[Scan]
initial_time=2015-12-15T23:59:28
final_time=2015-12-15T23:59:48
ip_count=19
run=1017
dataset=4
scan=257
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.88704E-6
ql1_vset=
ql1_vmon=-8.80023E1
ql1_imon=-8.0477E-10
ql2_vset=
ql2_vmon=-1.19209E-3
ql2_imon=6.14667E-10
ql3_vset=
ql3_vmon=-8.79996E1
ql3_imon=-2.29449E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=3.2233E-9
mult1=-1.06194E-8
mult2=-2.65873E-9
rf_tmon=-3.7674E-3
rf_agc=3.2168E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=5.355E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66571E0
bslens_imon=2.72933E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20077E1
lens5a_imon=1.98705E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12463E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=2.95094E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04643E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04965E1
cs_ea1_imon=2.28148E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03365E0
lens1_imon=1.62042E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64924E1
os_ef1alow_imon=2.97995E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.57651E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=2.97465E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.16622E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11259E1
os_restr1_imon=3.09885E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15363E1
os_ea1_imon=1.94151E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63632E1
os_ef1bup_imon=3.06488E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2156E0
cs_ionrep_imon=1.23515E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=3.13282E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.3889E-9
tplens_vset=1.4E-1
tplens_vmon=1.60435E0
tplens_imon=-3.99255E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2653E1
iondef3_imon=1.50177E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57477E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98412E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=5.83887E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28223E0
ionrepsh_imon=1.9064E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33704E1
lens5b_imon=2.18241E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74896E1
cs_ef2b_imon=3.12149E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.35539E-1
os_ea2_imon=-8.16399E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00372E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7137E1
cs_ef2a_imon=3.1866E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.54729E0
os_ef2alow_imon=-2.5984E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.50185E-1
os_ef2bup_imon=-5.323E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10846E1
os_restr2_imon=2.95059E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.29059E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01939E1
cs_anode2_imon=2.29597E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.09506E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68224E1
iondef4_imon=1.07486E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.80924E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.24129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11363E0
cs_ionaccel_imon=-2.08179E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02065E2
cs_ionfocb_imon=1.4712E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57343E1
einzel_imon=7.82938E-6
window_vset=0.0E0
window_vmon=1.61197E-1
window_imon=-1.04149E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86391E1
mask2_imon=-7.83184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=6.87644E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93732E3
defgrida_imon=6.54273E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.21711E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44711E0
defgridb_imon=5.96915E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33439E1
os_fil1_imon=8.96308E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.75095E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65822E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3073E1
cs_fil1_imon=1.00151E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.63215E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6557E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.66053E-2
os_fil2_imon=-3.15709E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.7521E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63164E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38614E-1
cs_fil2_imon=-2.31966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07724E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22388E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3445E-3
inlet_lpb_pmon=1.7897E-1
chamber_ion_pmon=1.16769E-7
chamber_cvt_pmon=2.52659E-3
foreline_cvt_pmon=2.52659E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.13799E-1
res40_imon=-2.5984E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.136E3	2.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80024E1	-1.21593E-3	-8.80001E1	-4.76837E-5	5.6982E-3	9.32455E-2	2.73228E1	-3.26685E1	-3.2616E1	2.68235E1	1.1672E-7	2.52236E-3	2.52236E-3	6.29684E-3	1.7912E-1
2.0E0	4.331E3	5.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80024E1	-7.86781E-4	-8.79998E1	2.86102E-4	5.72205E-3	9.29117E-2	2.73227E1	-3.26869E1	-3.26243E1	2.67925E1	1.16823E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.79332E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.42513E-2	-8.80022E1	-8.82149E-4	-8.80001E1	-1.19209E-4	5.4121E-3	9.29832E-2	2.7298E1	-3.26673E1	-3.26472E1	2.6804E1	1.16909E-7	2.5199E-3	2.5199E-3	6.31779E-3	1.79062E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80023E1	-6.4373E-4	-8.79998E1	4.76837E-5	5.79357E-3	9.31263E-2	2.72998E1	-3.26856E1	-3.26413E1	2.68316E1	1.17123E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.78722E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80025E1	-7.86781E-4	-8.79998E1	9.53674E-5	5.67436E-3	9.29117E-2	2.73364E1	-3.26579E1	-3.2629E1	2.68076E1	1.16981E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.78931E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80024E1	-8.34465E-4	-8.79998E1	4.76837E-5	5.60284E-3	9.32455E-2	2.72978E1	-3.26829E1	-3.26321E1	2.68178E1	1.16674E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.79639E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80023E1	-1.07288E-3	-8.80001E1	1.66893E-4	5.53131E-3	9.29832E-2	2.73092E1	-3.2675E1	-3.26644E1	2.68256E1	1.1688E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.78931E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.80022E1	-1.04904E-3	-8.80004E1	1.43051E-4	5.57899E-3	9.32455E-2	2.73165E1	-3.26374E1	-3.26554E1	2.68211E1	1.16774E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.79027E-1
1.2E1	2.15E2	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80021E1	-9.53674E-4	-8.8E1	-2.38419E-5	5.45979E-3	9.33409E-2	2.72576E1	-3.26885E1	-3.2599E1	2.68253E1	1.16981E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.78775E-1
1.3E1	3.4E1	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80024E1	-9.29832E-4	-8.79997E1	1.90735E-4	5.4121E-3	9.34362E-2	2.73015E1	-3.26362E1	-3.26561E1	2.68058E1	1.16829E-7	2.51935E-3	2.51935E-3	6.33762E-3	1.78775E-1
1.4E1	9.088E3	3.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80023E1	-9.53674E-4	-8.79999E1	2.86102E-4	5.45979E-3	9.30548E-2	2.73075E1	-3.26862E1	-3.26065E1	2.68186E1					
1.5E1	1.54E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80023E1	-1.12057E-3	-8.8E1	-4.76837E-5	5.62668E-3	9.31263E-2	2.73305E1	-3.26726E1	-3.26797E1	2.6828E1	1.16873E-7	2.52169E-3	2.52169E-3	6.28592E-3	1.79027E-1
1.6E1	3.276E3	1.0E0	6.47E2	4.41E2	-7.30146E-2	-8.80025E1	-1.26362E-3	-8.8E1	1.43051E-4	5.24521E-3	9.29356E-2	2.73077E1	-3.266E1	-3.26183E1	2.68163E1	1.17073E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.79332E-1
1.7E1	9.369E3	6.0E0	6.87E2	4.7E2	-7.286E-2	-8.80026E1	-9.29832E-4	-8.79999E1	1.66893E-4	5.55515E-3	9.28164E-2	2.73368E1	-3.27075E1	-3.26368E1	2.67721E1	1.16699E-7	2.52459E-3	2.52459E-3	6.33565E-3	1.78886E-1
1.8E1	4.1333E4	2.5E1	7.27E2	5.0E2	-7.3401E-2	-8.80026E1	-9.77516E-4	-8.79999E1	2.14577E-4	5.74589E-3	9.27925E-2	2.72632E1	-3.26726E1	-3.26549E1	2.68273E1	1.1721E-7	2.52035E-3	2.52035E-3	6.32087E-3	1.79447E-1
1.9E1	2.807E3	0.0E0	7.68E2	5.29E2	-7.34782E-2	-8.80022E1	-8.58307E-4	-8.80002E1	-9.53674E-5	5.53131E-3	9.26495E-2	2.73482E1	-3.2649E1	-3.26178E1	2.68076E1	1.16965E-7	2.52553E-3	2.52553E-3	6.32858E-3	1.78371E-1
2.0E1	7.79E2	0.0E0	8.08E2	5.58E2	-7.23964E-2	-8.8002E1	-1.19209E-3	-8.80002E1	4.76837E-5	5.48363E-3	9.25779E-2	2.73181E1	-3.2695E1	-3.26254E1	2.68308E1	1.1688E-7	2.5188E-3	2.5188E-3	6.34588E-3	1.79242E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.8002E1	-1.23978E-3	-8.80003E1	-1.19209E-4	5.38826E-3	9.28879E-2	2.73322E1	-3.26974E1	-3.26148E1	2.68052E1	1.16818E-7	2.51498E-3	2.51498E-3	6.29684E-3	1.7912E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.8002E1	-9.05991E-4	-8.80003E1	-1.19209E-4	5.74589E-3	9.29594E-2	2.73305E1	-3.26738E1	-3.26384E1	2.68041E1	1.1688E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.78931E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80023E1	-1.19209E-3	-8.79996E1	-4.76837E-5	5.74589E-3	9.30309E-2	2.72949E1	-3.26657E1	-3.2653E1	2.68224E1	1.16769E-7	2.52659E-3	2.52659E-3	6.3445E-3	1.7897E-1