[Scan]
initial_time=2015-12-16T00:02:15
final_time=2015-12-16T00:02:36
ip_count=19
run=1017
dataset=4
scan=263
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.81158E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-8.52335E-10
ql2_vset=
ql2_vmon=-1.21593E-3
ql2_imon=6.40595E-10
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.20618E-9
ql4_vset=
ql4_vmon=2.38419E-5
ql4_imon=3.23708E-9
mult1=-1.07759E-8
mult2=-2.54295E-9
rf_tmon=-4.63259E-3
rf_agc=3.28409E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.01502E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62846E0
bslens_imon=2.59635E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.9543E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05217E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54269E1
cs_ef1b_imon=2.95194E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04554E2
lens23_imon=1.02064E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05206E1
cs_ea1_imon=2.29444E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04186E0
lens1_imon=1.64425E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64284E1
os_ef1alow_imon=2.94499E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03956E1
cs_ea2_imon=1.56037E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83728E1
cs_ef1a_imon=2.93387E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.18055E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=3.13474E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15689E1
os_ea1_imon=1.96174E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64574E1
os_ef1bup_imon=3.05168E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23617E0
cs_ionrep_imon=1.24748E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9191E2
cs_nozzle_imon=1.9314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0083E1
cs_anode1_imon=3.08782E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=7.35697E-9
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-1.25456E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2608E1
iondef3_imon=1.48746E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26434E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=5.57876E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=1.88458E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.341E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75138E1
cs_ef2b_imon=3.17574E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.19464E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72051E1
cs_ef2a_imon=3.15072E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.48723E0
os_ef2alow_imon=-3.00551E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95493E-1
os_ef2bup_imon=-5.50075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11089E1
os_restr2_imon=2.95229E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.3184E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02777E1
cs_anode2_imon=2.23395E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.10024E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.10936E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.75435E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=1.23984E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12551E0
cs_ionaccel_imon=-2.20273E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01934E2
cs_ionfocb_imon=1.46889E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56776E1
einzel_imon=8.61226E-6
window_vset=0.0E0
window_vmon=1.09953E-1
window_imon=-1.41732E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82509E2
mask1_imon=2.38789E-4
mask2_vset=0.0E0
mask2_vmon=-1.87027E1
mask2_imon=-2.98292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92697E3
multa_neg_imon=6.92505E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.25964E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=8.24171E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33437E1
os_fil1_imon=8.97242E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79392E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65722E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30751E1
cs_fil1_imon=1.00246E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61416E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65704E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.62277E-2
os_fil2_imon=-3.49166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.26567E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56862E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35395E-1
cs_fil2_imon=-2.53018E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.12463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22457E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.79332E-1
chamber_ion_pmon=1.17023E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.36414E-1
res40_imon=-2.62324E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.12E3	2.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80024E1	-9.29832E-4	-8.79999E1	2.38419E-5	5.31673E-3	9.30071E-2	2.73263E1	-3.26254E1	-3.26567E1	2.67541E1	1.16778E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.79554E-1
2.0E0	4.479E3	4.0E0	3.16E2	1.6E2	-7.38649E-2	-8.80022E1	-1.04904E-3	-8.80001E1	2.38419E-4	5.62668E-3	9.26733E-2	2.73335E1	-3.27025E1	-3.25762E1	2.67792E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.78874E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80022E1	-1.09673E-3	-8.79998E1	2.86102E-4	5.65052E-3	9.3317E-2	2.72839E1	-3.26691E1	-3.26148E1	2.68319E1	1.16916E-7	2.52342E-3	2.52342E-3	6.32858E-3	1.7867E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-7.26282E-2	-8.80021E1	-1.04904E-3	-8.79999E1	1.66893E-4	5.17368E-3	9.28402E-2	2.73222E1	-3.26785E1	-3.26478E1	2.6825E1	1.16841E-7	2.52635E-3	2.52635E-3	6.29035E-3	1.7905E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80023E1	-5.96046E-4	-8.79998E1	-2.38419E-5	5.29289E-3	9.31263E-2	2.73033E1	-3.26831E1	-3.26591E1	2.67938E1	1.16774E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.78874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.34782E-2	-8.80025E1	-9.29832E-4	-8.79999E1	1.43051E-4	5.67436E-3	9.30548E-2	2.73004E1	-3.26555E1	-3.26543E1	2.68635E1	1.16829E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.79242E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80027E1	-1.09673E-3	-8.79999E1	1.90735E-4	5.38826E-3	9.28164E-2	2.73165E1	-3.26651E1	-3.26591E1	2.67914E1	1.16873E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.79332E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.80027E1	-7.15256E-4	-8.79994E1	9.53674E-5	5.43594E-3	9.29832E-2	2.72859E1	-3.26837E1	-3.26152E1	2.67938E1	1.16774E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.78874E-1
1.2E1	2.46E2	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80024E1	-5.72205E-4	-8.79997E1	2.38419E-5	5.45979E-3	9.29117E-2	2.7275E1	-3.26461E1	-3.26036E1	2.6807E1	1.16981E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.78155E-1
1.3E1	1.7E1	0.0E0	5.25E2	3.53E2	-7.35556E-2	-8.80024E1	-4.29153E-4	-8.79999E1	1.90735E-4	5.38826E-3	9.29356E-2	2.73183E1	-3.26873E1	-3.2644E1	2.6803E1	1.16778E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.7862E-1
1.4E1	9.065E3	2.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80025E1	-4.52995E-4	-8.8E1	2.38419E-4	5.24521E-3	9.30309E-2	2.73299E1	-3.26543E1	-3.26638E1	2.68058E1	1.1688E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.7862E-1
1.5E1	1.53E2	1.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80025E1	-6.67572E-4	-8.79997E1	4.76837E-5	5.31673E-3	9.26495E-2	2.72847E1	-3.26855E1	-3.25972E1	2.68382E1	1.17173E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.79027E-1
1.6E1	3.228E3	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80027E1	-9.77516E-4	-8.79999E1	1.66893E-4	5.00679E-3	9.27687E-2	2.72962E1	-3.26679E1	-3.26142E1	2.6798E1	1.17032E-7	2.52099E-3	2.52099E-3	6.29098E-3	1.79086E-1
1.7E1	9.332E3	7.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80026E1	-1.00136E-3	-8.79997E1	2.6226E-4	5.38826E-3	9.30548E-2	2.73291E1	-3.26753E1	-3.26639E1	2.6807E1	1.17223E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.7918E-1
1.8E1	4.1055E4	2.7E1	7.27E2	5.0E2	-7.23964E-2	-8.80023E1	-1.04904E-3	-8.79999E1	3.09944E-4	5.50747E-3	9.30309E-2	2.73435E1	-3.27101E1	-3.26206E1	2.6789E1	1.16981E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.78931E-1
1.9E1	2.809E3	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80023E1	-6.67572E-4	-8.79999E1	1.43051E-4	5.26905E-3	9.31978E-2	2.72931E1	-3.26404E1	-3.26044E1	2.68136E1	1.17083E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.79086E-1
2.0E1	7.56E2	2.0E0	8.08E2	5.58E2	-7.21643E-2	-8.80023E1	-9.29832E-4	-8.8E1	2.14577E-4	5.57899E-3	9.29117E-2	2.7311E1	-3.26602E1	-3.2629E1	2.68244E1	1.16778E-7	2.51116E-3	2.51116E-3	6.3074E-3	1.79398E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80023E1	-1.0252E-3	-8.80001E1	2.86102E-4	5.72205E-3	9.30071E-2	2.72945E1	-3.26431E1	-3.26201E1	2.67914E1	1.16774E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.78417E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80025E1	-9.29832E-4	-8.80001E1	3.09944E-4	5.29289E-3	9.29832E-2	2.7321E1	-3.26478E1	-3.26313E1	2.68256E1	1.16923E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.79945E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80026E1	-1.21593E-3	-8.80002E1	2.38419E-5	5.53131E-3	9.31263E-2	2.73363E1	-3.26434E1	-3.2608E1	2.6828E1	1.17023E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.79332E-1