[Scan]
initial_time=2015-12-16T00:14:12
final_time=2015-12-16T00:14:32
ip_count=19
run=1017
dataset=5
scan=289
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.08848E-4
ql1_vset=
ql1_vmon=-8.18539E-1
ql1_imon=2.78912E-9
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=5.99861E-10
ql3_vset=
ql3_vmon=-9.13091E0
ql3_imon=9.61232E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=5.53405E-10
mult1=-9.89692E-9
mult2=-2.72859E-9
rf_tmon=-4.76477E-3
rf_agc=3.21259E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.65052E-3
ql5_imon=6.23179E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66073E0
bslens_imon=2.37913E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19953E1
lens5a_imon=1.98343E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05021E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.17659E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04626E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04928E1
cs_ea1_imon=1.08291E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64981E1
os_ef1alow_imon=2.99099E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03654E1
cs_ea2_imon=1.39366E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.04108E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=2.22648E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11568E1
os_restr1_imon=3.10992E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=1.95027E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.09082E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22867E0
cs_ionrep_imon=9.53497E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=1.94548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=6.36122E-9
tplens_vset=1.4E-1
tplens_vmon=1.60959E0
tplens_imon=-3.8947E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26771E1
iondef2_imon=1.58905E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02935E2
lens6_imon=2.98223E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=9.87029E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28935E0
ionrepsh_imon=8.36336E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.19324E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.85107E-1
os_ea2_imon=-7.3915E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06152E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55191E0
os_ef2alow_imon=-2.48255E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.7609E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.96396E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23095E2
cs_ionfoca_imon=6.30397E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01593E1
cs_anode2_imon=2.08639E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73363E1
iondef1_imon=1.10346E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67884E1
iondef4_imon=1.09891E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.72337E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=1.26631E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10732E0
cs_ionaccel_imon=-9.61679E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56177E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.75897E-1
window_imon=-7.85084E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-5.29203E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92684E3
multa_neg_imon=8.03531E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93734E3
defgrida_imon=6.40587E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.16291E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46172E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33362E1
os_fil1_imon=8.97395E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.87516E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65629E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31701E1
cs_fil1_imon=7.23293E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.44936E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66728E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.89615E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.77136E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.52665E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2234E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=1.77506E-1
chamber_ion_pmon=1.16724E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.61695E-1
res40_imon=-2.44291E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18491E-1	-7.98607E-1	-9.13091E0	-9.14183E0	5.53131E-3	9.25064E-2	2.73075E1	-3.26813E1	-3.26044E1	2.67944E1	1.17083E-7	2.52428E-3	2.52428E-3	6.29645E-3	1.78E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-2.09611E0	-8.18539E-1	-7.9875E-1	-9.13112E0	-9.14202E0	5.65052E-3	9.29117E-2	2.72793E1	-3.26561E1	-3.26332E1	2.67686E1	1.17083E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.78E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09657E0	-8.18443E-1	-7.98655E-1	-9.13105E0	-9.14214E0	5.29289E-3	9.29356E-2	2.73111E1	-3.26524E1	-3.26398E1	2.67962E1	1.16727E-7	2.5188E-3	2.5188E-3	6.34037E-3	1.77846E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09611E0	-8.18539E-1	-7.98678E-1	-9.1311E0	-9.14173E0	5.36442E-3	9.29594E-2	2.73126E1	-3.2666E1	-3.26556E1	2.68088E1	1.17032E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.78155E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.18539E-1	-7.98893E-1	-9.13088E0	-9.14171E0	5.29289E-3	9.30309E-2	2.73009E1	-3.26771E1	-3.26224E1	2.6804E1	1.16848E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.78189E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.18276E-1	-7.98893E-1	-9.13084E0	-9.14176E0	5.38826E-3	9.26733E-2	2.73057E1	-3.26555E1	-3.26231E1	2.6836E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18634E-1	-7.98941E-1	-9.13105E0	-9.14147E0	5.53131E-3	9.31501E-2	2.73105E1	-3.26777E1	-3.26134E1	2.67992E1	1.16873E-7	2.51954E-3	2.51954E-3	6.26985E-3	1.78265E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.18539E-1	-7.98655E-1	-9.13115E0	-9.14171E0	5.98431E-3	9.31501E-2	2.72886E1	-3.2662E1	-3.26313E1	2.68184E1	1.16724E-7	2.52061E-3	2.52061E-3	6.33436E-3	1.78265E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.18682E-1	-7.98702E-1	-9.13103E0	-9.14147E0	5.81741E-3	9.31263E-2	2.73094E1	-3.26376E1	-3.26511E1	2.6813E1	1.1688E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.77537E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.18658E-1	-7.98464E-1	-9.13107E0	-9.14152E0	5.31673E-3	9.3174E-2	2.72751E1	-3.26633E1	-3.26398E1	2.67992E1	1.17042E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.78673E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18801E-1	-7.98106E-1	-9.13069E0	-9.14192E0	5.43594E-3	9.28879E-2	2.72895E1	-3.26813E1	-3.26374E1	2.68064E1	1.16873E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.77809E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18896E-1	-7.98655E-1	-9.13081E0	-9.14176E0	5.53131E-3	9.31501E-2	2.73222E1	-3.26248E1	-3.25983E1	2.6801E1	1.16626E-7	2.52647E-3	2.52647E-3	6.3074E-3	1.79398E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09464E0	-8.18586E-1	-7.98583E-1	-9.13062E0	-9.14145E0	5.55515E-3	9.29594E-2	2.72813E1	-3.266E1	-3.26412E1	2.68209E1	1.16829E-7	2.51443E-3	2.51443E-3	6.34588E-3	1.77383E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.0941E0	-8.18515E-1	-7.9875E-1	-9.13091E0	-9.14156E0	5.43594E-3	9.33409E-2	2.73406E1	-3.26829E1	-3.2604E1	2.68178E1	1.16993E-7	2.5199E-3	2.5199E-3	6.34291E-3	1.77549E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.18467E-1	-7.98678E-1	-9.13095E0	-9.14209E0	5.65052E-3	9.30548E-2	2.73171E1	-3.26789E1	-3.26105E1	2.68392E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09402E0	-8.18324E-1	-7.98702E-1	-9.13095E0	-9.14195E0	5.74589E-3	9.30786E-2	2.72901E1	-3.26693E1	-3.26476E1	2.67427E1	1.16874E-7	2.51529E-3	2.51529E-3	6.3074E-3	1.77967E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09449E0	-8.18706E-1	-7.98869E-1	-9.13115E0	-9.14199E0	5.57899E-3	9.28402E-2	2.73068E1	-3.26677E1	-3.26614E1	2.67966E1	1.1699E-7	2.52139E-3	2.52139E-3	6.31299E-3	1.78357E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09456E0	-8.18706E-1	-7.98678E-1	-9.13069E0	-9.14195E0	5.88894E-3	9.28879E-2	2.73414E1	-3.2689E1	-3.26292E1	2.68101E1	1.1672E-7	2.51498E-3	2.51498E-3	6.32858E-3	1.7852E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.18563E-1	-7.99012E-1	-9.13103E0	-9.14192E0	5.72205E-3	9.30309E-2	2.7286E1	-3.2615E1	-3.26503E1	2.67984E1	1.16999E-7	2.51952E-3	2.51952E-3	6.33021E-3	1.77602E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.18539E-1	-7.98416E-1	-9.13091E0	-9.14161E0	5.65052E-3	9.2864E-2	2.73363E1	-3.26771E1	-3.26512E1	2.67884E1	1.16724E-7	2.51525E-3	2.51525E-3	6.32356E-3	1.77506E-1