[Scan]
initial_time=2015-12-16T00:10:38
final_time=2015-12-16T00:10:58
ip_count=19
run=1017
dataset=5
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.19492E-1
ql1_imon=3.08518E-9
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=6.00612E-10
ql3_vset=
ql3_vmon=-9.13053E0
ql3_imon=1.73585E-9
ql4_vset=
ql4_vmon=-9.14207E0
ql4_imon=4.01807E-10
mult1=-9.33385E-9
mult2=-2.68406E-9
rf_tmon=-5.17606E-3
rf_agc=3.20349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=5.7857E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65088E0
bslens_imon=3.06444E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19955E1
lens5a_imon=1.96696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05113E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.17389E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02043E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04939E1
cs_ea1_imon=1.08933E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40392E0
lens1_imon=2.54532E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64603E1
os_ef1alow_imon=2.98349E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03777E1
cs_ea2_imon=1.40112E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84367E1
cs_ef1a_imon=3.03409E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=2.21096E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11156E1
os_restr1_imon=3.0915E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15305E1
os_ea1_imon=1.96047E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63662E1
os_ef1bup_imon=3.10967E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24885E0
cs_ionrep_imon=9.39762E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91906E2
cs_nozzle_imon=1.93225E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02123E1
cs_anode1_imon=1.9595E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20566E0
olens4_imon=6.33463E-9
tplens_vset=1.4E-1
tplens_vmon=1.59439E0
tplens_imon=-4.97979E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.57016E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02967E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.29117E-2
ql6_imon=9.22287E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.20613E0
ionrepsh_imon=8.51188E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34414E1
lens5b_imon=2.20932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74301E1
cs_ef2b_imon=3.12524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.46353E-1
os_ea2_imon=-5.53135E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00564E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71036E1
cs_ef2a_imon=3.17843E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55245E0
os_ef2alow_imon=-2.54562E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.62275E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10842E1
os_restr2_imon=2.96857E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.29961E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09281E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73169E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68163E1
iondef4_imon=1.07271E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.67937E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=1.27099E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12744E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47288E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56486E1
einzel_imon=7.71054E-6
window_vset=0.0E0
window_vmon=2.03708E-1
window_imon=-1.05358E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86425E1
mask2_imon=-6.4489E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.82081E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=6.60738E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3748E0
defgridb_imon=6.01365E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33356E1
os_fil1_imon=8.9768E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.81636E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3173E1
cs_fil1_imon=6.53135E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.32082E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97311E-2
os_fil2_imon=-2.95068E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.92559E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.60985E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31866E-1
cs_fil2_imon=-2.39927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44436E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22364E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.77658E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.79604E-1
res40_imon=-2.41912E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=260
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.19945E-1	-7.99298E-1	-9.13036E0	-9.14199E0	5.57899E-3	9.30071E-2	2.73109E1	-3.27266E1	-3.26215E1	2.6816E1	1.17027E-7	2.51498E-3	2.51498E-3	6.31234E-3	1.78062E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.19778E-1	-7.99084E-1	-9.13072E0	-9.14209E0	5.36442E-3	9.2721E-2	2.73321E1	-3.26579E1	-3.26554E1	2.68064E1	1.16636E-7	2.5207E-3	2.5207E-3	6.31949E-3	1.78221E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.19588E-1	-7.98678E-1	-9.13064E0	-9.1419E0	5.38826E-3	9.27925E-2	2.73196E1	-3.26503E1	-3.26162E1	2.67949E1	1.16923E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.78113E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.19612E-1	-7.98774E-1	-9.13043E0	-9.14173E0	5.38826E-3	9.31025E-2	2.7257E1	-3.26789E1	-3.26621E1	2.68364E1	1.16774E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.78569E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.19254E-1	-7.98631E-1	-9.13022E0	-9.14173E0	5.36442E-3	9.32455E-2	2.72952E1	-3.27042E1	-3.26498E1	2.67868E1	1.16727E-7	2.52318E-3	2.52318E-3	6.30192E-3	1.7862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.19278E-1	-7.98368E-1	-9.13062E0	-9.14161E0	5.50747E-3	9.31025E-2	2.72901E1	-3.26663E1	-3.2629E1	2.68052E1	1.16671E-7	2.52553E-3	2.52553E-3	6.33388E-3	1.78221E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.19492E-1	-7.98965E-1	-9.13074E0	-9.14156E0	5.53131E-3	9.30309E-2	2.73069E1	-3.2672E1	-3.26172E1	2.68244E1	1.16823E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.77506E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.19397E-1	-7.98798E-1	-9.1305E0	-9.14166E0	5.6982E-3	9.33409E-2	2.73165E1	-3.26747E1	-3.26392E1	2.67974E1	1.1688E-7	2.52757E-3	2.52757E-3	6.29645E-3	1.7831E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.19254E-1	-7.98559E-1	-9.13036E0	-9.14166E0	5.29289E-3	9.32217E-2	2.73087E1	-3.26975E1	-3.2626E1	2.68424E1	1.16724E-7	2.52276E-3	2.52276E-3	6.31278E-3	1.77658E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.18872E-1	-7.99227E-1	-9.13057E0	-9.14178E0	5.84126E-3	9.30309E-2	2.72727E1	-3.26797E1	-3.2636E1	2.67818E1	1.1693E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.78465E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.19016E-1	-7.98845E-1	-9.13048E0	-9.14207E0	5.45979E-3	9.31025E-2	2.72609E1	-3.26703E1	-3.26343E1	2.68227E1	1.16873E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.78569E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18944E-1	-7.98607E-1	-9.13041E0	-9.14173E0	5.60284E-3	9.30548E-2	2.73243E1	-3.26765E1	-3.26134E1	2.68268E1	1.16727E-7	2.51771E-3	2.51771E-3	6.34037E-3	1.77846E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09549E0	-8.19278E-1	-7.98774E-1	-9.13076E0	-9.14173E0	5.74589E-3	9.29117E-2	2.73222E1	-3.2662E1	-3.2639E1	2.6792E1	1.16823E-7	2.52384E-3	2.52384E-3	6.34518E-3	1.77961E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.19254E-1	-7.99108E-1	-9.13055E0	-9.14171E0	5.6982E-3	9.32455E-2	2.73502E1	-3.26759E1	-3.26993E1	2.67962E1	1.16873E-7	2.52599E-3	2.52599E-3	6.32356E-3	1.78113E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.19325E-1	-7.9844E-1	-9.13064E0	-9.14183E0	5.34058E-3	9.33647E-2	2.72898E1	-3.26838E1	-3.26614E1	2.6818E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19278E-1	-7.98583E-1	-9.13036E0	-9.14164E0	5.53131E-3	9.30548E-2	2.73339E1	-3.26837E1	-3.26549E1	2.67938E1	1.16727E-7	2.5188E-3	2.5188E-3	6.29098E-3	1.78E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.19397E-1	-7.98941E-1	-9.13048E0	-9.14204E0	5.48363E-3	9.31978E-2	2.72967E1	-3.26476E1	-3.26482E1	2.68214E1	1.17073E-7	2.52599E-3	2.52599E-3	6.29128E-3	1.77961E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.19659E-1	-7.99084E-1	-9.13084E0	-9.14187E0	5.48363E-3	9.33409E-2	2.72997E1	-3.26909E1	-3.26428E1	2.68022E1	1.1699E-7	2.5225E-3	2.5225E-3	6.33538E-3	1.78357E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.19468E-1	-7.98655E-1	-9.13069E0	-9.14199E0	5.74589E-3	9.28164E-2	2.72821E1	-3.26531E1	-3.26319E1	2.68076E1	1.16973E-7	2.51739E-3	2.51739E-3	6.33977E-3	1.78113E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.19492E-1	-7.98893E-1	-9.13053E0	-9.14207E0	5.6982E-3	9.29117E-2	2.73169E1	-3.26502E1	-3.26254E1	2.68163E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.77658E-1