99465E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53673E1
cs_ef1b_imon=2.9158E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02047E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05053E1
cs_ea1_imon=2.28241E-5
lens1_vset=-2.7E0
lens1_vmon=-3.01885E0
lens1_imon=1.4248E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64238E1
os_ef1alow_imon=2.96132E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04434E1
cs_ea2_imon=1.56674E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84487E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70531E-1
olens2_imon=2.16211E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11639E1
os_restr1_imon=3.084E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15087E1
os_ea1_imon=1.93873E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.0701E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=1.23934E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91914E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01775E1
cs_anode1_imon=3.14481E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=7.31477E-9
tplens_vset=1.4E-1
tplens_vmon=1.56652E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26364E1
iondef2_imon=1.58125E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98243E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=5.68736E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27923E0
ionrepsh_imon=1.90227E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33793E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.761E1
cs_ef2b_imon=3.13717E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.51908E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06124E2
lens4b_imon=2.00463E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71304E1
cs_ef2a_imon=3.18026E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.50692E0
os_ef2alow_imon=-2.59543E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.57641E-1
os_ef2bup_imon=-5.08371E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11228E1
os_restr2_imon=2.96063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02458E1
cs_anode2_imon=2.27287E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.07299E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.05341E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.71922E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=1.23918E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09481E0
cs_ionaccel_imon=-2.18188E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55641E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.53973E-1
window_imon=-1.38257E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.3914E-4
mask2_vset=0.0E0
mask2_vmon=-1.86726E1
mask2_imon=-4.61629E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=6.94982E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50099E3
multb_neg_imon=7.18342E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.15161E0
defgridb_imon=6.17469E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33465E1
os_fil1_imon=8.9668E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.69893E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65516E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30761E1
cs_fil1_imon=1.00185E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63142E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65906E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-2.99354E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.63637E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.85842E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34896E-1
cs_fil2_imon=-2.34483E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22683E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.35059E-3
inlet_lpb_pmon=1.78722E-1
chamber_ion_pmon=1.16923E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.38934E-1
res40_imon=-2.37302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=177
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.105E3	5.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80025E1	-5.00679E-4	-8.79998E1	2.38419E-5	5.29289E-3	9.32693E-2	2.73198E1	-3.27056E1	-3.26089E1	2.68719E1	1.16973E-7	2.51417E-3	2.51417E-3	6.29128E-3	1.79027E-1
2.0E0	4.308E3	4.0E0	3.16E2	1.6E2	-7.53334E-2	-8.80026E1	-5.24521E-4	-8.80002E1	-3.33786E-4	5.67436E-3	9.32217E-2	2.73467E1	-3.26829E1	-3.2615E1	2.68286E1	1.1693E-7	2.5199E-3	2.5199E-3	6.34037E-3	1.79398E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.44831E-2	-8.80024E1	-5.48363E-4	-8.79999E1	1.43051E-4	5.19753E-3	9.33886E-2	2.73883E1	-3.2685E1	-3.26012E1	2.6843E1	1.16778E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.79242E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80023E1	-8.34465E-4	-8.79999E1	1.90735E-4	5.19753E-3	9.30548E-2	2.72544E1	-3.26579E1	-3.26313E1	2.68244E1	1.17123E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.79027E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40967E-2	-8.80022E1	-8.10623E-4	-8.79998E1	3.09944E-4	5.24521E-3	9.29594E-2	2.7318E1	-3.26291E1	-3.26725E1	2.68184E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.7971E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.42513E-2	-8.80021E1	-6.4373E-4	-8.79996E1	2.14577E-4	5.24521E-3	9.31025E-2	2.73237E1	-3.26741E1	-3.25809E1	2.68214E1	1.16677E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.79242E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.48695E-2	-8.80023E1	-9.05991E-4	-8.79999E1	1.43051E-4	5.17368E-3	9.29832E-2	2.72889E1	-3.26675E1	-3.25978E1	2.68028E1	1.17134E-7	2.52757E-3	2.52757E-3	6.32936E-3	1.78775E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.47923E-2	-8.80022E1	-5.96046E-4	-8.79999E1	-1.19209E-4	5.48363E-3	9.30786E-2	2.73435E1	-3.26903E1	-3.26236E1	2.68238E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.78465E-1
1.2E1	2.49E2	0.0E0	4.85E2	3.23E2	-7.39421E-2	-8.80023E1	-5.72205E-4	-8.80002E1	1.90735E-4	5.79357E-3	9.29594E-2	2.73189E1	-3.26104E1	-3.26194E1	2.68298E1	1.16677E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.79086E-1
1.3E1	3.1E1	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80023E1	-6.91414E-4	-8.8E1	3.8147E-4	5.81741E-3	9.28879E-2	2.73574E1	-3.26717E1	-3.26603E1	2.67998E1	1.16778E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.78775E-1
1.4E1	9.217E3	5.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80019E1	-6.4373E-4	-8.79998E1	6.19888E-4	5.60284E-3	9.3174E-2	2.72691E1	-3.26284E1	-3.26307E1	2.68016E1	1.16981E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.79398E-1
1.5E1	1.2E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80022E1	-9.05991E-4	-8.80002E1	1.43051E-4	5.76973E-3	9.2864E-2	2.73009E1	-3.26723E1	-3.26536E1	2.68192E1	1.16778E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.7862E-1
1.6E1	3.331E3	1.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80023E1	-1.0252E-3	-8.8E1	1.66893E-4	5.38826E-3	9.29117E-2	2.73405E1	-3.26655E1	-3.26054E1	2.6798E1	1.16823E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.7918E-1
1.7E1	9.412E3	1.3E1	6.87E2	4.7E2	-7.31692E-2	-8.80025E1	-9.29832E-4	-8.80001E1	7.15256E-5	5.36442E-3	9.29594E-2	2.73207E1	-3.27017E1	-3.26338E1	2.67926E1	1.16726E-7	2.52134E-3	2.52134E-3	6.32371E-3	1.78748E-1
1.8E1	4.1732E4	2.0E1	7.27E2	5.0E2	-7.37874E-2	-8.80022E1	-9.05991E-4	-8.8E1	1.90735E-4	5.79357E-3	9.31978E-2	2.72438E1	-3.26056E1	-3.26597E1	2.68256E1					
1.9E1	2.742E3	1.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80022E1	-8.58307E-4	-8.79998E1	-4.76837E-5	5.43594E-3	9.31025E-2	2.73177E1	-3.26705E1	-3.26404E1	2.68556E1	1.1688E-7	2.51662E-3	2.51662E-3	6.29098E-3	1.78931E-1
2.0E1	7.55E2	0.0E0	8.08E2	5.58E2	-7.45602E-2	-8.80021E1	-9.05991E-4	-8.79998E1	7.15256E-5	5.48363E-3	9.29117E-2	2.73139E1	-3.26178E1	-3.26278E1	2.68208E1	1.1688E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.7862E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80023E1	-1.00136E-3	-8.79997E1	0.0E0	5.48363E-3	9.30071E-2	2.73712E1	-3.27086E1	-3.25676E1	2.68076E1	1.16829E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.79242E-1
2.2E1	4.3E1	0.0E0	8.89E2	6.17E2	-7.39421E-2	-8.80023E1	-1.14441E-3	-8.79997E1	-1.19209E-4	5.67436E-3	9.30309E-2	2.7298E1	-3.26767E1	-3.26054E1	2.6822E1	1.17073E-7	2.5131E-3	2.5131E-3	6.34518E-3	1.79332E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80021E1	-9.29832E-4	-8.79996E1	-9.53674E-5	5.67436E-3	9.32217E-2	2.73357E1	-3.26364E1	-3.2626E1	2.68256E1	1.16923E-7	2.51847E-3	2.51847E-3	6.35059E-3	1.78722E-1