[Scan]
initial_time=2015-12-16T00:01:19
final_time=2015-12-16T00:01:40
ip_count=19
run=1017
dataset=4
scan=261
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.85596E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.94494E-10
ql2_vset=
ql2_vmon=-1.07288E-3
ql2_imon=6.07753E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.21994E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=3.24121E-9
mult1=-9.48754E-9
mult2=-2.59885E-9
rf_tmon=-5.94239E-3
rf_agc=3.12848E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.93662E-3
ql5_imon=4.93157E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.54136E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19959E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.04945E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54127E1
cs_ef1b_imon=2.93765E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02182E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=2.28012E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06299E0
lens1_imon=1.86002E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=3.00432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04075E1
cs_ea2_imon=1.54904E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84496E1
cs_ef1a_imon=2.94882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.17674E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11388E1
os_restr1_imon=3.09947E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14669E1
os_ea1_imon=1.93945E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.06055E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28154E0
cs_ionrep_imon=1.23973E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91821E2
cs_nozzle_imon=1.93193E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02091E1
cs_anode1_imon=3.13875E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.37128E-9
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26272E1
iondef3_imon=1.47117E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.58364E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.29356E-2
ql6_imon=5.24426E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24008E0
ionrepsh_imon=1.90737E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.16837E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74117E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-2.98588E-1
os_ea2_imon=-1.03836E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00828E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71744E1
cs_ef2a_imon=3.16542E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5489E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.55067E-1
os_ef2bup_imon=-5.26121E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10451E1
os_restr2_imon=2.97333E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29532E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.26839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.10671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.78848E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=1.25214E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16438E0
cs_ionaccel_imon=-2.38525E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56507E1
einzel_imon=7.49323E-6
window_vset=0.0E0
window_vmon=1.36253E-1
window_imon=-8.46352E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82611E2
mask1_imon=2.38875E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-5.21995E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.76493E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.97905E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50116E3
multb_neg_imon=6.95022E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35946E0
defgridb_imon=5.79663E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33459E1
os_fil1_imon=8.9659E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76704E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65564E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30719E1
cs_fil1_imon=1.00107E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62924E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65639E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.53201E-2
os_fil2_imon=-3.09244E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.75199E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60508E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37809E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.2143E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22376E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.7918E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.97134E-1
res40_imon=-2.65554E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.229E3	3.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80026E1	-9.05991E-4	-8.79997E1	2.38419E-4	5.57899E-3	9.31978E-2	2.72558E1	-3.26014E1	-3.26446E1	2.68157E1	1.16774E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.7918E-1
2.0E0	4.43E3	2.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80024E1	-8.34465E-4	-8.79997E1	4.52995E-4	5.6982E-3	9.30309E-2	2.73082E1	-3.26915E1	-3.26315E1	2.68369E1	1.16981E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.79242E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80024E1	-8.10623E-4	-8.79997E1	5.00679E-4	5.48363E-3	9.31263E-2	2.73303E1	-3.26618E1	-3.26327E1	2.68272E1	1.16886E-7	2.51693E-3	2.51693E-3	6.32978E-3	1.78673E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80024E1	-8.10623E-4	-8.79999E1	1.19209E-4	5.53131E-3	9.32455E-2	2.72914E1	-3.26728E1	-3.26335E1	2.67976E1	1.16997E-7	2.5165E-3	2.5165E-3	6.31761E-3	1.78861E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80025E1	-1.09673E-3	-8.80002E1	-1.43051E-4	4.79221E-3	9.3174E-2	2.72744E1	-3.26266E1	-3.26283E1	2.67881E1	1.16999E-7	2.51498E-3	2.51498E-3	6.31879E-3	1.78728E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80023E1	-1.07288E-3	-8.8E1	-1.90735E-4	5.14984E-3	9.31501E-2	2.72319E1	-3.26553E1	-3.26235E1	2.68024E1	1.17053E-7	2.51679E-3	2.51679E-3	6.29703E-3	1.78914E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80021E1	-9.53674E-4	-8.79999E1	-1.66893E-4	5.43594E-3	9.29832E-2	2.73134E1	-3.26909E1	-3.26065E1	2.68366E1	1.16578E-7	2.53151E-3	2.53151E-3	6.3074E-3	1.79114E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.80023E1	-1.21593E-3	-8.79996E1	1.19209E-4	5.57899E-3	9.32693E-2	2.73405E1	-3.26422E1	-3.26512E1	2.68653E1	1.17023E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.7918E-1
1.2E1	2.35E2	0.0E0	4.85E2	3.23E2	-7.41738E-2	-8.80023E1	-9.29832E-4	-8.79997E1	2.38419E-4	5.79357E-3	9.28164E-2	2.71998E1	-3.25986E1	-3.2631E1	2.68487E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.79242E-1
1.3E1	2.4E1	0.0E0	5.25E2	3.53E2	-7.44059E-2	-8.80024E1	-1.19209E-3	-8.79998E1	2.38419E-4	5.50747E-3	9.3174E-2	2.72668E1	-3.26608E1	-3.26685E1	2.68262E1	1.1703E-7	2.52566E-3	2.52566E-3	6.31651E-3	1.78534E-1
1.4E1	9.326E3	7.0E0	5.66E2	3.82E2	-7.40967E-2	-8.8002E1	-1.33514E-3	-8.8E1	-2.14577E-4	5.53131E-3	9.31501E-2	2.73153E1	-3.26897E1	-3.25701E1	2.68418E1	1.17023E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.79332E-1
1.5E1	1.29E2	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80024E1	-1.09673E-3	-8.8E1	1.90735E-4	5.22137E-3	9.30071E-2	2.72817E1	-3.26458E1	-3.26398E1	2.68111E1	1.16829E-7	2.52647E-3	2.52647E-3	6.32386E-3	1.79086E-1
1.6E1	3.333E3	1.0E0	6.47E2	4.41E2	-7.46377E-2	-8.80021E1	-1.09673E-3	-8.79997E1	7.15256E-5	5.48363E-3	9.32693E-2	2.72962E1	-3.26632E1	-3.26213E1	2.68286E1	1.16829E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.79086E-1
1.7E1	9.35E3	4.0E0	6.87E2	4.7E2	-7.34782E-2	-8.80022E1	-1.07288E-3	-8.79999E1	3.57628E-4	5.38826E-3	9.29594E-2	2.73694E1	-3.273E1	-3.259E1	2.68388E1	1.16973E-7	2.52169E-3	2.52169E-3	6.33977E-3	1.79332E-1
1.8E1	4.1333E4	2.7E1	7.27E2	5.0E2	-7.38649E-2	-8.80022E1	-1.14441E-3	-8.8E1	3.8147E-4	5.81741E-3	9.30548E-2	2.72739E1	-3.259E1	-3.26561E1	2.68262E1	1.16626E-7	2.51662E-3	2.51662E-3	6.33486E-3	1.79242E-1
1.9E1	2.858E3	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80022E1	-1.16825E-3	-8.79998E1	-4.76837E-5	5.53131E-3	9.32217E-2	2.73764E1	-3.27002E1	-3.26185E1	2.68117E1	1.16829E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.79398E-1
2.0E1	7.5E2	4.0E0	8.08E2	5.58E2	-7.43285E-2	-8.80023E1	-1.45435E-3	-8.8E1	7.15256E-5	5.79357E-3	9.30071E-2	2.73069E1	-3.26524E1	-3.2626E1	2.67908E1	1.16774E-7	2.52599E-3	2.52599E-3	6.30202E-3	1.79332E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80023E1	-9.77516E-4	-8.79998E1	-2.38419E-4	5.26905E-3	9.31978E-2	2.72684E1	-3.25918E1	-3.26999E1	2.67902E1	1.16923E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.79792E-1
2.2E1	7.0E1	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.80026E1	-1.09673E-3	-8.8E1	-1.66893E-4	5.57899E-3	9.30786E-2	2.74184E1	-3.27688E1	-3.25788E1	2.68204E1	1.17083E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.78155E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80026E1	-1.07288E-3	-8.79999E1	2.38419E-5	5.93662E-3	9.29356E-2	2.73123E1	-3.26278E1	-3.26272E1	2.67974E1	1.16873E-7	2.51954E-3	2.51954E-3	6.29128E-3	1.7918E-1