[Scan]
initial_time=2015-12-16T00:09:17
final_time=2015-12-16T00:09:37
ip_count=19
run=1017
dataset=5
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.08808E-4
ql1_vset=
ql1_vmon=-8.20041E-1
ql1_imon=3.46622E-9
ql2_vset=
ql2_vmon=-7.99084E-1
ql2_imon=5.62942E-10
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=2.91479E-9
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=3.10183E-10
mult1=-9.56114E-9
mult2=-2.62227E-9
rf_tmon=-3.22382E-3
rf_agc=3.31264E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.07204E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.51612E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.99965E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12578E2
lens4a_imon=2.05212E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.17191E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04661E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.07066E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43084E0
lens1_imon=2.65672E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03474E1
cs_ea2_imon=1.40339E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.0364E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=2.21795E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11418E1
os_restr1_imon=3.11569E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=1.96901E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.08974E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.25378E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93456E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=1.94656E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.45305E-9
tplens_vset=1.4E-1
tplens_vmon=1.58976E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26052E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02974E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.49383E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=8.4679E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74958E1
cs_ef2b_imon=3.14596E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.42448E-1
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56452E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.89305E-1
os_ef2bup_imon=-5.39456E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=2.97513E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23086E2
cs_ionfoca_imon=6.3292E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.08856E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72788E1
iondef1_imon=1.10743E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68356E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.61813E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=1.2647E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47169E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56369E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82616E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.86587E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.40947E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.07061E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.334E1
os_fil1_imon=8.97413E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.87036E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65301E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31722E1
cs_fil1_imon=7.10679E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62956E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6692E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.88821E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.91417E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97631E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.09534E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22435E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.78417E-1
chamber_ion_pmon=1.17073E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.69503E-1
res40_imon=-2.5258E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.20279E-1	-7.9875E-1	-9.1301E0	-9.1419E0	5.76973E-3	9.30548E-2	2.73021E1	-3.26603E1	-3.2608E1	2.68196E1	1.17083E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.78E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.20684E-1	-7.98798E-1	-9.13041E0	-9.14195E0	5.67436E-3	9.30309E-2	2.73129E1	-3.26777E1	-3.26278E1	2.68142E1	1.16774E-7	2.52492E-3	2.52492E-3	6.31817E-3	1.77961E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.20422E-1	-7.98869E-1	-9.13026E0	-9.14164E0	5.98431E-3	9.32217E-2	2.72954E1	-3.26607E1	-3.26203E1	2.67978E1	1.1693E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.77846E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.2047E-1	-7.98702E-1	-9.13022E0	-9.14159E0	5.48363E-3	9.3174E-2	2.73181E1	-3.26484E1	-3.26502E1	2.68331E1	1.16957E-7	2.52197E-3	2.52197E-3	6.3074E-3	1.78326E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.20637E-1	-7.99108E-1	-9.13026E0	-9.14171E0	6.07967E-3	9.29356E-2	2.72967E1	-3.26825E1	-3.26224E1	2.68088E1	1.16778E-7	2.51334E-3	2.51334E-3	6.29645E-3	1.78465E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09611E0	-8.20732E-1	-7.98678E-1	-9.13019E0	-9.14195E0	5.43594E-3	9.31978E-2	2.73228E1	-3.26649E1	-3.26585E1	2.68436E1	1.16923E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.78265E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.20518E-1	-7.98917E-1	-9.13007E0	-9.14173E0	5.31673E-3	9.31025E-2	2.72727E1	-3.26714E1	-3.26331E1	2.68267E1	1.16981E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.7831E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09595E0	-8.20398E-1	-7.99394E-1	-9.13022E0	-9.14207E0	5.38826E-3	9.30548E-2	2.72839E1	-3.26915E1	-3.26543E1	2.68184E1	1.16823E-7	2.51632E-3	2.51632E-3	6.35059E-3	1.78113E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.20851E-1	-7.98941E-1	-9.13024E0	-9.14204E0	5.53131E-3	9.31025E-2	2.73094E1	-3.26958E1	-3.26205E1	2.68076E1	1.16873E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.77658E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.20518E-1	-7.99084E-1	-9.13036E0	-9.14197E0	5.22137E-3	9.33886E-2	2.72945E1	-3.26838E1	-3.26443E1	2.68178E1	1.17042E-7	2.51804E-3	2.51804E-3	6.31299E-3	1.77884E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.20398E-1	-7.98869E-1	-9.13041E0	-9.14207E0	5.45979E-3	9.33409E-2	2.72799E1	-3.26675E1	-3.26344E1	2.68004E1	1.16674E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.78417E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09441E0	-8.20446E-1	-7.99394E-1	-9.13064E0	-9.14152E0	5.60284E-3	9.33647E-2	2.73063E1	-3.26356E1	-3.26512E1	2.68094E1	1.16727E-7	2.52757E-3	2.52757E-3	6.33486E-3	1.78E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09572E0	-8.20208E-1	-7.99227E-1	-9.13041E0	-9.14147E0	5.74589E-3	9.27925E-2	2.73105E1	-3.26386E1	-3.26104E1	2.67956E1	1.1688E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.78155E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09642E0	-8.20208E-1	-7.99274E-1	-9.13036E0	-9.14176E0	5.38826E-3	9.29594E-2	2.73098E1	-3.26903E1	-3.26366E1	2.68499E1	1.17073E-7	2.51739E-3	2.51739E-3	6.30202E-3	1.78417E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.2016E-1	-7.99155E-1	-9.13014E0	-9.14164E0	5.38826E-3	9.30786E-2	2.71969E1	-3.259E1	-3.27402E1	2.67986E1	1.16727E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.76921E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.20327E-1	-7.98988E-1	-9.13022E0	-9.14178E0	5.34058E-3	9.29832E-2	2.73004E1	-3.2682E1	-3.26602E1	2.67938E1	1.1693E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.7831E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.20279E-1	-7.99251E-1	-9.13048E0	-9.14137E0	5.36442E-3	9.32217E-2	2.73123E1	-3.26302E1	-3.26134E1	2.68088E1	1.16973E-7	2.51632E-3	2.51632E-3	6.32356E-3	1.78417E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.20065E-1	-7.98988E-1	-9.13031E0	-9.14209E0	5.91278E-3	9.32217E-2	2.72438E1	-3.26434E1	-3.26633E1	2.6789E1	1.17032E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.20017E-1	-7.99084E-1	-9.13045E0	-9.1418E0	5.65052E-3	9.27687E-2	2.73092E1	-3.26573E1	-3.26042E1	2.68262E1	1.16677E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.77846E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.20041E-1	-7.99084E-1	-9.13053E0	-9.1419E0	5.60284E-3	9.29832E-2	2.72788E1	-3.26499E1	-3.26052E1	2.68356E1	1.17073E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.78417E-1