[Scan]
initial_time=2015-12-16T00:18:13
final_time=2015-12-16T00:18:32
ip_count=19
run=1017
dataset=5
scan=298
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08796E-4
ql1_vset=
ql1_vmon=-8.18038E-1
ql1_imon=2.76474E-9
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=6.25837E-10
ql3_vset=
ql3_vmon=-9.13062E0
ql3_imon=6.7054E-10
ql4_vset=
ql4_vmon=-9.14221E0
ql4_imon=4.98307E-10
mult1=-1.01498E-8
mult2=-2.58088E-9
rf_tmon=-4.72872E-3
rf_agc=3.25405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=6.15931E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65501E0
bslens_imon=2.54326E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19671E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12502E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.1683E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04628E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05141E1
cs_ea1_imon=1.09033E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4522E0
lens1_imon=2.50079E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03755E1
cs_ea2_imon=1.39614E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.0364E-5
olens2_vset=9.7E-1
olens2_vmon=9.70483E-1
olens2_imon=2.21741E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.10955E1
os_restr1_imon=3.1092E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14987E1
os_ea1_imon=1.95324E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63749E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2167E0
cs_ionrep_imon=9.60792E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=1.94872E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20556E0
olens4_imon=6.46007E-9
tplens_vset=1.4E-1
tplens_vmon=1.60191E0
tplens_imon=-4.15688E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26549E1
iondef3_imon=1.48887E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26831E1
iondef2_imon=1.58621E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.31025E-2
ql6_imon=1.00085E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2869E0
ionrepsh_imon=8.41868E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33581E1
lens5b_imon=2.19782E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.78454E-1
os_ea2_imon=-5.64343E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00778E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56392E0
os_ef2alow_imon=-2.55103E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.69483E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=2.96432E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23077E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08495E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73351E1
iondef1_imon=1.10485E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.0917E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.71908E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=1.28031E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14396E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47237E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56459E1
einzel_imon=7.79956E-6
window_vset=0.0E0
window_vmon=1.6088E-1
window_imon=-8.31936E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39293E-4
mask2_vset=0.0E0
mask2_vmon=-1.86656E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=8.22047E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.45077E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.37809E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4026E0
defgridb_imon=5.98002E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33374E1
os_fil1_imon=8.97929E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.84453E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31647E1
cs_fil1_imon=6.65028E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.61755E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66602E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16727E-2
os_fil2_imon=-3.00834E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.04031E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.97739E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.55785E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22333E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=1.78265E-1
chamber_ion_pmon=1.16873E-7
chamber_cvt_pmon=2.52492E-3
foreline_cvt_pmon=2.52492E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.43985E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.18133E-1	-7.9875E-1	-9.13095E0	-9.14221E0	5.67436E-3	9.32455E-2	2.7355E1	-3.26573E1	-3.26368E1	2.68148E1	1.16724E-7	2.53031E-3	2.53031E-3	6.32896E-3	1.78265E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.1799E-1	-7.98297E-1	-9.13095E0	-9.14228E0	5.91278E-3	9.30309E-2	2.7351E1	-3.26774E1	-3.26187E1	2.68118E1	1.1693E-7	2.52099E-3	2.52099E-3	6.28552E-3	1.77846E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.18181E-1	-7.9844E-1	-9.13138E0	-9.14233E0	5.81741E-3	9.29117E-2	2.73045E1	-3.26863E1	-3.26434E1	2.68076E1	1.1699E-7	2.52697E-3	2.52697E-3	6.32418E-3	1.78041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18348E-1	-7.98321E-1	-9.13117E0	-9.14209E0	5.6982E-3	9.35078E-2	2.72793E1	-3.26693E1	-3.26554E1	2.67992E1	1.16867E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.78371E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.18133E-1	-7.98559E-1	-9.13146E0	-9.14226E0	5.53131E-3	9.30548E-2	2.72841E1	-3.26609E1	-3.26416E1	2.6816E1	1.16829E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.7862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.18396E-1	-7.98678E-1	-9.13103E0	-9.14216E0	5.6982E-3	9.32217E-2	2.73234E1	-3.26697E1	-3.26054E1	2.68232E1	1.16829E-7	2.52428E-3	2.52428E-3	6.32386E-3	1.77383E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.18062E-1	-7.98249E-1	-9.13105E0	-9.14204E0	5.88894E-3	9.30548E-2	2.73253E1	-3.26627E1	-3.26229E1	2.68088E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.78155E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.183E-1	-7.9875E-1	-9.13095E0	-9.14209E0	5.65052E-3	9.32932E-2	2.72632E1	-3.26885E1	-3.26579E1	2.6825E1	1.17236E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.78465E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.18014E-1	-7.9844E-1	-9.13103E0	-9.1419E0	5.6982E-3	9.3174E-2	2.72827E1	-3.26467E1	-3.26154E1	2.68024E1	1.16973E-7	2.52169E-3	2.52169E-3	6.30202E-3	1.77506E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09642E0	-8.18324E-1	-7.98202E-1	-9.13105E0	-9.14204E0	5.29289E-3	9.30548E-2	2.73015E1	-3.26717E1	-3.26026E1	2.68082E1	1.16829E-7	2.51116E-3	2.51116E-3	6.32386E-3	1.78465E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.183E-1	-7.98249E-1	-9.13105E0	-9.14192E0	5.96046E-3	9.33647E-2	2.7351E1	-3.26903E1	-3.26376E1	2.68356E1	1.16873E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.77961E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.18396E-1	-7.98678E-1	-9.13112E0	-9.14192E0	5.65052E-3	9.30786E-2	2.72791E1	-3.26732E1	-3.26467E1	2.67943E1	1.16835E-7	2.52027E-3	2.52027E-3	6.32418E-3	1.78831E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.18348E-1	-7.98488E-1	-9.13095E0	-9.14185E0	5.19753E-3	9.31501E-2	2.72837E1	-3.26499E1	-3.26285E1	2.6807E1	1.16873E-7	2.52384E-3	2.52384E-3	6.33436E-3	1.77961E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.18133E-1	-7.98774E-1	-9.13088E0	-9.14185E0	5.38826E-3	9.31025E-2	2.72874E1	-3.26885E1	-3.26166E1	2.67822E1	1.16886E-7	2.51359E-3	2.51359E-3	6.31858E-3	1.77569E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.18014E-1	-7.98798E-1	-9.13091E0	-9.14185E0	5.55515E-3	9.31501E-2	2.73051E1	-3.26863E1	-3.26567E1	2.67868E1	1.16969E-7	2.52309E-3	2.52309E-3	6.31274E-3	1.78243E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09619E0	-8.17776E-1	-7.98202E-1	-9.13093E0	-9.14178E0	5.93662E-3	9.30071E-2	2.73519E1	-3.26959E1	-3.25842E1	2.68051E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09619E0	-8.17704E-1	-7.98464E-1	-9.13086E0	-9.14202E0	6.00815E-3	9.31025E-2	2.73145E1	-3.26419E1	-3.26337E1	2.68064E1	1.16893E-7	2.52179E-3	2.52179E-3	6.30171E-3	1.77923E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09611E0	-8.18014E-1	-7.98392E-1	-9.13079E0	-9.1419E0	5.48363E-3	9.3174E-2	2.72744E1	-3.26567E1	-3.26909E1	2.6814E1	1.17023E-7	2.52492E-3	2.52492E-3	6.32896E-3	1.77658E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.18062E-1	-7.98512E-1	-9.13074E0	-9.14226E0	5.79357E-3	9.33409E-2	2.72727E1	-3.26661E1	-3.26113E1	2.67956E1	1.17023E-7	2.51525E-3	2.51525E-3	6.31278E-3	1.78113E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.18038E-1	-7.98345E-1	-9.13062E0	-9.14221E0	5.6982E-3	9.31025E-2	2.73351E1	-3.26831E1	-3.26549E1	2.6801E1	1.16873E-7	2.52492E-3	2.52492E-3	6.29128E-3	1.78265E-1