[Scan]
initial_time=2015-12-16T00:12:52
final_time=2015-12-16T00:13:12
ip_count=19
run=1017
dataset=5
scan=286
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.18181E-1
ql1_imon=2.85537E-9
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=6.68478E-10
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.1001E-9
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=5.08583E-10
mult1=-9.57182E-9
mult2=-2.92022E-9
rf_tmon=-5.88231E-3
rf_agc=3.1453E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=6.20925E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.52202E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12512E2
lens4a_imon=2.05196E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54139E1
cs_ef1b_imon=3.18777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05236E1
cs_ea1_imon=1.08715E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38849E0
lens1_imon=2.57157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65714E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03543E1
cs_ea2_imon=1.39331E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83613E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=2.22712E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=3.09406E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.154E1
os_ea1_imon=1.95253E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63617E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.44157E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93618E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02079E1
cs_anode1_imon=1.94476E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20585E0
olens4_imon=6.4144E-9
tplens_vset=1.4E-1
tplens_vmon=1.60781E0
tplens_imon=-1.57311E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26368E1
iondef3_imon=1.49312E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0293E2
lens6_imon=2.98215E-4
ql6_vset=1.0E-1
ql6_vmon=9.31501E-2
ql6_imon=1.05506E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25092E0
ionrepsh_imon=8.37974E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.17446E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74273E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.90842E-1
os_ea2_imon=-4.19227E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71023E1
cs_ef2a_imon=3.18488E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58314E0
os_ef2alow_imon=-2.63032E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.82097E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11153E1
os_restr2_imon=2.97946E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01761E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73357E1
iondef1_imon=1.1052E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68136E1
iondef4_imon=1.04701E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=2.75774E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81808E-1
olens1_imon=1.27923E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15417E0
cs_ionaccel_imon=-2.4449E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.46725E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56561E1
einzel_imon=8.30772E-6
window_vset=0.0E0
window_vmon=1.81904E-1
window_imon=-1.93835E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.4036E-4
mask2_vset=0.0E0
mask2_vmon=-1.86434E1
mask2_imon=-8.46352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.58338E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=6.7233E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41441E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=8.97437E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.87576E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65592E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31673E1
cs_fil1_imon=7.01068E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.72567E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67135E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.87603E-2
os_fil2_imon=-3.03838E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.00427E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90019E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34313E-1
cs_fil2_imon=-2.22749E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10618E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22438E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.78265E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.26856E-1
res40_imon=-2.4357E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.1861E-1	-7.98965E-1	-9.13074E0	-9.14168E0	5.8651E-3	9.32217E-2	2.72915E1	-3.26526E1	-3.26018E1	2.67984E1	1.17023E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.78113E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.18658E-1	-7.98702E-1	-9.13064E0	-9.14183E0	5.65052E-3	9.32455E-2	2.72864E1	-3.26441E1	-3.26404E1	2.68319E1	1.16674E-7	2.52276E-3	2.52276E-3	6.34518E-3	1.77506E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.18706E-1	-7.98845E-1	-9.13086E0	-9.1418E0	5.79357E-3	9.33886E-2	2.73222E1	-3.26614E1	-3.26119E1	2.68154E1	1.16999E-7	2.52293E-3	2.52293E-3	6.33021E-3	1.77763E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.18729E-1	-7.98583E-1	-9.13072E0	-9.14171E0	5.84126E-3	9.31501E-2	2.72862E1	-3.2659E1	-3.26183E1	2.6818E1	1.16973E-7	2.51954E-3	2.51954E-3	6.33977E-3	1.77961E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18896E-1	-7.9906E-1	-9.13074E0	-9.14185E0	5.88894E-3	9.31263E-2	2.73309E1	-3.26344E1	-3.25996E1	2.68569E1	1.16823E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.77961E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.18896E-1	-7.98702E-1	-9.13081E0	-9.14156E0	5.65052E-3	9.31978E-2	2.73131E1	-3.26413E1	-3.26487E1	2.68419E1	1.1688E-7	2.52647E-3	2.52647E-3	6.31288E-3	1.77691E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18872E-1	-7.98702E-1	-9.13095E0	-9.14197E0	6.12736E-3	9.32217E-2	2.73216E1	-3.26661E1	-3.26331E1	2.68047E1	1.16938E-7	2.52139E-3	2.52139E-3	6.32418E-3	1.78357E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.18849E-1	-7.98512E-1	-9.13057E0	-9.14185E0	5.50747E-3	9.2864E-2	2.72821E1	-3.26425E1	-3.26231E1	2.6801E1	1.17073E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.78417E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09557E0	-8.18539E-1	-7.9875E-1	-9.13103E0	-9.1419E0	5.96046E-3	9.30071E-2	2.7311E1	-3.2685E1	-3.26136E1	2.68597E1	1.16724E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.77658E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.19039E-1	-7.99203E-1	-9.13095E0	-9.1419E0	5.50747E-3	9.30548E-2	2.72979E1	-3.26488E1	-3.26735E1	2.6822E1	1.16873E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.77658E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.18872E-1	-7.98821E-1	-9.13076E0	-9.14185E0	5.48363E-3	9.30786E-2	2.73171E1	-3.26879E1	-3.26422E1	2.6795E1	1.16626E-7	2.51662E-3	2.51662E-3	6.3074E-3	1.7862E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18872E-1	-7.98321E-1	-9.13093E0	-9.14185E0	5.74589E-3	9.3174E-2	2.73075E1	-3.26248E1	-3.26107E1	2.67842E1	1.16727E-7	2.5188E-3	2.5188E-3	6.32386E-3	1.77691E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.18777E-1	-7.98607E-1	-9.13091E0	-9.14226E0	5.50747E-3	9.31501E-2	2.73243E1	-3.26843E1	-3.26633E1	2.68184E1	1.16873E-7	2.52384E-3	2.52384E-3	6.3074E-3	1.78569E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09449E0	-8.18729E-1	-7.98488E-1	-9.13081E0	-9.14216E0	5.67436E-3	9.33409E-2	2.72709E1	-3.26326E1	-3.26284E1	2.68088E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.77846E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.0941E0	-8.18539E-1	-7.98464E-1	-9.13098E0	-9.14192E0	5.48363E-3	9.30548E-2	2.73139E1	-3.26968E1	-3.26496E1	2.68256E1	1.17108E-7	2.52592E-3	2.52592E-3	6.31563E-3	1.77923E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.18777E-1	-7.99012E-1	-9.13084E0	-9.14202E0	5.67436E-3	9.31025E-2	2.73027E1	-3.265E1	-3.26428E1	2.67211E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.18706E-1	-7.98821E-1	-9.13091E0	-9.14185E0	5.76973E-3	9.3317E-2	2.73381E1	-3.26687E1	-3.26717E1	2.6783E1	1.16873E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.77809E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.18634E-1	-7.98869E-1	-9.1311E0	-9.1419E0	5.48363E-3	9.34124E-2	2.73228E1	-3.2708E1	-3.2626E1	2.6801E1	1.16727E-7	2.51334E-3	2.51334E-3	6.32386E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09518E0	-8.18443E-1	-7.98655E-1	-9.13107E0	-9.14192E0	5.62668E-3	9.30548E-2	2.73075E1	-3.2636E1	-3.26183E1	2.67972E1	1.16774E-7	2.52599E-3	2.52599E-3	6.28056E-3	1.78569E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.18181E-1	-7.98774E-1	-9.13107E0	-9.14197E0	5.65052E-3	9.31501E-2	2.73357E1	-3.26681E1	-3.26368E1	2.68136E1	1.16774E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.78265E-1