[Scan]
initial_time=2015-12-16T00:06:23
final_time=2015-12-16T00:06:43
ip_count=19
run=1017
dataset=4
scan=272
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.84801E-6
ql1_vset=
ql1_vmon=-8.80029E1
ql1_imon=-7.63953E-10
ql2_vset=
ql2_vmon=-1.26362E-3
ql2_imon=6.10709E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.15614E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=3.24715E-9
mult1=-9.99587E-9
mult2=-2.82517E-9
rf_tmon=-4.07885E-3
rf_agc=3.33681E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=4.71532E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67199E0
bslens_imon=2.23017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19805E1
lens5a_imon=1.97634E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.05202E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54844E1
cs_ef1b_imon=3.02564E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02392E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0501E1
cs_ea1_imon=2.28418E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0063E0
lens1_imon=1.34592E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65045E1
os_ef1alow_imon=2.94779E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.55929E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83147E1
cs_ef1a_imon=2.92833E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=2.19357E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11515E1
os_restr1_imon=3.15214E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15272E1
os_ea1_imon=1.93444E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.64871E1
os_ef1bup_imon=3.09308E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2356E0
cs_ionrep_imon=1.24123E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93288E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01284E1
cs_anode1_imon=3.08335E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20561E0
olens4_imon=7.31601E-9
tplens_vset=1.4E-1
tplens_vmon=1.59194E0
tplens_imon=-3.53298E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26195E1
iondef3_imon=1.50815E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.57249E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.9823E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=5.51724E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25705E0
ionrepsh_imon=1.912E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33767E1
lens5b_imon=2.18322E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75033E1
cs_ef2b_imon=3.13704E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.61247E-1
os_ea2_imon=-5.05073E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.72359E1
cs_ef2a_imon=3.22528E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5657E0
os_ef2alow_imon=-3.12331E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.86322E-1
os_ef2bup_imon=-5.962E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10486E1
os_restr2_imon=2.93336E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23083E2
cs_ionfoca_imon=6.29565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01888E1
cs_anode2_imon=2.21027E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73434E1
iondef1_imon=1.08153E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68324E1
iondef4_imon=1.156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.76927E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=1.26467E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1637E0
cs_ionaccel_imon=-2.18715E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.01974E2
cs_ionfocb_imon=1.46662E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5532E1
einzel_imon=8.1274E-6
window_vset=0.0E0
window_vmon=3.62537E-2
window_imon=-8.71828E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82553E2
mask1_imon=2.38279E-4
mask2_vset=0.0E0
mask2_vmon=-1.85835E1
mask2_imon=-4.69178E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.48289E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.07073E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.25853E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31832E0
defgridb_imon=5.94205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33446E1
os_fil1_imon=8.97474E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.80329E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3073E1
cs_fil1_imon=1.00101E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.61947E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65599E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.55366E-2
os_fil2_imon=-3.8298E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.29383E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.6746E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35076E-1
cs_fil2_imon=-1.86129E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.06352E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.79639E-1
chamber_ion_pmon=1.16724E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.56889E-1
res40_imon=-3.37832E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=237
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.245E3	2.0E0	1.47E2	4.1E1	-7.43285E-2	-8.80031E1	-7.62939E-4	-8.79999E1	4.76837E-5	5.60284E-3	9.27925E-2	2.734E1	-3.26971E1	-3.26503E1	2.69136E1	1.16803E-7	2.52625E-3	2.52625E-3	6.29738E-3	1.79665E-1
2.0E0	4.46E3	5.0E0	3.16E2	1.6E2	-7.36328E-2	-8.80028E1	-1.12057E-3	-8.79999E1	-3.8147E-4	5.31673E-3	9.31501E-2	2.72794E1	-3.26432E1	-3.25985E1	2.67836E1	1.16946E-7	2.52407E-3	2.52407E-3	6.3245E-3	1.78728E-1
3.0E0	4.0E0	1.0E0	4.85E2	2.79E2	-7.40967E-2	-8.80031E1	-6.91414E-4	-8.8E1	-2.86102E-4	5.6982E-3	9.33886E-2	2.73104E1	-3.26579E1	-3.26343E1	2.68082E1	1.16938E-7	2.51581E-3	2.51581E-3	6.27954E-3	1.78831E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80028E1	-9.05991E-4	-8.79994E1	3.09944E-4	5.50747E-3	9.29832E-2	2.73207E1	-3.27077E1	-3.26278E1	2.67986E1	1.16624E-7	2.51525E-3	2.51525E-3	6.29665E-3	1.78569E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.8003E1	-6.19888E-4	-8.79997E1	3.57628E-4	5.60284E-3	9.35078E-2	2.73028E1	-3.26613E1	-3.26271E1	2.68162E1	1.16981E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.78931E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.8003E1	-6.67572E-4	-8.79996E1	-1.90735E-4	5.6982E-3	9.3174E-2	2.73272E1	-3.26707E1	-3.26108E1	2.68028E1	1.17161E-7	2.52871E-3	2.52871E-3	6.32858E-3	1.7897E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.37103E-2	-8.80031E1	-1.00136E-3	-8.79997E1	-1.19209E-4	5.67436E-3	9.30786E-2	2.73246E1	-3.26685E1	-3.26526E1	2.67852E1	1.16857E-7	2.51542E-3	2.51542E-3	6.3074E-3	1.79256E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.80029E1	-1.12057E-3	-8.79997E1	-1.66893E-4	5.57899E-3	9.30786E-2	2.72853E1	-3.26621E1	-3.26176E1	2.68076E1	1.16973E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.7918E-1
1.2E1	2.19E2	3.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80029E1	-1.09673E-3	-8.79998E1	2.38419E-5	5.24521E-3	9.32932E-2	2.72945E1	-3.26785E1	-3.25953E1	2.68377E1	1.16724E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.78874E-1
1.3E1	2.5E1	0.0E0	5.25E2	3.53E2	-7.36328E-2	-8.80026E1	-7.15256E-4	-8.79994E1	0.0E0	5.84126E-3	9.30548E-2	2.72544E1	-3.26649E1	-3.2652E1	2.678E1	1.16823E-7	2.51632E-3	2.51632E-3	6.31817E-3	1.78569E-1
1.4E1	9.193E3	7.0E0	5.66E2	3.82E2	-7.39421E-2	-8.80026E1	-7.39098E-4	-8.79995E1	2.38419E-4	5.19753E-3	9.33886E-2	2.73496E1	-3.26885E1	-3.26164E1	2.6804E1	1.16923E-7	2.51847E-3	2.51847E-3	6.29665E-3	1.79639E-1
1.5E1	1.43E2	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.8003E1	-5.48363E-4	-8.79996E1	-7.15256E-5	5.53131E-3	9.30071E-2	2.73261E1	-3.26699E1	-3.26104E1	2.68346E1	1.16626E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.79554E-1
1.6E1	3.281E3	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80027E1	-6.4373E-4	-8.79997E1	-7.15256E-5	5.50747E-3	9.31025E-2	2.73261E1	-3.26585E1	-3.26236E1	2.68088E1	1.1688E-7	2.52538E-3	2.52538E-3	6.29098E-3	1.7862E-1
1.7E1	9.192E3	5.0E0	6.87E2	4.7E2	-7.26282E-2	-8.80026E1	-6.67572E-4	-8.79996E1	-1.43051E-4	5.4121E-3	9.29594E-2	2.73279E1	-3.26687E1	-3.26813E1	2.68232E1	1.17032E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.7831E-1
1.8E1	4.1182E4	2.3E1	7.27E2	5.0E2	-7.22418E-2	-8.80028E1	-7.86781E-4	-8.79995E1	-7.15256E-5	5.55515E-3	9.24349E-2	2.74125E1	-3.28183E1	-3.26567E1	2.68047E1	1.17032E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.79086E-1
1.9E1	2.875E3	2.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80027E1	-9.05991E-4	-8.79998E1	2.38419E-5	5.36442E-3	9.28879E-2	2.73261E1	-3.26639E1	-3.26669E1	2.68214E1					
2.0E1	7.19E2	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.8003E1	-1.04904E-3	-8.79996E1	0.0E0	5.24521E-3	9.31501E-2	2.73057E1	-3.26732E1	-3.26236E1	2.68352E1	1.16823E-7	2.51739E-3	2.51739E-3	6.29665E-3	1.79027E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80028E1	-8.34465E-4	-8.79997E1	1.66893E-4	5.65052E-3	9.28879E-2	2.73492E1	-3.27203E1	-3.26144E1	2.6813E1	1.1688E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.7971E-1
2.2E1	5.4E1	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80027E1	-8.10623E-4	-8.79998E1	0.0E0	5.19753E-3	9.29356E-2	2.72797E1	-3.26113E1	-3.26649E1	2.68304E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.78931E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80029E1	-1.26362E-3	-8.79998E1	9.53674E-5	5.55515E-3	9.29117E-2	2.73434E1	-3.26632E1	-3.26195E1	2.68324E1	1.16724E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.79639E-1