[Scan]
initial_time=2015-12-16T00:06:51
final_time=2015-12-16T00:07:10
ip_count=19
run=1017
dataset=4
scan=273
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.48695E-2
qbias_imon=-3.86232E-6
ql1_vset=
ql1_vmon=-8.80026E1
ql1_imon=-7.44712E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=6.28948E-10
ql3_vset=
ql3_vmon=-8.79998E1
ql3_imon=-2.10793E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=3.23576E-9
mult1=-9.58386E-9
mult2=-2.60284E-9
rf_tmon=-4.7107E-3
rf_agc=3.13809E-2
counter1=3
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=4.87041E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65198E0
bslens_imon=2.59081E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19645E1
lens5a_imon=1.95599E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12495E2
lens4a_imon=2.05063E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53046E1
cs_ef1b_imon=2.88359E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0511E1
cs_ea1_imon=2.29354E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05798E0
lens1_imon=1.30527E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63942E1
os_ef1alow_imon=2.99604E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04015E1
cs_ea2_imon=1.57364E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85475E1
cs_ef1a_imon=3.01369E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=2.19304E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=3.06811E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15257E1
os_ea1_imon=1.94791E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62776E1
os_ef1bup_imon=3.04865E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24292E0
cs_ionrep_imon=1.22948E-5
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93247E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02109E1
cs_anode1_imon=3.2148E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=7.3684E-9
tplens_vset=1.4E-1
tplens_vmon=1.55267E0
tplens_imon=-1.78614E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.4954E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26482E1
iondef2_imon=1.57768E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98261E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=5.61392E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3078E0
ionrepsh_imon=1.90531E-5
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.1749E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74814E1
cs_ef2b_imon=3.11136E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.56505E-1
os_ea2_imon=-1.00871E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00439E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70789E1
cs_ef2a_imon=3.13767E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.48884E0
os_ef2alow_imon=-2.46814E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.53265E-1
os_ef2bup_imon=-4.7026E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11676E1
os_restr2_imon=2.98919E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.30589E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02206E1
cs_anode2_imon=2.32245E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73153E1
iondef1_imon=1.10533E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6831E1
iondef4_imon=1.01313E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.80123E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82118E-1
olens1_imon=1.25041E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07728E0
cs_ionaccel_imon=-1.9816E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02182E2
cs_ionfocb_imon=1.4776E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57679E1
einzel_imon=7.29501E-6
window_vset=0.0E0
window_vmon=2.52782E-1
window_imon=-1.33289E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82684E2
mask1_imon=2.39798E-4
mask2_vset=0.0E0
mask2_vmon=-1.87744E1
mask2_imon=-6.55342E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92701E3
multa_neg_imon=6.73024E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93718E3
defgrida_imon=6.36295E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=6.98735E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.18598E0
defgridb_imon=6.05075E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33456E1
os_fil1_imon=8.96542E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76224E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30736E1
cs_fil1_imon=1.00208E3
cs_fil1_emis_iset=4.5E1
cs_fil1_emis_imon=4.62444E-1
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65634E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.58239E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.05833E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.74405E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.37161E-1
cs_fil2_imon=-3.2426E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.37668E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22483E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=1.78989E-1
chamber_ion_pmon=1.17093E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.26856E-1
res40_imon=-1.82303E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.373E3	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80029E1	-1.38283E-3	-8.80001E1	1.90735E-4	5.57899E-3	9.29356E-2	2.73046E1	-3.26482E1	-3.26547E1	2.68914E1	1.1688E-7	2.52318E-3	2.52318E-3	6.34037E-3	1.78931E-1
2.0E0	4.393E3	1.0E0	3.16E2	1.6E2	-7.286E-2	-8.80028E1	-1.07288E-3	-8.80001E1	-4.76837E-5	5.96046E-3	9.28402E-2	2.73362E1	-3.26512E1	-3.26359E1	2.68393E1	1.16664E-7	2.52023E-3	2.52023E-3	6.3074E-3	1.79237E-1
3.0E0	3.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80031E1	-9.05991E-4	-8.79999E1	2.38419E-5	5.76973E-3	9.29594E-2	2.7285E1	-3.26431E1	-3.26195E1	2.68046E1	1.16744E-7	2.52384E-3	2.52384E-3	6.31925E-3	1.79012E-1
4.0E0	1.4E1	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.8003E1	-9.77516E-4	-8.79998E1	1.43051E-4	5.93662E-3	9.31025E-2	2.73265E1	-3.26538E1	-3.26498E1	2.67966E1	1.16774E-7	2.52384E-3	2.52384E-3	6.29128E-3	1.7918E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80028E1	-1.19209E-3	-8.79996E1	0.0E0	5.62668E-3	9.28402E-2	2.73075E1	-3.26512E1	-3.26657E1	2.6837E1	1.1672E-7	2.52025E-3	2.52025E-3	6.29684E-3	1.7927E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.40192E-2	-8.80027E1	-1.04904E-3	-8.8E1	-9.53674E-5	6.12736E-3	9.30309E-2	2.72981E1	-3.2655E1	-3.26335E1	2.68204E1	1.16727E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.78465E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80027E1	-1.0252E-3	-8.79998E1	4.29153E-4	5.6982E-3	9.26495E-2	2.72635E1	-3.26505E1	-3.2648E1	2.68034E1	1.17073E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.79485E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.38649E-2	-8.80028E1	-8.82149E-4	-8.79997E1	-1.66893E-4	5.67436E-3	9.34124E-2	2.73422E1	-3.26509E1	-3.26138E1	2.68238E1	1.16727E-7	2.52099E-3	2.52099E-3	6.34588E-3	1.7831E-1
1.2E1	2.16E2	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80026E1	-5.72205E-4	-8.79998E1	2.14577E-4	5.96046E-3	9.31263E-2	2.73263E1	-3.26354E1	-3.26337E1	2.68088E1	1.16674E-7	2.51525E-3	2.51525E-3	6.32896E-3	1.79332E-1
1.3E1	3.0E1	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.8003E1	-7.15256E-4	-8.8E1	-3.8147E-4	5.84126E-3	9.32932E-2	2.73195E1	-3.26494E1	-3.26549E1	2.68412E1	1.1672E-7	2.51814E-3	2.51814E-3	6.3074E-3	1.7957E-1
1.4E1	8.935E3	4.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80028E1	-7.39098E-4	-8.79994E1	-7.15256E-5	5.8651E-3	9.32693E-2	2.73135E1	-3.26416E1	-3.26248E1	2.68166E1	1.16829E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.79086E-1
1.5E1	1.13E2	0.0E0	6.06E2	4.11E2	-7.37103E-2	-8.80024E1	-6.19888E-4	-8.79996E1	-2.38419E-5	5.84126E-3	9.31978E-2	2.73252E1	-3.26384E1	-3.26354E1	2.68041E1	1.17032E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.78931E-1
1.6E1	3.245E3	1.0E0	6.47E2	4.41E2	-7.41738E-2	-8.80027E1	-8.34465E-4	-8.79998E1	1.90735E-4	5.81741E-3	9.30309E-2	2.73117E1	-3.26795E1	-3.26482E1	2.6807E1	1.16823E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.7918E-1
1.7E1	9.315E3	4.0E0	6.87E2	4.7E2	-7.36328E-2	-8.80023E1	-7.39098E-4	-8.79995E1	-2.38419E-5	5.6982E-3	9.32217E-2	2.73153E1	-3.26567E1	-3.26056E1	2.68184E1	1.1688E-7	2.52428E-3	2.52428E-3	6.32936E-3	1.79086E-1
1.8E1	4.1141E4	2.2E1	7.27E2	5.0E2	-7.45602E-2	-8.80024E1	-7.15256E-4	-8.79997E1	2.86102E-4	5.62668E-3	9.29117E-2	2.72225E1	-3.25163E1	-3.26172E1	2.68268E1	1.17032E-7	2.51662E-3	2.51662E-3	6.35692E-3	1.79554E-1
1.9E1	2.857E3	1.0E0	7.68E2	5.29E2	-7.45602E-2	-8.80028E1	-6.67572E-4	-8.79998E1	2.38419E-4	5.88894E-3	9.30309E-2	2.73082E1	-3.26603E1	-3.26205E1	2.68032E1	1.16923E-7	2.52599E-3	2.52599E-3	6.32896E-3	1.78569E-1
2.0E1	6.85E2	1.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80025E1	-7.39098E-4	-8.80001E1	-2.38419E-5	5.72205E-3	9.31263E-2	2.7301E1	-3.2698E1	-3.2636E1	2.68256E1	1.16628E-7	2.52697E-3	2.52697E-3	6.34099E-3	1.79306E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.46377E-2	-8.80024E1	-6.91414E-4	-8.79999E1	2.14577E-4	5.84126E-3	9.30548E-2	2.73034E1	-3.27152E1	-3.26579E1	2.68105E1	1.16823E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78874E-1
2.2E1	5.6E1	0.0E0	8.89E2	6.17E2	-7.53334E-2	-8.80023E1	-5.48363E-4	-8.8E1	2.6226E-4	5.81741E-3	9.31025E-2	2.72733E1	-3.2645E1	-3.26395E1	2.68172E1	1.16965E-7	2.52659E-3	2.52659E-3	6.32858E-3	1.7927E-1
2.3E1	3.0E0	0.0E0	9.3E2	6.47E2	-7.48695E-2	-8.80026E1	-5.96046E-4	-8.79998E1	-2.38419E-5	5.88894E-3	9.29832E-2	2.73153E1	-3.26482E1	-3.26567E1	2.6831E1	1.17093E-7	2.51359E-3	2.51359E-3	6.3074E-3	1.78989E-1