[Scan]
initial_time=2015-12-16T00:11:05
final_time=2015-12-16T00:11:24
ip_count=19
run=1017
dataset=5
scan=282
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09619E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.19111E-1
ql1_imon=3.05333E-9
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=5.97095E-10
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=1.47541E-9
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=4.31406E-10
mult1=-6.87473E-9
mult2=-2.88828E-9
rf_tmon=-4.23004E-3
rf_agc=3.221E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.26905E-3
ql5_imon=6.06823E-10
bslens_vset=-6.2E0
bslens_vmon=-6.72622E0
bslens_imon=2.27459E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12523E2
lens4a_imon=2.05266E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.16326E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04633E2
lens23_imon=1.02103E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0476E1
cs_ea1_imon=1.10887E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4002E0
lens1_imon=2.61706E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64596E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03528E1
cs_ea2_imon=1.4088E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8458E1
cs_ef1a_imon=3.0537E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=2.22159E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11472E1
os_restr1_imon=3.10199E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1572E1
os_ea1_imon=1.94594E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63563E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22746E0
cs_ionrep_imon=9.72242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01737E1
cs_anode1_imon=1.94368E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=6.43283E-9
tplens_vset=1.4E-1
tplens_vmon=1.55551E0
tplens_imon=-1.58753E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.47621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26506E1
iondef2_imon=1.6078E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02961E2
lens6_imon=2.98382E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=9.85861E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.67699E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34048E1
lens5b_imon=2.1763E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74429E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.32234E-1
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06138E2
lens4b_imon=2.0036E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.18596E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58734E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.92308E-1
os_ef2bup_imon=-5.21796E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11111E1
os_restr2_imon=2.97261E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.29351E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02007E1
cs_anode2_imon=2.09432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.08976E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.71205E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=1.26594E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0959E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56645E1
einzel_imon=7.77073E-6
window_vset=0.0E0
window_vmon=1.92715E-1
window_imon=-1.17071E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.86789E1
mask2_imon=-3.70628E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92637E3
multa_neg_imon=7.70365E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.34819E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50109E3
multb_neg_imon=7.03673E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=5.75337E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=8.98001E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.92622E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65808E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31695E1
cs_fil1_imon=8.07385E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61755E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66994E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.95763E-2
os_fil2_imon=-2.93026E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.85411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.61926E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70084E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22455E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.77537E-1
chamber_ion_pmon=1.16981E-7
chamber_cvt_pmon=2.52647E-3
foreline_cvt_pmon=2.52647E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.0343E-1
res40_imon=-2.37083E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.18777E-1	-7.98464E-1	-9.13079E0	-9.14192E0	5.38826E-3	9.29117E-2	2.72961E1	-3.26741E1	-3.26182E1	2.67716E1	1.16873E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.77658E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.19111E-1	-7.99012E-1	-9.13076E0	-9.14195E0	5.48363E-3	9.30309E-2	2.72996E1	-3.26664E1	-3.26395E1	2.67945E1	1.16981E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.78465E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18706E-1	-7.99108E-1	-9.13072E0	-9.14187E0	5.55515E-3	9.29356E-2	2.73207E1	-3.26614E1	-3.25669E1	2.68082E1	1.16835E-7	2.51915E-3	2.51915E-3	6.33538E-3	1.77412E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.19039E-1	-7.98869E-1	-9.13081E0	-9.14195E0	5.55515E-3	9.30071E-2	2.73454E1	-3.26747E1	-3.2614E1	2.68076E1	1.16823E-7	2.51417E-3	2.51417E-3	6.30202E-3	1.77809E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.19564E-1	-7.98774E-1	-9.13081E0	-9.14183E0	5.57899E-3	9.32932E-2	2.72919E1	-3.26597E1	-3.26603E1	2.67864E1	1.17185E-7	2.52867E-3	2.52867E-3	6.33486E-3	1.78155E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.18944E-1	-7.98512E-1	-9.13107E0	-9.14178E0	5.45979E-3	9.30309E-2	2.73321E1	-3.26056E1	-3.26428E1	2.67911E1	1.16923E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.78417E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.1892E-1	-7.98821E-1	-9.13074E0	-9.14183E0	5.65052E-3	9.29832E-2	2.7285E1	-3.26543E1	-3.26124E1	2.68007E1	1.17083E-7	2.5199E-3	2.5199E-3	6.31288E-3	1.78155E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0958E0	-8.19111E-1	-7.99155E-1	-9.13084E0	-9.14202E0	5.6982E-3	9.31263E-2	2.73369E1	-3.26432E1	-3.26248E1	2.68045E1	1.16626E-7	2.52757E-3	2.52757E-3	6.32386E-3	1.77691E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.1923E-1	-7.99012E-1	-9.13086E0	-9.14207E0	5.74589E-3	9.32217E-2	2.73045E1	-3.26068E1	-3.26591E1	2.67896E1	1.1688E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.7831E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.19039E-1	-7.99131E-1	-9.13072E0	-9.14164E0	5.60284E-3	9.30309E-2	2.73351E1	-3.2638E1	-3.26849E1	2.68232E1	1.16981E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.77537E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.1892E-1	-7.98631E-1	-9.13076E0	-9.1418E0	5.91278E-3	9.34362E-2	2.72939E1	-3.26673E1	-3.26201E1	2.67978E1	1.17032E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.77537E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.18872E-1	-7.99227E-1	-9.13098E0	-9.14209E0	6.07967E-3	9.3317E-2	2.72984E1	-3.26603E1	-3.26107E1	2.68157E1	1.16727E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.77846E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.19039E-1	-7.99346E-1	-9.13098E0	-9.14216E0	5.6982E-3	9.30309E-2	2.73057E1	-3.26502E1	-3.26667E1	2.67943E1	1.1688E-7	2.51225E-3	2.51225E-3	6.30192E-3	1.77846E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.18777E-1	-7.98917E-1	-9.13076E0	-9.14197E0	6.00815E-3	9.3174E-2	2.73375E1	-3.26167E1	-3.2509E1	2.67881E1	1.1688E-7	2.51334E-3	2.51334E-3	6.31288E-3	1.77537E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.18872E-1	-7.98821E-1	-9.13084E0	-9.14207E0	6.10352E-3	9.29117E-2	2.73407E1	-3.26451E1	-3.27787E1	2.68114E1	1.16965E-7	2.52131E-3	2.52131E-3	6.31798E-3	1.78221E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09441E0	-8.18849E-1	-7.99108E-1	-9.13045E0	-9.14197E0	5.62668E-3	9.32932E-2	2.73147E1	-3.2635E1	-3.26609E1	2.67974E1	1.16788E-7	2.51838E-3	2.51838E-3	6.34737E-3	1.78728E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.18992E-1	-7.99084E-1	-9.131E0	-9.14207E0	5.38826E-3	9.32693E-2	2.73382E1	-3.26312E1	-3.26351E1	2.67847E1	1.16783E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.78041E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.1892E-1	-7.98893E-1	-9.1306E0	-9.14202E0	5.43594E-3	9.30548E-2	2.72781E1	-3.26771E1	-3.2629E1	2.68208E1	1.16878E-7	2.51799E-3	2.51799E-3	6.31696E-3	1.7853E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.19135E-1	-7.98321E-1	-9.13064E0	-9.14204E0	5.34058E-3	9.31978E-2	2.72986E1	-3.27434E1	-3.25971E1	2.68274E1	1.17023E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.78874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09619E0	-8.19111E-1	-7.98321E-1	-9.13074E0	-9.14187E0	5.26905E-3	9.31025E-2	2.72907E1	-3.26506E1	-3.26122E1	2.67944E1	1.16981E-7	2.52647E-3	2.52647E-3	6.31288E-3	1.77537E-1