[Scan]
initial_time=2015-12-15T23:59:56
final_time=2015-12-16T00:00:16
ip_count=19
run=1017
dataset=4
scan=258
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.39421E-2
qbias_imon=-3.81744E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-8.20065E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=6.1245E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.31632E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=3.23418E-9
mult1=-9.28285E-9
mult2=-2.63877E-9
rf_tmon=-3.4009E-3
rf_agc=3.26727E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=6.07967E-3
ql5_imon=4.94134E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67978E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19931E1
lens5a_imon=1.97837E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12546E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53706E1
cs_ef1b_imon=2.97225E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.01852E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05077E1
cs_ea1_imon=2.30117E-5
lens1_vset=-2.7E0
lens1_vmon=-3.00705E0
lens1_imon=1.33632E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.94306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03891E1
cs_ea2_imon=1.55435E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84088E1
cs_ef1a_imon=2.98054E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=2.17462E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11874E1
os_restr1_imon=3.10884E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15081E1
os_ea1_imon=1.94899E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25977E0
cs_ionrep_imon=1.25102E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91897E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=3.13118E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=7.3928E-9
tplens_vset=1.4E-1
tplens_vmon=1.57418E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26404E1
iondef3_imon=1.48639E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.55931E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98516E-4
ql6_vset=1.0E-1
ql6_vmon=9.28402E-2
ql6_imon=5.76389E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2462E0
ionrepsh_imon=1.91679E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.34023E1
lens5b_imon=2.16915E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75414E1
cs_ef2b_imon=3.13875E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.14155E-1
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71858E1
cs_ef2a_imon=3.17443E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.48703E0
os_ef2alow_imon=-2.77447E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.24143E-1
os_ef2bup_imon=-5.40537E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11177E1
os_restr2_imon=2.95315E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30636E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.25182E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72925E1
iondef1_imon=1.10272E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68214E1
iondef4_imon=1.10071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.79654E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=1.24985E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11152E0
cs_ionaccel_imon=-2.0681E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02063E2
cs_ionfocb_imon=1.47248E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55276E1
einzel_imon=7.92931E-6
window_vset=0.0E0
window_vmon=1.14029E-1
window_imon=-1.4374E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.38789E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.99749E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93753E3
defgrida_imon=6.41891E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.02061E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24019E0
defgridb_imon=6.08267E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33438E1
os_fil1_imon=8.96818E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.7286E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6556E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30714E1
cs_fil1_imon=1.00159E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62228E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65496E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.5088E-2
os_fil2_imon=-3.13448E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.36757E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8812E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35349E-1
cs_fil2_imon=-2.79811E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22353E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.78874E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.92018E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=181
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.206E3	4.0E0	1.47E2	4.1E1	-7.47149E-2	-8.80026E1	-1.09673E-3	-8.79995E1	9.53674E-5	5.29289E-3	9.30309E-2	2.73273E1	-3.26633E1	-3.26332E1	2.6814E1	1.16973E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.79027E-1
2.0E0	4.567E3	2.0E0	3.16E2	1.6E2	-7.45602E-2	-8.80024E1	-8.82149E-4	-8.79996E1	2.14577E-4	5.45979E-3	9.29594E-2	2.73201E1	-3.27017E1	-3.26116E1	2.68045E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.79332E-1
3.0E0	8.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80025E1	-8.10623E-4	-8.79999E1	-1.66893E-4	5.43594E-3	9.32217E-2	2.73063E1	-3.26626E1	-3.26797E1	2.67955E1	1.16829E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.78931E-1
4.0E0	9.0E0	0.0E0	6.55E2	3.98E2	-7.44831E-2	-8.80024E1	-8.34465E-4	-8.79999E1	9.53674E-5	5.57899E-3	9.30309E-2	2.73122E1	-3.26732E1	-3.26307E1	2.67998E1	1.1693E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.78931E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80024E1	-9.53674E-4	-8.79998E1	9.53674E-5	5.26905E-3	9.28164E-2	2.72955E1	-3.26585E1	-3.26098E1	2.68036E1	1.16724E-7	2.52815E-3	2.52815E-3	6.33977E-3	1.78722E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.47923E-2	-8.80024E1	-1.04904E-3	-8.79999E1	2.38419E-4	5.43594E-3	9.29117E-2	2.73204E1	-3.26779E1	-3.26526E1	2.68148E1	1.16798E-7	2.5233E-3	2.5233E-3	6.32626E-3	1.7895E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.43285E-2	-8.80023E1	-1.14441E-3	-8.8E1	5.00679E-4	5.84126E-3	9.31025E-2	2.73488E1	-3.26331E1	-3.26408E1	2.68346E1	1.16677E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.79398E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80022E1	-1.16825E-3	-8.8E1	1.43051E-4	5.48363E-3	9.30309E-2	2.72698E1	-3.26729E1	-3.25959E1	2.68239E1					
1.2E1	2.29E2	0.0E0	4.85E2	3.23E2	-7.49466E-2	-8.80023E1	-7.15256E-4	-8.80002E1	2.14577E-4	5.34058E-3	9.30309E-2	2.73185E1	-3.26559E1	-3.26012E1	2.68037E1	1.16669E-7	2.52093E-3	2.52093E-3	6.28667E-3	1.79062E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.41738E-2	-8.80025E1	-6.91414E-4	-8.8E1	1.90735E-4	5.45979E-3	9.28402E-2	2.73564E1	-3.26838E1	-3.26461E1	2.68016E1	1.16954E-7	2.52106E-3	2.52106E-3	6.34231E-3	1.79114E-1
1.4E1	9.24E3	6.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80023E1	-1.0252E-3	-8.80001E1	7.15256E-5	5.4121E-3	9.29117E-2	2.72949E1	-3.26506E1	-3.26236E1	2.67908E1	1.1688E-7	2.51443E-3	2.51443E-3	6.33486E-3	1.79554E-1
1.5E1	1.39E2	0.0E0	6.06E2	4.11E2	-7.40967E-2	-8.80023E1	-9.29832E-4	-8.79999E1	1.43051E-4	5.38826E-3	9.29117E-2	2.73296E1	-3.26725E1	-3.26101E1	2.67998E1	1.1688E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.78465E-1
1.6E1	3.304E3	3.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80021E1	-7.39098E-4	-8.8E1	-1.66893E-4	5.43594E-3	9.26495E-2	2.73263E1	-3.26779E1	-3.2593E1	2.68348E1	1.16677E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.78465E-1
1.7E1	9.362E3	5.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80023E1	-6.67572E-4	-8.8E1	-2.6226E-4	5.19753E-3	9.27687E-2	2.7308E1	-3.26178E1	-3.26437E1	2.68424E1	1.17023E-7	2.52169E-3	2.52169E-3	6.34518E-3	1.79485E-1
1.8E1	4.1169E4	2.6E1	7.27E2	5.0E2	-7.31692E-2	-8.80024E1	-6.91414E-4	-8.80002E1	1.90735E-4	5.57899E-3	9.27448E-2	2.72925E1	-3.26476E1	-3.26404E1	2.67968E1	1.1688E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.79242E-1
1.9E1	2.745E3	2.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80027E1	-8.34465E-4	-8.80002E1	1.19209E-4	5.6982E-3	9.29832E-2	2.72898E1	-3.26543E1	-3.2639E1	2.68105E1	1.16823E-7	2.52384E-3	2.52384E-3	6.29665E-3	1.79792E-1
2.0E1	7.82E2	2.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80024E1	-7.15256E-4	-8.80002E1	-2.38419E-5	5.29289E-3	9.29117E-2	2.73394E1	-3.26703E1	-3.26566E1	2.684E1	1.16774E-7	2.51417E-3	2.51417E-3	6.32356E-3	1.78569E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80026E1	-5.24521E-4	-8.8E1	7.15256E-5	5.72205E-3	9.29117E-2	2.72961E1	-3.26951E1	-3.2617E1	2.68316E1	1.17104E-7	2.52179E-3	2.52179E-3	6.29603E-3	1.78728E-1
2.2E1	4.5E1	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80023E1	-5.24521E-4	-8.80002E1	1.43051E-4	5.6982E-3	9.30309E-2	2.73169E1	-3.26744E1	-3.26319E1	2.68094E1	1.16727E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.79242E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.39421E-2	-8.80018E1	-5.48363E-4	-8.79999E1	2.86102E-4	6.07967E-3	9.28402E-2	2.72925E1	-3.26645E1	-3.26404E1	2.68214E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.78874E-1