[Scan]
initial_time=2015-12-16T00:13:19
final_time=2015-12-16T00:13:38
ip_count=19
run=1017
dataset=5
scan=287
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.19063E-1
ql1_imon=2.91219E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=5.84245E-10
ql3_vset=
ql3_vmon=-9.13105E0
ql3_imon=9.55975E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=4.37319E-10
mult1=-9.90959E-9
mult2=-2.7661E-9
rf_tmon=-4.50389E-3
rf_agc=3.28131E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.53131E-3
ql5_imon=5.60737E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.49371E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19866E1
lens5a_imon=1.97235E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53812E1
cs_ef1b_imon=3.15802E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.0205E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04622E1
cs_ea1_imon=1.09317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3997E0
lens1_imon=2.63174E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64967E1
os_ef1alow_imon=2.99329E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04144E1
cs_ea2_imon=1.41384E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84174E1
cs_ef1a_imon=3.04855E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=2.21863E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11025E1
os_restr1_imon=3.10798E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15441E1
os_ea1_imon=1.94652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63925E1
os_ef1bup_imon=3.07948E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24915E0
cs_ionrep_imon=9.44511E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91888E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.94863E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.39507E-9
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-2.91808E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26562E1
iondef2_imon=1.60355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98477E-4
ql6_vset=1.0E-1
ql6_vmon=9.2721E-2
ql6_imon=1.00064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27982E0
ionrepsh_imon=8.55671E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33563E1
lens5b_imon=2.17976E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74304E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.71375E-1
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0609E2
lens4b_imon=2.00364E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.19451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58743E0
os_ef2alow_imon=-2.57806E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.32156E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10822E1
os_restr2_imon=2.96167E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23078E2
cs_ionfoca_imon=6.29716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0185E1
cs_anode2_imon=2.1005E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.09529E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6773E1
iondef4_imon=1.10762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=2.67373E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=1.27266E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09539E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.4699E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56197E1
einzel_imon=7.62528E-6
window_vset=0.0E0
window_vmon=1.88725E-1
window_imon=-8.85609E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39133E-4
mask2_vset=0.0E0
mask2_vmon=-1.86831E1
mask2_imon=-7.74401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92633E3
multa_neg_imon=7.41702E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.41537E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50141E3
multb_neg_imon=6.99583E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46166E0
defgridb_imon=6.18531E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33389E1
os_fil1_imon=8.97329E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.76091E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65918E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31659E1
cs_fil1_imon=7.46118E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.43049E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67036E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.92668E-2
os_fil2_imon=-2.82557E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.94335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.62683E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33522E-1
cs_fil2_imon=-2.21161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25206E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22426E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.77691E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.99751E-1
res40_imon=-2.63366E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.18419E-1	-7.99084E-1	-9.13131E0	-9.14159E0	5.07832E-3	9.3627E-2	2.73153E1	-3.26332E1	-3.26236E1	2.67974E1	1.16923E-7	2.52061E-3	2.52061E-3	6.31278E-3	1.78265E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09518E0	-8.18706E-1	-7.98798E-1	-9.13117E0	-9.14159E0	5.45979E-3	9.32693E-2	2.73155E1	-3.26438E1	-3.26407E1	2.68107E1	1.1688E-7	2.53087E-3	2.53087E-3	6.3074E-3	1.78E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.18539E-1	-7.99322E-1	-9.13122E0	-9.14204E0	5.43594E-3	9.29832E-2	2.73317E1	-3.26683E1	-3.2622E1	2.6796E1	1.16886E-7	2.51581E-3	2.51581E-3	6.31299E-3	1.78041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.18658E-1	-7.98512E-1	-9.13069E0	-9.14178E0	5.24521E-3	9.30786E-2	2.72727E1	-3.26753E1	-3.26116E1	2.68058E1	1.16965E-7	2.51709E-3	2.51709E-3	6.31798E-3	1.77476E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09611E0	-8.18896E-1	-7.9844E-1	-9.13084E0	-9.14207E0	5.34058E-3	9.33647E-2	2.73234E1	-3.2672E1	-3.26254E1	2.68024E1	1.1693E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.77691E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.18849E-1	-7.98893E-1	-9.13095E0	-9.14195E0	5.4121E-3	9.27687E-2	2.72644E1	-3.26785E1	-3.26419E1	2.6801E1	1.17073E-7	2.52923E-3	2.52923E-3	6.32896E-3	1.78417E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09526E0	-8.1892E-1	-7.98917E-1	-9.13084E0	-9.14192E0	5.65052E-3	9.31978E-2	2.73069E1	-3.26735E1	-3.26386E1	2.68028E1	1.16724E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.77355E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.1892E-1	-7.98965E-1	-9.13086E0	-9.14195E0	5.65052E-3	9.30786E-2	2.72898E1	-3.26578E1	-3.26144E1	2.68256E1	1.16576E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.78155E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.1861E-1	-7.98726E-1	-9.13076E0	-9.14168E0	5.88894E-3	9.31263E-2	2.73328E1	-3.26349E1	-3.26337E1	2.6813E1	1.16835E-7	2.51581E-3	2.51581E-3	6.34661E-3	1.77255E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09441E0	-8.18777E-1	-7.98726E-1	-9.13081E0	-9.14192E0	5.62668E-3	9.31263E-2	2.72967E1	-3.26693E1	-3.26452E1	2.67986E1	1.16774E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.77961E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.1892E-1	-7.98512E-1	-9.1306E0	-9.14192E0	5.48363E-3	9.28879E-2	2.73177E1	-3.26603E1	-3.26044E1	2.68112E1	1.16727E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.77846E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18825E-1	-7.98583E-1	-9.13074E0	-9.14187E0	5.53131E-3	9.30309E-2	2.72986E1	-3.26296E1	-3.25871E1	2.68065E1	1.16778E-7	2.53196E-3	2.53196E-3	6.30192E-3	1.77691E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.18706E-1	-7.98678E-1	-9.1305E0	-9.1419E0	5.60284E-3	9.33409E-2	2.73273E1	-3.26693E1	-3.26272E1	2.67974E1	1.16923E-7	2.51954E-3	2.51954E-3	6.31278E-3	1.77658E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.18706E-1	-7.99131E-1	-9.13062E0	-9.14199E0	5.84126E-3	9.31025E-2	2.72978E1	-3.2678E1	-3.26474E1	2.6807E1	1.1688E-7	2.51662E-3	2.51662E-3	6.32936E-3	1.7831E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.19039E-1	-7.9906E-1	-9.1305E0	-9.14204E0	5.53131E-3	9.29117E-2	2.73175E1	-3.26962E1	-3.26113E1	2.68256E1	1.16835E-7	2.51804E-3	2.51804E-3	6.29067E-3	1.78199E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18968E-1	-7.99012E-1	-9.13074E0	-9.14221E0	5.67436E-3	9.29594E-2	2.73135E1	-3.26416E1	-3.26446E1	2.67818E1	1.16823E-7	2.52707E-3	2.52707E-3	6.32356E-3	1.78113E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.18849E-1	-7.99155E-1	-9.13064E0	-9.14218E0	5.53131E-3	9.34124E-2	2.73117E1	-3.2638E1	-3.26122E1	2.6789E1	1.16829E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.7862E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.18992E-1	-7.99036E-1	-9.13091E0	-9.14216E0	5.84126E-3	9.29356E-2	2.72986E1	-3.26655E1	-3.26608E1	2.6822E1	1.17032E-7	2.52757E-3	2.52757E-3	6.31288E-3	1.77383E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.19039E-1	-7.98869E-1	-9.13091E0	-9.14197E0	5.53131E-3	9.28402E-2	2.72961E1	-3.26747E1	-3.26549E1	2.67992E1	1.17073E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.77658E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.19063E-1	-7.98917E-1	-9.13105E0	-9.14211E0	5.53131E-3	9.2721E-2	2.73171E1	-3.26562E1	-3.26254E1	2.6773E1	1.16778E-7	2.51116E-3	2.51116E-3	6.31837E-3	1.77691E-1