[Scan]
initial_time=2015-12-16T00:08:50
final_time=2015-12-16T00:09:10
ip_count=19
run=1017
dataset=5
scan=277
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.20398E-1
ql1_imon=3.83166E-9
ql2_vset=
ql2_vmon=-7.98845E-1
ql2_imon=5.45096E-10
ql3_vset=
ql3_vmon=-9.13005E0
ql3_imon=4.06914E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=2.01476E-10
mult1=-9.60575E-9
mult2=-2.69582E-9
rf_tmon=-4.09065E-3
rf_agc=3.27074E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.72205E-3
ql5_imon=4.93395E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6618E0
bslens_imon=2.42391E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20224E1
lens5a_imon=1.9985E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.04882E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53152E1
cs_ef1b_imon=3.12709E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02193E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05221E1
cs_ea1_imon=1.10098E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42948E0
lens1_imon=2.72104E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.63751E1
os_ef1alow_imon=2.99121E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03776E1
cs_ea2_imon=1.38956E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85396E1
cs_ef1a_imon=3.08713E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=2.2168E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11598E1
os_restr1_imon=3.0621E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1559E1
os_ea1_imon=1.95376E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.62436E1
os_ef1bup_imon=3.07461E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25039E0
cs_ionrep_imon=9.47634E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01966E1
cs_anode1_imon=2.00563E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20582E0
olens4_imon=6.32842E-9
tplens_vset=1.4E-1
tplens_vmon=1.60216E0
tplens_imon=-3.04848E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.48724E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26396E1
iondef2_imon=1.58252E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02957E2
lens6_imon=2.98278E-4
ql6_vset=1.0E-1
ql6_vmon=9.29594E-2
ql6_imon=9.44161E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23559E0
ionrepsh_imon=8.6362E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33333E1
lens5b_imon=2.15389E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75127E1
cs_ef2b_imon=3.12674E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.73818E-1
os_ea2_imon=-4.99516E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.00479E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70493E1
cs_ef2a_imon=3.1191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.47622E0
os_ef2alow_imon=-2.20968E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.0977E-1
os_ef2bup_imon=-4.76747E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11894E1
os_restr2_imon=3.01901E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23113E2
cs_ionfoca_imon=6.31602E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02267E1
cs_anode2_imon=2.14672E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72909E1
iondef1_imon=1.0962E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.02352E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.60689E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=1.26672E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07048E0
cs_ionaccel_imon=-1.0976E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02161E2
cs_ionfocb_imon=1.47973E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57257E1
einzel_imon=7.61833E-6
window_vset=0.0E0
window_vmon=2.81399E-1
window_imon=-1.51115E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82707E2
mask1_imon=2.39633E-4
mask2_vset=0.0E0
mask2_vmon=-1.87676E1
mask2_imon=-2.32262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.1779E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.55291E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.27011E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.24501E0
defgridb_imon=6.16699E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33383E1
os_fil1_imon=8.97775E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.77018E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6574E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31707E1
cs_fil1_imon=8.52113E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.85707E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66954E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02687E-2
os_fil2_imon=-2.368E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.95493E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60454E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.8082E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22428E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=1.77961E-1
chamber_ion_pmon=1.16724E-7
chamber_cvt_pmon=2.53139E-3
foreline_cvt_pmon=2.53139E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=2.3178E-1
res40_imon=-1.57023E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=228
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.20661E-1	-7.98607E-1	-9.13112E0	-9.14211E0	5.8651E-3	9.30309E-2	2.73207E1	-3.26691E1	-3.2656E1	2.67795E1	1.16965E-7	2.52553E-3	2.52553E-3	6.3074E-3	1.7852E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.20923E-1	-7.98702E-1	-9.13057E0	-9.14207E0	5.6982E-3	9.30071E-2	2.73222E1	-3.26903E1	-3.26168E1	2.68142E1	1.16999E-7	2.51952E-3	2.51952E-3	6.31879E-3	1.78244E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.20899E-1	-7.99036E-1	-9.13026E0	-9.14209E0	5.4121E-3	9.31501E-2	2.72715E1	-3.26803E1	-3.26296E1	2.67866E1	1.16938E-7	2.52585E-3	2.52585E-3	6.3074E-3	1.78673E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0965E0	-8.20446E-1	-7.98869E-1	-9.13026E0	-9.14195E0	5.62668E-3	9.30309E-2	2.73222E1	-3.26803E1	-3.26124E1	2.6803E1	1.16575E-7	2.51525E-3	2.51525E-3	6.3074E-3	1.77658E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.20589E-1	-7.99203E-1	-9.13038E0	-9.14195E0	5.72205E-3	9.3174E-2	2.73253E1	-3.26836E1	-3.26327E1	2.68032E1	1.16973E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.77658E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.20923E-1	-7.99036E-1	-9.13007E0	-9.14214E0	5.84126E-3	9.32693E-2	2.72597E1	-3.26726E1	-3.26307E1	2.6814E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.78155E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09433E0	-8.20708E-1	-7.98845E-1	-9.13019E0	-9.14197E0	5.57899E-3	9.32217E-2	2.72933E1	-3.26838E1	-3.26396E1	2.67818E1	1.16674E-7	2.53246E-3	2.53246E-3	6.32896E-3	1.77809E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0948E0	-8.20899E-1	-7.99036E-1	-9.1301E0	-9.1419E0	5.38826E-3	9.31978E-2	2.7301E1	-3.26508E1	-3.26431E1	2.68279E1	1.16727E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.78155E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.20827E-1	-7.99227E-1	-9.13024E0	-9.14168E0	5.6982E-3	9.31978E-2	2.73117E1	-3.26927E1	-3.26134E1	2.68064E1	1.16973E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.78265E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.20923E-1	-7.98821E-1	-9.13002E0	-9.14168E0	5.65052E-3	9.31025E-2	2.73078E1	-3.26446E1	-3.26446E1	2.68051E1	1.16829E-7	2.51771E-3	2.51771E-3	6.34588E-3	1.78155E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.20708E-1	-7.98368E-1	-9.13022E0	-9.14192E0	5.26905E-3	9.29832E-2	2.72999E1	-3.26816E1	-3.2615E1	2.6814E1	1.16851E-7	2.52271E-3	2.52271E-3	6.31445E-3	1.77724E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.20684E-1	-7.9906E-1	-9.13019E0	-9.14168E0	5.43594E-3	9.28402E-2	2.73014E1	-3.26854E1	-3.26468E1	2.68082E1	1.16818E-7	2.51498E-3	2.51498E-3	6.33919E-3	1.77476E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.2078E-1	-7.98941E-1	-9.13014E0	-9.14168E0	5.67436E-3	9.32217E-2	2.72861E1	-3.26193E1	-3.26119E1	2.67908E1	1.16783E-7	2.52139E-3	2.52139E-3	6.31858E-3	1.78515E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.20565E-1	-7.98774E-1	-9.13024E0	-9.14159E0	5.93662E-3	9.3317E-2	2.73257E1	-3.26874E1	-3.26054E1	2.67716E1	1.17083E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.78155E-1
1.8E1	8.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.20756E-1	-7.98678E-1	-9.13026E0	-9.1418E0	5.62668E-3	9.32217E-2	2.73541E1	-3.26719E1	-3.26101E1	2.68178E1	1.16981E-7	2.51225E-3	2.51225E-3	6.29098E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.20637E-1	-7.98559E-1	-9.12998E0	-9.14207E0	5.48363E-3	9.3317E-2	2.72868E1	-3.26573E1	-3.26272E1	2.68028E1	1.1693E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.77846E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.20565E-1	-7.99012E-1	-9.13007E0	-9.14164E0	5.74589E-3	9.31263E-2	2.73299E1	-3.26685E1	-3.25977E1	2.67902E1	1.16981E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.77537E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.20518E-1	-7.98774E-1	-9.13002E0	-9.14178E0	5.53131E-3	9.32217E-2	2.73057E1	-3.26873E1	-3.26518E1	2.6829E1	1.16674E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.78417E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09565E0	-8.20422E-1	-7.98631E-1	-9.12979E0	-9.14178E0	5.53131E-3	9.31501E-2	2.7301E1	-3.26785E1	-3.26272E1	2.68046E1	1.16677E-7	2.52428E-3	2.52428E-3	6.30192E-3	1.77229E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.20398E-1	-7.98845E-1	-9.13005E0	-9.14178E0	5.72205E-3	9.29594E-2	2.72909E1	-3.26396E1	-3.26396E1	2.68065E1	1.16724E-7	2.53139E-3	2.53139E-3	6.29665E-3	1.77961E-1