[Scan]
initial_time=2015-12-16T00:01:47
final_time=2015-12-16T00:02:08
ip_count=19
run=1017
dataset=4
scan=262
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.78518E-6
ql1_vset=
ql1_vmon=-8.80027E1
ql1_imon=-7.96855E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=6.27768E-10
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-2.2308E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=3.25543E-9
mult1=-8.90959E-9
mult2=-2.65673E-9
rf_tmon=-4.83687E-3
rf_agc=3.20238E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=4.97592E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.53618E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19954E1
lens5a_imon=2.0127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12516E2
lens4a_imon=2.0498E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53922E1
cs_ef1b_imon=2.93943E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05088E1
cs_ea1_imon=2.27462E-5
lens1_vset=-2.7E0
lens1_vmon=-2.98051E0
lens1_imon=1.04963E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=3.01206E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.59612E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8462E1
cs_ef1a_imon=2.95958E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=2.18744E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11627E1
os_restr1_imon=3.09825E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15559E1
os_ea1_imon=1.92245E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63711E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24148E0
cs_ionrep_imon=1.2581E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02389E1
cs_anode1_imon=3.15837E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20606E0
olens4_imon=7.38617E-9
tplens_vset=1.4E-1
tplens_vmon=1.53761E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26428E1
iondef3_imon=1.51966E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26843E1
iondef2_imon=1.55187E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98395E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=5.24223E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29339E0
ionrepsh_imon=1.89449E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33386E1
lens5b_imon=2.19003E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74241E1
cs_ef2b_imon=3.10624E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.86713E-1
os_ea2_imon=-3.76754E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00333E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.17366E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.51097E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.44899E-1
os_ef2bup_imon=-5.08719E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1073E1
os_restr2_imon=2.96445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23109E2
cs_ionfoca_imon=6.31769E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02047E1
cs_anode2_imon=2.28608E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.0829E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67854E1
iondef4_imon=1.07669E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.79095E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=1.24687E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14462E0
cs_ionaccel_imon=-2.14713E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47376E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55751E1
einzel_imon=7.09705E-6
window_vset=0.0E0
window_vmon=1.27908E-1
window_imon=-1.08022E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.38896E-4
mask2_vset=0.0E0
mask2_vmon=-1.869E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.6754E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93699E3
defgrida_imon=6.36582E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=6.9569E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33474E1
os_fil1_imon=8.95551E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79971E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65709E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30735E1
cs_fil1_imon=1.00204E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62737E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65672E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.64809E-2
os_fil2_imon=-3.11518E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.67112E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.80148E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38641E-1
cs_fil2_imon=-2.68656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04354E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22467E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.79027E-1
chamber_ion_pmon=1.16674E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.06122E-1
res40_imon=-2.80742E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.259E3	3.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80025E1	-1.16825E-3	-8.80004E1	1.43051E-4	5.57899E-3	9.28879E-2	2.73033E1	-3.26675E1	-3.26056E1	2.68022E1	1.17073E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.7918E-1
2.0E0	4.579E3	9.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80028E1	-7.39098E-4	-8.80003E1	1.19209E-4	5.55515E-3	9.29356E-2	2.72704E1	-3.26283E1	-3.26431E1	2.68667E1	1.16981E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.78931E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.17007E-2	-8.80025E1	-6.67572E-4	-8.80001E1	1.66893E-4	5.24521E-3	9.28879E-2	2.73247E1	-3.2697E1	-3.26162E1	2.6835E1	1.16813E-7	2.52509E-3	2.52509E-3	6.31779E-3	1.79357E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80027E1	-1.12057E-3	-8.8E1	2.86102E-4	5.31673E-3	9.29832E-2	2.73327E1	-3.26723E1	-3.26236E1	2.68516E1	1.16835E-7	2.52027E-3	2.52027E-3	6.31858E-3	1.78989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80025E1	-1.45435E-3	-8.79996E1	-9.53674E-5	5.10216E-3	9.28164E-2	2.73363E1	-3.26939E1	-3.26254E1	2.68244E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.79242E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80026E1	-9.05991E-4	-8.79999E1	4.76837E-5	5.19753E-3	9.28164E-2	2.73063E1	-3.26386E1	-3.259E1	2.68154E1	1.16829E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.7831E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80025E1	-1.04904E-3	-8.79998E1	9.53674E-5	5.29289E-3	9.30309E-2	2.7321E1	-3.26826E1	-3.26001E1	2.68514E1	1.17236E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.79554E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80028E1	-1.16825E-3	-8.79998E1	-7.15256E-5	5.38826E-3	9.26971E-2	2.72873E1	-3.2615E1	-3.26389E1	2.6837E1	1.16674E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.79485E-1
1.2E1	2.33E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80025E1	-1.19209E-3	-8.79997E1	0.0E0	5.48363E-3	9.26733E-2	2.73213E1	-3.26999E1	-3.26032E1	2.6819E1	1.16835E-7	2.51581E-3	2.51581E-3	6.32418E-3	1.79306E-1
1.3E1	2.6E1	0.0E0	5.25E2	3.53E2	-7.24736E-2	-8.80028E1	-1.21593E-3	-8.79996E1	2.14577E-4	5.29289E-3	9.29594E-2	2.73027E1	-3.26813E1	-3.26843E1	2.68328E1	1.16981E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.79086E-1
1.4E1	9.12E3	3.0E0	5.66E2	3.82E2	-7.37103E-2	-8.80029E1	-8.58307E-4	-8.80001E1	2.38419E-4	5.36442E-3	9.28402E-2	2.73225E1	-3.26819E1	-3.26134E1	2.6825E1	1.16981E-7	2.51771E-3	2.51771E-3	6.29098E-3	1.78931E-1
1.5E1	1.38E2	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80028E1	-8.82149E-4	-8.80003E1	2.86102E-4	5.50747E-3	9.31025E-2	2.72949E1	-3.2644E1	-3.26573E1	2.6816E1	1.16727E-7	2.52538E-3	2.52538E-3	6.31837E-3	1.7831E-1
1.6E1	3.243E3	1.0E0	6.47E2	4.41E2	-7.39421E-2	-8.8003E1	-9.05991E-4	-8.79997E1	3.8147E-4	5.6982E-3	9.30548E-2	2.73387E1	-3.2685E1	-3.26183E1	2.68424E1	1.16973E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.78265E-1
1.7E1	9.214E3	8.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80027E1	-1.12057E-3	-8.8E1	2.86102E-4	5.31673E-3	9.29594E-2	2.72585E1	-3.26531E1	-3.25776E1	2.68172E1	1.16778E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.79398E-1
1.8E1	4.1239E4	2.5E1	7.27E2	5.0E2	-7.35556E-2	-8.80028E1	-1.04904E-3	-8.79998E1	2.38419E-5	5.6982E-3	9.28879E-2	2.71951E1	-3.2498E1	-3.26122E1	2.68094E1	1.16724E-7	2.52169E-3	2.52169E-3	6.34518E-3	1.78569E-1
1.9E1	2.918E3	2.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80025E1	-5.96046E-4	-8.79999E1	1.90735E-4	5.36442E-3	9.30071E-2	2.73231E1	-3.27119E1	-3.26224E1	2.68319E1	1.16778E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.79242E-1
2.0E1	7.09E2	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80025E1	-9.77516E-4	-8.8E1	3.57628E-4	5.19753E-3	9.28402E-2	2.73181E1	-3.26862E1	-3.26071E1	2.67217E1	1.1688E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.79554E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.44059E-2	-8.80028E1	-5.96046E-4	-8.8E1	-1.19209E-4	5.05447E-3	9.28402E-2	2.73069E1	-3.26705E1	-3.26386E1	2.678E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.7918E-1
2.2E1	7.7E1	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80027E1	-6.91414E-4	-8.79997E1	-2.38419E-5	5.4121E-3	9.31025E-2	2.73116E1	-3.27198E1	-3.26484E1	2.67769E1	1.17032E-7	2.5199E-3	2.5199E-3	6.33486E-3	1.79554E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80027E1	-7.62939E-4	-8.80001E1	-2.38419E-5	5.10216E-3	9.29832E-2	2.73183E1	-3.26843E1	-3.26428E1	2.67854E1	1.16674E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.79027E-1