[Scan]
initial_time=2015-12-16T00:15:59
final_time=2015-12-16T00:16:19
ip_count=19
run=1017
dataset=5
scan=293
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.18563E-1
ql1_imon=2.79441E-9
ql2_vset=
ql2_vmon=-7.98798E-1
ql2_imon=6.26445E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=7.43568E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=4.97842E-10
mult1=-1.00775E-8
mult2=-2.76851E-9
rf_tmon=-3.85752E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.8651E-3
ql5_imon=5.95784E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65324E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19529E1
lens5a_imon=1.98757E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05015E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5379E1
cs_ef1b_imon=3.17876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02199E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=1.09317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41503E0
lens1_imon=2.68483E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98883E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03661E1
cs_ea2_imon=1.41738E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=3.03316E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=2.23193E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=3.10451E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=1.96174E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63545E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22791E0
cs_ionrep_imon=9.40617E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93201E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.93863E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20568E0
olens4_imon=6.36792E-9
tplens_vset=1.4E-1
tplens_vmon=1.5966E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26332E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98318E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=1.00619E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29221E0
ionrepsh_imon=8.41868E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.73895E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.54268E-1
os_ea2_imon=-6.3867E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.0069E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71053E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.57473E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.79694E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=2.96973E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23059E2
cs_ionfoca_imon=6.31556E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.07955E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73333E1
iondef1_imon=1.08573E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.09819E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.69631E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=1.27656E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15357E0
cs_ionaccel_imon=-1.04457E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02044E2
cs_ionfocb_imon=1.47381E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=1.79501E-1
window_imon=-1.0734E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-5.00371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=7.35685E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.59942E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.65063E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59454E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33386E1
os_fil1_imon=8.98031E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.84513E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65534E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31714E1
cs_fil1_imon=7.7555E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.4854E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67231E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07863E-2
os_fil2_imon=-2.93026E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.89615E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.90398E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46057E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22337E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=1.78E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.53285E-1
res40_imon=-2.46093E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09426E0	-8.1861E-1	-7.99131E-1	-9.13091E0	-9.14178E0	5.38826E-3	9.3174E-2	2.73177E1	-3.26651E1	-3.26392E1	2.67992E1	1.16981E-7	2.52099E-3	2.52099E-3	6.35692E-3	1.77691E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.18324E-1	-7.9875E-1	-9.1311E0	-9.14164E0	5.60284E-3	9.31263E-2	2.72757E1	-3.26645E1	-3.2629E1	2.68052E1	1.16873E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.78569E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.18467E-1	-7.98988E-1	-9.13084E0	-9.14154E0	5.38826E-3	9.29356E-2	2.7301E1	-3.26585E1	-3.26284E1	2.68146E1	1.16727E-7	2.52757E-3	2.52757E-3	6.31837E-3	1.78155E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18443E-1	-7.98559E-1	-9.13074E0	-9.14156E0	5.60284E-3	9.28164E-2	2.73045E1	-3.26158E1	-3.26128E1	2.68142E1	1.16829E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.77691E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.18372E-1	-7.98583E-1	-9.131E0	-9.14142E0	5.62668E-3	9.27925E-2	2.73228E1	-3.26862E1	-3.26337E1	2.67674E1	1.16823E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.78874E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.18443E-1	-7.98607E-1	-9.13098E0	-9.14147E0	5.67436E-3	9.29117E-2	2.73016E1	-3.26767E1	-3.2636E1	2.68099E1	1.1693E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.77537E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.18419E-1	-7.98631E-1	-9.13119E0	-9.14178E0	5.43594E-3	9.30071E-2	2.73099E1	-3.26512E1	-3.26098E1	2.68424E1	1.16923E-7	2.51847E-3	2.51847E-3	6.33977E-3	1.78265E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.18491E-1	-7.98702E-1	-9.1311E0	-9.14176E0	5.62668E-3	9.28879E-2	2.72874E1	-3.26425E1	-3.26496E1	2.67541E1	1.16923E-7	2.51954E-3	2.51954E-3	6.35601E-3	1.78569E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09619E0	-8.18276E-1	-7.98559E-1	-9.13086E0	-9.14178E0	5.76973E-3	9.31978E-2	2.73109E1	-3.26295E1	-3.26364E1	2.67976E1	1.16829E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.78155E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.18396E-1	-7.98631E-1	-9.13105E0	-9.14154E0	5.72205E-3	9.31025E-2	2.73197E1	-3.26521E1	-3.2626E1	2.6707E1	1.16957E-7	2.52093E-3	2.52093E-3	6.33863E-3	1.78033E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.1811E-1	-7.98893E-1	-9.13095E0	-9.14195E0	5.81741E-3	9.31501E-2	2.73069E1	-3.26735E1	-3.2611E1	2.68172E1	1.16798E-7	2.52029E-3	2.52029E-3	6.32518E-3	1.79012E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.18181E-1	-7.98798E-1	-9.13105E0	-9.14187E0	5.84126E-3	9.2864E-2	2.73346E1	-3.26732E1	-3.26986E1	2.67818E1	1.16823E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.77355E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.18324E-1	-7.99298E-1	-9.13069E0	-9.14195E0	5.76973E-3	9.29356E-2	2.72787E1	-3.26561E1	-3.2647E1	2.68064E1	1.16626E-7	2.51662E-3	2.51662E-3	6.31288E-3	1.7831E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.18396E-1	-7.99155E-1	-9.13069E0	-9.14192E0	5.62668E-3	9.30548E-2	2.73454E1	-3.27023E1	-3.26026E1	2.68052E1	1.17073E-7	2.51954E-3	2.51954E-3	6.35059E-3	1.78113E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.18324E-1	-7.98988E-1	-9.13079E0	-9.14176E0	5.67436E-3	9.29832E-2	2.73104E1	-3.26549E1	-3.2593E1	2.68141E1	1.17007E-7	2.52154E-3	2.52154E-3	6.32386E-3	1.78542E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.18086E-1	-7.99108E-1	-9.13103E0	-9.14187E0	6.00815E-3	9.29117E-2	2.73235E1	-3.27044E1	-3.26138E1	2.68797E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09418E0	-8.18014E-1	-7.98512E-1	-9.13086E0	-9.14164E0	5.6982E-3	9.32693E-2	2.72768E1	-3.26697E1	-3.26313E1	2.6825E1	1.16778E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.77691E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09449E0	-8.18157E-1	-7.98774E-1	-9.1311E0	-9.14185E0	5.88894E-3	9.31025E-2	2.72632E1	-3.2695E1	-3.25818E1	2.6834E1	1.17083E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.18372E-1	-7.9875E-1	-9.13081E0	-9.1419E0	5.65052E-3	9.32932E-2	2.72915E1	-3.26467E1	-3.26036E1	2.67816E1	1.1672E-7	2.51919E-3	2.51919E-3	6.29684E-3	1.77923E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.18563E-1	-7.98798E-1	-9.13088E0	-9.14218E0	5.8651E-3	9.32217E-2	2.73333E1	-3.26332E1	-3.2647E1	2.67944E1	1.16778E-7	2.52318E-3	2.52318E-3	6.32936E-3	1.78E-1