[Scan]
initial_time=2015-12-16T00:16:52
final_time=2015-12-16T00:17:12
ip_count=19
run=1017
dataset=5
scan=295
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09565E0
qbias_imon=-1.08788E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=2.8012E-9
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=5.96786E-10
ql3_vset=
ql3_vmon=-9.13074E0
ql3_imon=7.53272E-10
ql4_vset=
ql4_vmon=-9.1414E0
ql4_imon=5.43416E-10
mult1=-9.52366E-9
mult2=-2.80245E-9
rf_tmon=-4.69267E-3
rf_agc=3.24624E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.63638E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68236E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19394E1
lens5a_imon=1.98451E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05064E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53807E1
cs_ef1b_imon=3.17811E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02323E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.09878E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38938E0
lens1_imon=2.66753E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64558E1
os_ef1alow_imon=2.98774E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.38393E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84521E1
cs_ef1a_imon=3.04542E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=2.22748E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11283E1
os_restr1_imon=3.10769E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=1.95423E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63603E1
os_ef1bup_imon=3.08929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22206E0
cs_ionrep_imon=9.36553E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02057E1
cs_anode1_imon=1.94107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20597E0
olens4_imon=6.42732E-9
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-1.37123E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26494E1
iondef3_imon=1.4928E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.58833E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98472E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=1.03593E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25751E0
ionrepsh_imon=8.43546E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.17269E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7561E1
cs_ef2b_imon=3.1406E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.61074E-1
os_ea2_imon=-4.111E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00698E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71275E1
cs_ef2a_imon=3.1912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56793E0
os_ef2alow_imon=-2.47102E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.71416E-1
os_ef2bup_imon=-5.17439E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10917E1
os_restr2_imon=2.96828E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23127E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.09534E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.09625E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.09184E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.74287E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=1.27563E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13604E0
cs_ionaccel_imon=-9.77798E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47131E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56547E1
einzel_imon=7.91784E-6
window_vset=0.0E0
window_vmon=1.90684E-1
window_imon=-1.08749E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-5.24878E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93707E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50156E3
multb_neg_imon=7.13767E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.11026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33384E1
os_fil1_imon=8.98349E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.81287E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65919E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31643E1
cs_fil1_imon=7.93002E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.84078E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67112E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.99632E-2
os_fil2_imon=-2.81504E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.81108E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.63988E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31622E-1
cs_fil2_imon=-2.28428E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.44288E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22404E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.78E-1
chamber_ion_pmon=1.1688E-7
chamber_cvt_pmon=2.52428E-3
foreline_cvt_pmon=2.52428E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.6721E-1
res40_imon=-2.46394E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=186
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.18086E-1	-7.98559E-1	-9.13136E0	-9.14152E0	5.48363E-3	9.27687E-2	2.73183E1	-3.27017E1	-3.26236E1	2.6787E1	1.16873E-7	2.52707E-3	2.52707E-3	6.33436E-3	1.79027E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.17895E-1	-7.98678E-1	-9.13103E0	-9.14207E0	5.65052E-3	9.26971E-2	2.73039E1	-3.26446E1	-3.26374E1	2.68213E1	1.16981E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.78E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.18324E-1	-7.98225E-1	-9.13131E0	-9.14171E0	5.65052E-3	9.30309E-2	2.72744E1	-3.26514E1	-3.26319E1	2.68186E1	1.16938E-7	2.52027E-3	2.52027E-3	6.31299E-3	1.78041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09595E0	-8.18062E-1	-7.98607E-1	-9.13107E0	-9.14173E0	5.72205E-3	9.28164E-2	2.73293E1	-3.26614E1	-3.26089E1	2.68232E1	1.1672E-7	2.51919E-3	2.51919E-3	6.32858E-3	1.77923E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.18038E-1	-7.98249E-1	-9.13086E0	-9.14187E0	5.55515E-3	9.31025E-2	2.73062E1	-3.26467E1	-3.26227E1	2.68255E1	1.16823E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.78417E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.1799E-1	-7.98202E-1	-9.13124E0	-9.14195E0	5.8651E-3	9.30548E-2	2.72956E1	-3.26502E1	-3.26604E1	2.67926E1	1.16909E-7	2.52405E-3	2.52405E-3	6.3126E-3	1.77448E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09665E0	-8.18038E-1	-7.98035E-1	-9.13129E0	-9.14192E0	5.93662E-3	9.33647E-2	2.72871E1	-3.26879E1	-3.26038E1	2.68064E1	1.16938E-7	2.51804E-3	2.51804E-3	6.32697E-3	1.78515E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09657E0	-8.17943E-1	-7.98631E-1	-9.13107E0	-9.14176E0	5.72205E-3	9.31501E-2	2.73183E1	-3.26765E1	-3.26086E1	2.67944E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.18014E-1	-7.98845E-1	-9.13122E0	-9.14173E0	5.65052E-3	9.33647E-2	2.73016E1	-3.26449E1	-3.26083E1	2.67902E1	1.1699E-7	2.5225E-3	2.5225E-3	6.31299E-3	1.77255E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09688E0	-8.17919E-1	-7.98273E-1	-9.13098E0	-9.14168E0	5.45979E-3	9.29117E-2	2.73398E1	-3.26691E1	-3.26092E1	2.68216E1	1.17173E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78569E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.183E-1	-7.98512E-1	-9.13105E0	-9.14168E0	5.53131E-3	9.31025E-2	2.73213E1	-3.26703E1	-3.26316E1	2.68257E1	1.16896E-7	2.52625E-3	2.52625E-3	6.28237E-3	1.77817E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.18157E-1	-7.98702E-1	-9.13131E0	-9.14176E0	5.50747E-3	9.30309E-2	2.73293E1	-3.26956E1	-3.26119E1	2.68366E1	1.17052E-7	2.52066E-3	2.52066E-3	6.34164E-3	1.77763E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.18086E-1	-7.98631E-1	-9.13122E0	-9.14207E0	5.26905E-3	9.29832E-2	2.73263E1	-3.27015E1	-3.26349E1	2.68256E1	1.1688E-7	2.51552E-3	2.51552E-3	6.30192E-3	1.7831E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.1799E-1	-7.98655E-1	-9.13084E0	-9.14197E0	5.34058E-3	9.30786E-2	2.73243E1	-3.26795E1	-3.26212E1	2.68214E1	1.16973E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.78722E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.18181E-1	-7.98798E-1	-9.13072E0	-9.14204E0	5.43594E-3	9.29832E-2	2.72865E1	-3.26633E1	-3.26446E1	2.67937E1	1.17073E-7	2.51954E-3	2.51954E-3	6.33436E-3	1.78265E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09673E0	-8.18348E-1	-7.9875E-1	-9.13067E0	-9.14187E0	5.65052E-3	9.29832E-2	2.73294E1	-3.26463E1	-3.25762E1	2.6831E1	1.16829E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.78E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.1799E-1	-7.9844E-1	-9.13084E0	-9.14161E0	6.12736E-3	9.29594E-2	2.73177E1	-3.26705E1	-3.26549E1	2.6819E1	1.16873E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78265E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0965E0	-8.17847E-1	-7.98655E-1	-9.13105E0	-9.14161E0	5.55515E-3	9.32693E-2	2.72939E1	-3.26832E1	-3.26095E1	2.67937E1	1.16575E-7	2.52384E-3	2.52384E-3	6.32356E-3	1.78569E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09588E0	-8.18086E-1	-7.98798E-1	-9.1311E0	-9.14149E0	5.88894E-3	9.34362E-2	2.72974E1	-3.26602E1	-3.26301E1	2.68118E1	1.17023E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.78113E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-2.09565E0	-8.17966E-1	-7.98631E-1	-9.13074E0	-9.1414E0	5.45979E-3	9.2864E-2	2.73393E1	-3.26603E1	-3.26494E1	2.68034E1	1.1688E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.78E-1