[Scan]
initial_time=2015-12-16T00:03:39
final_time=2015-12-16T00:03:59
ip_count=19
run=1017
dataset=4
scan=266
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.38649E-2
qbias_imon=-3.83388E-6
ql1_vset=
ql1_vmon=-8.80028E1
ql1_imon=-7.9155E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=6.24382E-10
ql3_vset=
ql3_vmon=-8.79999E1
ql3_imon=-2.06971E-9
ql4_vset=
ql4_vmon=-1.43051E-4
ql4_imon=3.19773E-9
mult1=-9.96268E-9
mult2=-2.81865E-9
rf_tmon=-4.08815E-3
rf_agc=3.30734E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.67436E-3
ql5_imon=4.62842E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68416E0
bslens_imon=2.63869E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98812E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.04873E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.52631E1
cs_ef1b_imon=2.90413E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.01879E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0518E1
cs_ea1_imon=2.31148E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03895E0
lens1_imon=1.41301E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64038E1
os_ef1alow_imon=2.98703E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.55192E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85217E1
cs_ef1a_imon=3.01514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=2.18119E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11508E1
os_restr1_imon=3.04433E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15161E1
os_ea1_imon=1.96613E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62644E1
os_ef1bup_imon=3.02811E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24849E0
cs_ionrep_imon=1.23973E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9185E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02404E1
cs_anode1_imon=3.20867E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20592E0
olens4_imon=7.3674E-9
tplens_vset=1.4E-1
tplens_vmon=1.59938E0
tplens_imon=-2.52482E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26341E1
iondef3_imon=1.48919E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26691E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02949E2
lens6_imon=2.9836E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=5.61881E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28394E0
ionrepsh_imon=1.90593E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.3382E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74952E1
cs_ef2b_imon=3.10668E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.44851E-1
os_ea2_imon=-5.62508E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06101E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70405E1
cs_ef2a_imon=3.11893E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.49304E0
os_ef2alow_imon=-2.21225E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.37047E-1
os_ef2bup_imon=-4.96929E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11244E1
os_restr2_imon=2.99459E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30217E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02224E1
cs_anode2_imon=2.32894E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73269E1
iondef1_imon=1.07895E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6757E1
iondef4_imon=1.03295E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.70646E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=1.24953E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.04004E0
cs_ionaccel_imon=-2.12576E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02199E2
cs_ionfocb_imon=1.47871E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=7.24455E-6
window_vset=0.0E0
window_vmon=2.65996E-1
window_imon=-1.42299E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82695E2
mask1_imon=2.39801E-4
mask2_vset=0.0E0
mask2_vmon=-1.87305E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92668E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.08142E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33469E1
os_fil1_imon=8.95076E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.71539E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65793E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30817E1
cs_fil1_imon=1.00271E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62438E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65797E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.67389E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.87213E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62699E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.38327E-1
cs_fil2_imon=-2.68399E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08816E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2257E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31251E-3
inlet_lpb_pmon=1.78572E-1
chamber_ion_pmon=1.16855E-7
chamber_cvt_pmon=2.52058E-3
foreline_cvt_pmon=2.52058E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.758E-1
res40_imon=-1.83023E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.299E3	3.0E0	1.47E2	4.1E1	-7.47149E-2	-8.80024E1	-1.04904E-3	-8.79997E1	3.09944E-4	5.72205E-3	9.377E-2	2.73482E1	-3.26744E1	-3.26614E1	2.69427E1	1.16778E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.79086E-1
2.0E0	4.354E3	2.0E0	3.16E2	1.6E2	-7.41738E-2	-8.80025E1	-1.14441E-3	-8.79996E1	1.90735E-4	5.8651E-3	9.33409E-2	2.73082E1	-3.26976E1	-3.26346E1	2.68484E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.78569E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80029E1	-1.23978E-3	-8.79995E1	2.14577E-4	5.67436E-3	9.29832E-2	2.73196E1	-3.26585E1	-3.26434E1	2.67972E1	1.16886E-7	2.52697E-3	2.52697E-3	6.3074E-3	1.79148E-1
4.0E0	1.5E1	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80029E1	-9.77516E-4	-8.79995E1	-2.38419E-5	5.81741E-3	9.32693E-2	2.73183E1	-3.26819E1	-3.26452E1	2.68178E1	1.16916E-7	2.51498E-3	2.51498E-3	6.30212E-3	1.7897E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80024E1	-8.58307E-4	-8.79995E1	1.19209E-4	5.88894E-3	9.30548E-2	2.72907E1	-3.26795E1	-3.26422E1	2.68316E1	1.17134E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.78775E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80025E1	-1.21593E-3	-8.79997E1	9.53674E-5	5.65052E-3	9.29832E-2	2.73051E1	-3.26554E1	-3.26266E1	2.68184E1	1.16829E-7	2.52647E-3	2.52647E-3	6.32936E-3	1.79242E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80027E1	-1.33514E-3	-8.79998E1	9.53674E-5	5.76973E-3	9.28402E-2	2.7308E1	-3.26526E1	-3.26101E1	2.6818E1	1.16923E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.78722E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80026E1	-1.07288E-3	-8.79995E1	0.0E0	5.93662E-3	9.32932E-2	2.7302E1	-3.27056E1	-3.26425E1	2.68307E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.79398E-1
1.2E1	2.41E2	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80026E1	-1.33514E-3	-8.79996E1	9.53674E-5	5.76973E-3	9.31501E-2	2.73234E1	-3.26337E1	-3.2636E1	2.68354E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.7862E-1
1.3E1	2.2E1	0.0E0	5.25E2	3.53E2	-7.40967E-2	-8.80025E1	-1.14441E-3	-8.79996E1	1.66893E-4	5.98431E-3	9.31978E-2	2.73051E1	-3.26705E1	-3.26368E1	2.67826E1	1.16677E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.79242E-1
1.4E1	9.096E3	4.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80025E1	-1.12057E-3	-8.79996E1	2.38419E-5	5.57899E-3	9.29594E-2	2.73261E1	-3.26597E1	-3.2641E1	2.67868E1	1.1693E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.79086E-1
1.5E1	1.55E2	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80026E1	-9.29832E-4	-8.79995E1	-7.15256E-5	5.93662E-3	9.30548E-2	2.73129E1	-3.26741E1	-3.2644E1	2.68112E1	1.1693E-7	2.52647E-3	2.52647E-3	6.3514E-3	1.78775E-1
1.6E1	3.255E3	1.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80026E1	-1.33514E-3	-8.8E1	-2.86102E-4	6.07967E-3	9.30786E-2	2.72874E1	-3.26673E1	-3.26549E1	2.68124E1	1.1688E-7	2.52318E-3	2.52318E-3	6.31288E-3	1.79242E-1
1.7E1	9.317E3	4.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80026E1	-1.45435E-3	-8.79998E1	2.38419E-4	5.74589E-3	9.31978E-2	2.72831E1	-3.26399E1	-3.26567E1	2.68221E1	1.16724E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.78265E-1
1.8E1	4.1149E4	2.8E1	7.27E2	5.0E2	-7.24736E-2	-8.80024E1	-1.33514E-3	-8.79996E1	-9.53674E-5	5.6982E-3	9.30548E-2	2.73369E1	-3.25892E1	-3.25798E1	2.67814E1	1.16867E-7	2.52025E-3	2.52025E-3	6.31269E-3	1.7927E-1
1.9E1	2.778E3	1.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80026E1	-1.19209E-3	-8.8E1	1.19209E-4	5.6982E-3	9.29117E-2	2.73195E1	-3.26891E1	-3.26194E1	2.67806E1	1.16946E-7	2.51952E-3	2.51952E-3	6.3131E-3	1.79374E-1
2.0E1	7.41E2	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80025E1	-1.04904E-3	-8.79997E1	9.53674E-5	5.4121E-3	9.30548E-2	2.73234E1	-3.26956E1	-3.26343E1	2.67978E1	1.16829E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.79086E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80026E1	-1.19209E-3	-8.79999E1	-9.53674E-5	5.62668E-3	9.32217E-2	2.72978E1	-3.26407E1	-3.26652E1	2.68138E1	1.16923E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.78113E-1
2.2E1	7.1E1	1.0E0	8.89E2	6.17E2	-7.33239E-2	-8.8003E1	-8.82149E-4	-8.79998E1	-3.8147E-4	5.29289E-3	9.31263E-2	2.73331E1	-3.26383E1	-3.26327E1	2.68171E1	1.16626E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.79242E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.38649E-2	-8.80028E1	-7.86781E-4	-8.79999E1	-1.43051E-4	5.67436E-3	9.29117E-2	2.73269E1	-3.26691E1	-3.26341E1	2.6757E1	1.16855E-7	2.52058E-3	2.52058E-3	6.31251E-3	1.78572E-1