[Scan]
initial_time=2015-12-16T00:16:26
final_time=2015-12-16T00:16:45
ip_count=19
run=1017
dataset=5
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08783E-4
ql1_vset=
ql1_vmon=-8.18133E-1
ql1_imon=2.78379E-9
ql2_vset=
ql2_vmon=-7.98893E-1
ql2_imon=6.28543E-10
ql3_vset=
ql3_vmon=-9.13086E0
ql3_imon=8.2401E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=5.37634E-10
mult1=-1.00173E-8
mult2=-2.76452E-9
rf_tmon=-5.13127E-3
rf_agc=3.24263E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=6.18088E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68332E0
bslens_imon=2.45477E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19813E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12519E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=3.18652E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02422E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04923E1
cs_ea1_imon=1.0921E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41798E0
lens1_imon=2.67422E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64782E1
os_ef1alow_imon=3.0058E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.39826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84458E1
cs_ef1a_imon=3.02249E-5
olens2_vset=9.7E-1
olens2_vmon=9.70387E-1
olens2_imon=2.22594E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=3.09442E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15541E1
os_ea1_imon=1.93944E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63566E1
os_ef1bup_imon=3.09894E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23145E0
cs_ionrep_imon=9.41679E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93314E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01885E1
cs_anode1_imon=1.94446E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20532E0
olens4_imon=6.31458E-9
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2647E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.58974E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98293E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=9.90772E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26626E0
ionrepsh_imon=8.58857E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33215E1
lens5b_imon=2.17693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74907E1
cs_ef2b_imon=3.13126E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.84353E-1
os_ea2_imon=-5.00633E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71171E1
cs_ef2a_imon=3.19729E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58048E0
os_ef2alow_imon=-2.42862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.84864E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1088E1
os_restr2_imon=2.95889E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23071E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01769E1
cs_anode2_imon=2.09564E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6819E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.70879E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=1.27531E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15273E0
cs_ionaccel_imon=-8.82134E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.5615E1
einzel_imon=7.72954E-6
window_vset=0.0E0
window_vmon=1.76562E-1
window_imon=-1.01767E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86645E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.76389E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50139E3
multb_neg_imon=7.20112E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33391E1
os_fil1_imon=8.97178E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.90223E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65868E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31654E1
cs_fil1_imon=7.60598E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70851E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67117E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.96467E-2
os_fil2_imon=-2.87191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.97231E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56355E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32149E-1
cs_fil2_imon=-2.14211E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16518E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22471E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.09221E-1
res40_imon=-2.32784E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.18038E-1	-7.99036E-1	-9.13091E0	-9.14195E0	5.84126E-3	9.28402E-2	2.73225E1	-3.26648E1	-3.2677E1	2.67949E1	1.16965E-7	2.52871E-3	2.52871E-3	6.31269E-3	1.7852E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.18014E-1	-7.98392E-1	-9.13081E0	-9.14199E0	5.8651E-3	9.29356E-2	2.73204E1	-3.26866E1	-3.26327E1	2.67914E1	1.16774E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.78417E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.1811E-1	-7.98869E-1	-9.13091E0	-9.14199E0	6.1512E-3	9.31263E-2	2.73057E1	-3.26608E1	-3.26104E1	2.68053E1	1.16981E-7	2.5199E-3	2.5199E-3	6.3074E-3	1.78E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.18205E-1	-7.98774E-1	-9.13081E0	-9.14176E0	6.05583E-3	9.30786E-2	2.73175E1	-3.26756E1	-3.26331E1	2.68262E1	1.16774E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.77809E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.18229E-1	-7.98893E-1	-9.13084E0	-9.14156E0	5.84126E-3	9.30309E-2	2.73135E1	-3.26464E1	-3.26038E1	2.68028E1	1.16973E-7	2.51739E-3	2.51739E-3	6.31278E-3	1.78113E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18253E-1	-7.98988E-1	-9.13103E0	-9.14178E0	5.98431E-3	9.31025E-2	2.72898E1	-3.2656E1	-3.26591E1	2.68484E1	1.16981E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.78E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18038E-1	-7.98869E-1	-9.13095E0	-9.14204E0	6.34193E-3	9.30786E-2	2.73228E1	-3.26543E1	-3.2603E1	2.68214E1	1.17134E-7	2.52099E-3	2.52099E-3	6.33486E-3	1.77691E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09472E0	-8.18086E-1	-7.98702E-1	-9.13084E0	-9.14195E0	5.74589E-3	9.3317E-2	2.72953E1	-3.26536E1	-3.26083E1	2.68256E1	1.1693E-7	2.52209E-3	2.52209E-3	6.3074E-3	1.78465E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.18157E-1	-7.98988E-1	-9.13117E0	-9.14197E0	5.76973E-3	9.3174E-2	2.72974E1	-3.26602E1	-3.26189E1	2.68154E1	1.16829E-7	2.52538E-3	2.52538E-3	6.33486E-3	1.77383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09518E0	-8.183E-1	-7.98893E-1	-9.1311E0	-9.14204E0	5.84126E-3	9.30548E-2	2.72986E1	-3.26791E1	-3.26319E1	2.67908E1	1.16981E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.77846E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.18133E-1	-7.9875E-1	-9.13079E0	-9.14171E0	6.07967E-3	9.31025E-2	2.73033E1	-3.26645E1	-3.26452E1	2.68053E1	1.16724E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.77658E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.18086E-1	-7.98655E-1	-9.13057E0	-9.14207E0	5.76973E-3	9.32455E-2	2.73099E1	-3.26434E1	-3.26573E1	2.68363E1	1.17023E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.77809E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.18062E-1	-7.9875E-1	-9.13079E0	-9.14187E0	5.62668E-3	9.2721E-2	2.7265E1	-3.26815E1	-3.26313E1	2.68041E1	1.17032E-7	2.52209E-3	2.52209E-3	6.29645E-3	1.78465E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09464E0	-8.17704E-1	-7.98249E-1	-9.13088E0	-9.14204E0	5.76973E-3	9.29594E-2	2.73143E1	-3.26205E1	-3.26389E1	2.68033E1	1.16677E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.77229E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09394E0	-8.18014E-1	-7.98941E-1	-9.13086E0	-9.14207E0	5.62668E-3	9.32455E-2	2.73187E1	-3.26856E1	-3.26095E1	2.68141E1	1.17083E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.17919E-1	-7.99012E-1	-9.13041E0	-9.14173E0	5.62668E-3	9.34362E-2	2.72805E1	-3.26663E1	-3.26188E1	2.68058E1	1.17023E-7	2.51203E-3	2.51203E-3	6.31278E-3	1.77809E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.17847E-1	-7.99203E-1	-9.13088E0	-9.14176E0	5.53131E-3	9.31025E-2	2.73255E1	-3.26981E1	-3.26428E1	2.68364E1	1.16981E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.7862E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17823E-1	-7.9844E-1	-9.13074E0	-9.14195E0	5.60284E-3	9.31501E-2	2.73075E1	-3.26508E1	-3.26655E1	2.67988E1	1.16829E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.77691E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.1768E-1	-7.98941E-1	-9.13067E0	-9.14218E0	5.43594E-3	9.29356E-2	2.72845E1	-3.26708E1	-3.26325E1	2.68418E1	1.16998E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.78113E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18133E-1	-7.98893E-1	-9.13086E0	-9.14204E0	5.84126E-3	9.30071E-2	2.73057E1	-3.26458E1	-3.2647E1	2.6819E1