[Scan]
initial_time=2015-12-16T00:15:06
final_time=2015-12-16T00:15:25
ip_count=19
run=1017
dataset=5
scan=291
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08815E-4
ql1_vset=
ql1_vmon=-8.18229E-1
ql1_imon=2.78409E-9
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=6.06489E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=8.83317E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=5.24604E-10
mult1=-9.36932E-9
mult2=-2.64682E-9
rf_tmon=-4.67465E-3
rf_agc=3.24832E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.79357E-3
ql5_imon=6.10983E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64891E0
bslens_imon=2.46166E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20083E1
lens5a_imon=1.96863E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05069E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53806E1
cs_ef1b_imon=3.17574E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.02277E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05005E1
cs_ea1_imon=1.10131E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42586E0
lens1_imon=2.61462E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64435E1
os_ef1alow_imon=2.99225E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04003E1
cs_ea2_imon=1.38706E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.05272E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=2.22116E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1143E1
os_restr1_imon=3.11215E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15444E1
os_ea1_imon=1.95298E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63745E1
os_ef1bup_imon=3.10103E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24746E0
cs_ionrep_imon=9.36541E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91853E2
cs_nozzle_imon=1.93368E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=1.95315E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.35344E-9
tplens_vset=1.4E-1
tplens_vmon=1.58118E0
tplens_imon=-2.60206E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26567E1
iondef3_imon=1.50838E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.58729E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02947E2
lens6_imon=2.98165E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=9.86445E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27238E0
ionrepsh_imon=8.37121E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33484E1
lens5b_imon=2.18033E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7676E1
cs_ef2b_imon=3.15524E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.71459E-1
os_ea2_imon=-3.92302E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00762E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71281E1
cs_ef2a_imon=3.19694E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55905E0
os_ef2alow_imon=-2.50855E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.86602E-1
os_ef2bup_imon=-5.30266E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10741E1
os_restr2_imon=2.96202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.30554E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.08938E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73257E1
iondef1_imon=1.09679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.0892E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.70712E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=1.27841E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12145E0
cs_ionaccel_imon=-9.37738E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47188E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56191E1
einzel_imon=7.70522E-6
window_vset=0.0E0
window_vmon=1.80037E-1
window_imon=-9.62065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39025E-4
mask2_vset=0.0E0
mask2_vmon=-1.86616E1
mask2_imon=-6.52767E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.29359E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.50101E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.1163E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42681E0
defgridb_imon=6.19858E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33376E1
os_fil1_imon=8.96842E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.85126E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65524E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31689E1
cs_fil1_imon=7.75657E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.69113E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66771E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.18288E-2
os_fil2_imon=-2.91245E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.86226E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82554E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33273E-1
cs_fil2_imon=-2.25216E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.57641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22415E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=1.78072E-1
chamber_ion_pmon=1.1721E-7
chamber_cvt_pmon=2.52236E-3
foreline_cvt_pmon=2.52236E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.82578E-1
res40_imon=-2.61281E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=192
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.18276E-1	-7.9875E-1	-9.1311E0	-9.14149E0	5.79357E-3	9.30548E-2	2.72965E1	-3.26909E1	-3.2648E1	2.68045E1	1.17014E-7	2.52025E-3	2.52025E-3	6.3074E-3	1.78072E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.18443E-1	-7.98464E-1	-9.13107E0	-9.1418E0	5.65052E-3	9.30548E-2	2.73051E1	-3.27047E1	-3.26185E1	2.68152E1	1.16778E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.77691E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.18443E-1	-7.98488E-1	-9.13122E0	-9.1418E0	5.60284E-3	9.27687E-2	2.73202E1	-3.26631E1	-3.26353E1	2.67833E1	1.17019E-7	2.52401E-3	2.52401E-3	6.3074E-3	1.77691E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09619E0	-8.18324E-1	-7.98845E-1	-9.13107E0	-9.14185E0	5.88894E-3	9.30548E-2	2.73165E1	-3.26825E1	-3.25803E1	2.68142E1	1.16965E-7	2.51603E-3	2.51603E-3	6.31269E-3	1.77625E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.18324E-1	-7.98869E-1	-9.13095E0	-9.14161E0	5.60284E-3	9.30071E-2	2.73123E1	-3.26332E1	-3.2644E1	2.68118E1	1.16981E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.78155E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.1811E-1	-7.98869E-1	-9.13095E0	-9.1418E0	5.38826E-3	9.28164E-2	2.73151E1	-3.26661E1	-3.26296E1	2.68172E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.78E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.18133E-1	-7.98821E-1	-9.13112E0	-9.14176E0	5.6982E-3	9.28402E-2	2.72945E1	-3.26703E1	-3.26065E1	2.67873E1	1.16774E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.78417E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.18348E-1	-7.9906E-1	-9.13095E0	-9.14195E0	5.72205E-3	9.28402E-2	2.72955E1	-3.26873E1	-3.26404E1	2.68148E1	1.16973E-7	2.51525E-3	2.51525E-3	6.31817E-3	1.78569E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.18324E-1	-7.98678E-1	-9.13076E0	-9.14204E0	5.57899E-3	9.28164E-2	2.73129E1	-3.26374E1	-3.26206E1	2.68328E1	1.16677E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.7831E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.18658E-1	-7.98702E-1	-9.13079E0	-9.1419E0	5.79357E-3	9.32217E-2	2.72871E1	-3.26753E1	-3.26196E1	2.67763E1	1.17073E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.77961E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09595E0	-8.18443E-1	-7.98488E-1	-9.131E0	-9.14183E0	5.67436E-3	9.27925E-2	2.73186E1	-3.26884E1	-3.26689E1	2.68217E1	1.16774E-7	2.52707E-3	2.52707E-3	6.31817E-3	1.77355E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.18467E-1	-7.98607E-1	-9.13091E0	-9.14166E0	5.60284E-3	9.29117E-2	2.73246E1	-3.26313E1	-3.26319E1	2.68165E1	1.1688E-7	2.52538E-3	2.52538E-3	6.31288E-3	1.78465E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.18467E-1	-7.98702E-1	-9.13084E0	-9.14164E0	5.79357E-3	9.25303E-2	2.7337E1	-3.26641E1	-3.26402E1	2.68105E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.78155E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.18491E-1	-7.98941E-1	-9.13074E0	-9.14156E0	5.74589E-3	9.2864E-2	2.73261E1	-3.26763E1	-3.26241E1	2.68138E1	1.16717E-7	2.51783E-3	2.51783E-3	6.33863E-3	1.7774E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.18658E-1	-7.98845E-1	-9.13103E0	-9.14166E0	5.6982E-3	9.27925E-2	2.72979E1	-3.26663E1	-3.26416E1	2.681E1	1.16683E-7	2.51838E-3	2.51838E-3	6.3074E-3	1.77923E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.18801E-1	-7.99179E-1	-9.13093E0	-9.14202E0	5.50747E-3	9.28402E-2	2.73311E1	-3.26343E1	-3.26119E1	2.68166E1	1.16835E-7	2.51804E-3	2.51804E-3	6.31858E-3	1.78041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.18491E-1	-7.98965E-1	-9.13095E0	-9.14183E0	5.6982E-3	9.2721E-2	2.72839E1	-3.26514E1	-3.26343E1	2.68105E1	1.16769E-7	2.52448E-3	2.52448E-3	6.3074E-3	1.78221E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.18586E-1	-7.98893E-1	-9.13091E0	-9.14214E0	5.45979E-3	9.2721E-2	2.73135E1	-3.26549E1	-3.26657E1	2.68064E1	1.16778E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.18348E-1	-7.98821E-1	-9.13069E0	-9.14204E0	5.88894E-3	9.29117E-2	2.73246E1	-3.26354E1	-3.26449E1	2.68286E1	1.16727E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.78E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.18229E-1	-7.98917E-1	-9.13088E0	-9.14211E0	5.79357E-3	9.29832E-2	2.73257E1	-3.26885E1	-3.26567E1	2.68024E1	1.1721E-7	2.52236E-3	2.52236E-3	6.31269E-3	1.78072E-1