[Scan]
initial_time=2015-12-16T00:02:43
final_time=2015-12-16T00:03:04
ip_count=19
run=1017
dataset=4
scan=264
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.54877E-2
qbias_imon=-3.82829E-6
ql1_vset=
ql1_vmon=-8.80025E1
ql1_imon=-7.63667E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=6.0674E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.15648E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=3.21566E-9
mult1=-9.52366E-9
mult2=-2.7246E-9
rf_tmon=-4.76477E-3
rf_agc=3.17594E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=4.85098E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65773E0
bslens_imon=2.82254E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.9773E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54507E1
cs_ef1b_imon=3.00476E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=2.30427E-5
lens1_vset=-2.7E0
lens1_vmon=-3.02634E0
lens1_imon=1.35533E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64805E1
os_ef1alow_imon=2.94985E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03961E1
cs_ea2_imon=1.55733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83392E1
cs_ef1a_imon=2.95541E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=2.1767E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11801E1
os_restr1_imon=3.13161E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.94234E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64562E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26652E0
cs_ionrep_imon=1.23468E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93622E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01085E1
cs_anode1_imon=3.09825E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20599E0
olens4_imon=7.37913E-9
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-2.99346E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26482E1
iondef3_imon=1.49424E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26278E1
iondef2_imon=1.57283E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98274E-4
ql6_vset=1.0E-1
ql6_vmon=9.33409E-2
ql6_imon=5.54049E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=1.89908E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33952E1
lens5b_imon=2.20405E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7577E1
cs_ef2b_imon=3.14238E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.83304E-1
os_ea2_imon=-5.66113E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06104E2
lens4b_imon=2.00554E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71935E1
cs_ef2a_imon=3.22614E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55963E0
os_ef2alow_imon=-3.09239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.00503E-1
os_ef2bup_imon=-5.60153E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10863E1
os_restr2_imon=2.9648E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23054E2
cs_ionfoca_imon=6.31118E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02157E1
cs_anode2_imon=2.21379E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73045E1
iondef1_imon=1.07607E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.14342E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.80745E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=1.25071E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15041E0
cs_ionaccel_imon=-2.44252E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01993E2
cs_ionfocb_imon=1.46955E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57222E1
einzel_imon=8.14657E-6
window_vset=0.0E0
window_vmon=2.01756E-2
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8255E2
mask1_imon=2.38511E-4
mask2_vset=0.0E0
mask2_vmon=-1.85996E1
mask2_imon=-6.2149E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50106E3
multb_neg_imon=7.28908E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=5.93722E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33467E1
os_fil1_imon=8.96663E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.86285E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65615E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30775E1
cs_fil1_imon=1.00104E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62331E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65503E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.57071E-2
os_fil2_imon=-3.59013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.29463E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63602E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37143E-1
cs_fil2_imon=-1.93938E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10146E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22411E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.7897E-1
chamber_ion_pmon=1.16818E-7
chamber_cvt_pmon=2.52131E-3
foreline_cvt_pmon=2.52131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.4878E-1
res40_imon=-3.06459E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.324E3	3.0E0	1.47E2	4.1E1	-7.40967E-2	-8.80027E1	-8.82149E-4	-8.80001E1	1.19209E-4	5.98431E-3	9.29832E-2	2.72997E1	-3.26338E1	-3.26813E1	2.67914E1	1.1688E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.79086E-1
2.0E0	4.676E3	6.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80028E1	-9.29832E-4	-8.80001E1	0.0E0	5.74589E-3	9.30548E-2	2.73075E1	-3.26982E1	-3.26162E1	2.67932E1	1.16934E-7	2.52119E-3	2.52119E-3	6.32679E-3	1.79038E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.36328E-2	-8.80033E1	-9.53674E-4	-8.80002E1	1.90735E-4	6.24657E-3	9.29594E-2	2.733E1	-3.26544E1	-3.26376E1	2.6796E1					
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-7.38649E-2	-8.80026E1	-7.62939E-4	-8.80001E1	1.43051E-4	5.79357E-3	9.30548E-2	2.73123E1	-3.26681E1	-3.2599E1	2.68346E1	1.17005E-7	2.52197E-3	2.52197E-3	6.33863E-3	1.79652E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80029E1	-1.0252E-3	-8.79997E1	-1.66893E-4	5.8651E-3	9.29117E-2	2.72979E1	-3.26687E1	-3.2623E1	2.68358E1	1.16886E-7	2.52585E-3	2.52585E-3	6.32418E-3	1.79465E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80028E1	-7.86781E-4	-8.80001E1	1.43051E-4	5.76973E-3	9.29356E-2	2.72997E1	-3.26873E1	-3.26074E1	2.68286E1	1.16677E-7	2.52977E-3	2.52977E-3	6.32386E-3	1.7862E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.47149E-2	-8.80024E1	-7.86781E-4	-8.79997E1	-4.76837E-5	5.74589E-3	9.30548E-2	2.73027E1	-3.2649E1	-3.26461E1	2.68214E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.78931E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.43285E-2	-8.80026E1	-7.86781E-4	-8.79998E1	-1.90735E-4	5.91278E-3	9.29594E-2	2.72769E1	-3.2694E1	-3.26407E1	2.68118E1	1.16823E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.79332E-1
1.2E1	2.27E2	0.0E0	4.85E2	3.23E2	-7.45602E-2	-8.80026E1	-9.05991E-4	-8.79998E1	1.90735E-4	6.05583E-3	9.32217E-2	2.73327E1	-3.26831E1	-3.26164E1	2.68118E1	1.16835E-7	2.51915E-3	2.51915E-3	6.29624E-3	1.78357E-1
1.3E1	1.5E1	0.0E0	5.25E2	3.53E2	-7.47149E-2	-8.80025E1	-9.29832E-4	-8.79998E1	2.14577E-4	5.98431E-3	9.30071E-2	2.72937E1	-3.26536E1	-3.262E1	2.68076E1	1.17134E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.79242E-1
1.4E1	9.144E3	6.0E0	5.66E2	3.82E2	-7.51788E-2	-8.80022E1	-1.16825E-3	-8.79996E1	4.52995E-4	5.67436E-3	9.29594E-2	2.73118E1	-3.26674E1	-3.26344E1	2.68255E1	1.17032E-7	2.51334E-3	2.51334E-3	6.33486E-3	1.7862E-1
1.5E1	1.42E2	0.0E0	6.06E2	4.11E2	-7.41738E-2	-8.80022E1	-9.29832E-4	-8.79997E1	5.96046E-4	5.62668E-3	9.27687E-2	2.72924E1	-3.26661E1	-3.26521E1	2.68017E1	1.16761E-7	2.51752E-3	2.51752E-3	6.33297E-3	1.79296E-1
1.6E1	3.341E3	2.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80028E1	-1.19209E-3	-8.79997E1	1.90735E-4	5.53131E-3	9.29832E-2	2.7318E1	-3.26627E1	-3.26493E1	2.68154E1	1.16864E-7	2.51484E-3	2.51484E-3	6.31022E-3	1.7918E-1
1.7E1	9.372E3	1.0E1	6.87E2	4.7E2	-7.27053E-2	-8.80028E1	-7.86781E-4	-8.79998E1	2.86102E-4	5.91278E-3	9.2864E-2	2.7298E1	-3.2639E1	-3.26195E1	2.681E1					
1.8E1	4.13E4	2.7E1	7.27E2	5.0E2	-7.38649E-2	-8.80026E1	-9.77516E-4	-8.8E1	4.52995E-4	5.62668E-3	9.26971E-2	2.73183E1	-3.26957E1	-3.26284E1	2.68382E1	1.16727E-7	2.5199E-3	2.5199E-3	6.28552E-3	1.78465E-1
1.9E1	2.684E3	2.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80026E1	-6.91414E-4	-8.79997E1	3.8147E-4	5.26905E-3	9.30548E-2	2.73285E1	-3.27065E1	-3.26549E1	2.68134E1	1.1688E-7	2.5188E-3	2.5188E-3	6.32936E-3	1.78E-1
2.0E1	7.62E2	0.0E0	8.08E2	5.58E2	-7.41738E-2	-8.80025E1	-6.19888E-4	-8.80001E1	0.0E0	5.48363E-3	9.28164E-2	2.73219E1	-3.26741E1	-3.26248E1	2.67992E1	1.16674E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.79485E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80027E1	-6.67572E-4	-8.79997E1	4.76837E-5	5.79357E-3	9.25779E-2	2.72848E1	-3.2655E1	-3.26567E1	2.6825E1	1.16981E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.78155E-1
2.2E1	5.3E1	0.0E0	8.89E2	6.17E2	-7.53334E-2	-8.80025E1	-8.82149E-4	-8.79996E1	7.15256E-5	5.34058E-3	9.32932E-2	2.73063E1	-3.26885E1	-3.26431E1	2.68016E1	1.16973E-7	2.51632E-3	2.51632E-3	6.33977E-3	1.7918E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.54877E-2	-8.80025E1	-7.86781E-4	-8.79999E1	1.90735E-4	5.88894E-3	9.33409E-2	2.73045E1	-3.26278E1	-3.26482E1	2.68004E1	1.16818E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.7897E-1