[Scan]
initial_time=2015-12-16T00:11:32
final_time=2015-12-16T00:11:51
ip_count=19
run=1017
dataset=5
scan=283
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08784E-4
ql1_vset=
ql1_vmon=-8.19039E-1
ql1_imon=3.07959E-9
ql2_vset=
ql2_vmon=-7.99108E-1
ql2_imon=5.96356E-10
ql3_vset=
ql3_vmon=-9.13098E0
ql3_imon=1.35205E-9
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=4.22692E-10
mult1=-9.87283E-9
mult2=-2.60084E-9
rf_tmon=-4.57251E-3
rf_agc=3.34477E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.55515E-3
ql5_imon=5.72479E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67695E0
bslens_imon=2.62427E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.96469E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12531E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02164E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05312E1
cs_ea1_imon=1.09769E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41642E0
lens1_imon=2.63148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6429E1
os_ef1alow_imon=2.98991E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.41133E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84646E1
cs_ef1a_imon=3.05118E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.22327E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11484E1
os_restr1_imon=3.11244E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14825E1
os_ea1_imon=1.93621E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63437E1
os_ef1bup_imon=3.07028E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.28274E0
cs_ionrep_imon=9.84139E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9183E2
cs_nozzle_imon=1.93323E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02314E1
cs_anode1_imon=1.93899E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=6.40634E-9
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26074E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27101E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98476E-4
ql6_vset=1.0E-1
ql6_vmon=9.31263E-2
ql6_imon=9.88782E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28695E0
ionrepsh_imon=8.65175E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33598E1
lens5b_imon=2.19829E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.26827E-1
os_ea2_imon=-4.36334E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00572E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.16362E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5483E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.00117E-1
os_ef2bup_imon=-5.21075E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1125E1
os_restr2_imon=2.98739E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.32091E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01935E1
cs_anode2_imon=2.1091E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72889E1
iondef1_imon=1.09085E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6837E1
iondef4_imon=1.06071E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.6925E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.27669E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.01934E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4759E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5676E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-1.19954E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82612E2
mask1_imon=2.39405E-4
mask2_vset=0.0E0
mask2_vmon=-1.86909E1
mask2_imon=-5.68847E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92673E3
multa_neg_imon=7.35037E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93752E3
defgrida_imon=6.67624E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.573E0
defgridb_imon=6.38424E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33394E1
os_fil1_imon=8.9847E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.81269E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65653E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31721E1
cs_fil1_imon=7.23293E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.52144E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67006E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.9382E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.69531E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.36564E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2244E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99536E-1
res40_imon=-2.13297E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.18729E-1	-7.99012E-1	-9.13117E0	-9.14183E0	6.00815E-3	9.34601E-2	2.72567E1	-3.26431E1	-3.26331E1	2.67984E1	1.16774E-7	2.51847E-3	2.51847E-3	6.33436E-3	1.78265E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0951E0	-8.1923E-1	-7.98583E-1	-9.13079E0	-9.14185E0	5.38826E-3	9.32932E-2	2.7257E1	-3.26681E1	-3.26567E1	2.68166E1	1.16973E-7	2.52169E-3	2.52169E-3	6.29128E-3	1.78113E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.18801E-1	-7.98988E-1	-9.13067E0	-9.14152E0	5.43594E-3	9.35316E-2	2.73558E1	-3.26809E1	-3.2639E1	2.68088E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.78465E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.18872E-1	-7.98965E-1	-9.13076E0	-9.14168E0	5.76973E-3	9.31501E-2	2.74084E1	-3.26554E1	-3.26633E1	2.6819E1	1.16778E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.7831E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.19135E-1	-7.98631E-1	-9.13081E0	-9.1419E0	5.72205E-3	9.31263E-2	2.72721E1	-3.26458E1	-3.2605E1	2.68136E1	1.16823E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.77961E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18849E-1	-7.98821E-1	-9.13053E0	-9.14171E0	5.81741E-3	9.31978E-2	2.73411E1	-3.25918E1	-3.25858E1	2.6801E1	1.16727E-7	2.51771E-3	2.51771E-3	6.29645E-3	1.78E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.18992E-1	-7.98821E-1	-9.1305E0	-9.14147E0	5.74589E-3	9.30548E-2	2.73195E1	-3.26741E1	-3.25828E1	2.68022E1	1.16778E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.78E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.1892E-1	-7.98368E-1	-9.13081E0	-9.14178E0	5.93662E-3	9.31025E-2	2.73291E1	-3.26002E1	-3.26152E1	2.6804E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.19111E-1	-7.98965E-1	-9.13081E0	-9.14152E0	5.53131E-3	9.29594E-2	2.73225E1	-3.26615E1	-3.25972E1	2.6792E1	1.1688E-7	2.52318E-3	2.52318E-3	6.33486E-3	1.78155E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.19111E-1	-7.98774E-1	-9.13074E0	-9.14183E0	5.38826E-3	9.29832E-2	2.72868E1	-3.26413E1	-3.26537E1	2.68424E1	1.16778E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.77229E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09418E0	-8.19206E-1	-7.98774E-1	-9.13074E0	-9.14168E0	5.98431E-3	9.28164E-2	2.73393E1	-3.26717E1	-3.26224E1	2.6822E1	1.17134E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.7831E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.19039E-1	-7.98607E-1	-9.13076E0	-9.14183E0	5.74589E-3	9.30071E-2	2.72909E1	-3.26467E1	-3.26744E1	2.6792E1	1.16981E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.7862E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18825E-1	-7.98631E-1	-9.13067E0	-9.14173E0	5.84126E-3	9.26971E-2	2.73568E1	-3.26729E1	-3.26086E1	2.681E1	1.17073E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.77658E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18706E-1	-7.98678E-1	-9.13062E0	-9.14166E0	5.34058E-3	9.31501E-2	2.73123E1	-3.26314E1	-3.26639E1	2.68088E1	1.16981E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.78931E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.18801E-1	-7.9875E-1	-9.13041E0	-9.14199E0	5.126E-3	9.28402E-2	2.73015E1	-3.27366E1	-3.25906E1	2.68148E1	1.16981E-7	2.5188E-3	2.5188E-3	6.29645E-3	1.7831E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09456E0	-8.18563E-1	-7.98607E-1	-9.13081E0	-9.14168E0	5.84126E-3	9.28164E-2	2.73273E1	-3.25809E1	-3.26981E1	2.6798E1	1.1688E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.77691E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09541E0	-8.19016E-1	-7.98488E-1	-9.13079E0	-9.14161E0	5.88894E-3	9.29117E-2	2.72762E1	-3.26461E1	-3.2662E1	2.67833E1	1.16774E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.78113E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09418E0	-8.18706E-1	-7.99108E-1	-9.13055E0	-9.14173E0	5.88894E-3	9.30548E-2	2.72886E1	-3.2688E1	-3.26697E1	2.68268E1	1.16727E-7	2.52209E-3	2.52209E-3	6.34588E-3	1.77846E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.1892E-1	-7.99036E-1	-9.13076E0	-9.14168E0	5.91278E-3	9.29117E-2	2.7324E1	-3.2626E1	-3.26018E1	2.68151E1	1.16747E-7	2.5215E-3	2.5215E-3	6.31007E-3	1.77716E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.19039E-1	-7.99108E-1	-9.13098E0	-9.14183E0	5.55515E-3	9.31263E-2	2.72889E1	-3.27101E1	-3.26074E1	2.6837E1