[Scan]
initial_time=2015-12-16T00:18:39
final_time=2015-12-16T00:18:59
ip_count=19
run=1017
dataset=5
scan=299
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09742E0
qbias_imon=-1.08807E-4
ql1_vset=
ql1_vmon=-8.17966E-1
ql1_imon=2.75532E-9
ql2_vset=
ql2_vmon=-7.98821E-1
ql2_imon=6.21843E-10
ql3_vset=
ql3_vmon=-9.13086E0
ql3_imon=6.84416E-10
ql4_vset=
ql4_vmon=-9.14156E0
ql4_imon=4.88675E-10
mult1=-9.82467E-9
mult2=-2.79047E-9
rf_tmon=-4.90296E-3
rf_agc=3.24924E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=6.01923E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68957E0
bslens_imon=2.45844E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19839E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.04841E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.16614E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05174E1
cs_ea1_imon=1.09301E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43264E0
lens1_imon=2.75405E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03516E1
cs_ea2_imon=1.41169E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.03892E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.22075E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11177E1
os_restr1_imon=3.11172E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15095E1
os_ea1_imon=1.94017E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27793E0
cs_ionrep_imon=9.51694E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93485E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.94944E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=6.31843E-9
tplens_vset=1.4E-1
tplens_vmon=1.59277E0
tplens_imon=-2.12827E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26344E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58004E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02939E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=9.96542E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=8.49674E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33604E1
lens5b_imon=2.20081E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.11569E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.64078E-1
os_ea2_imon=-4.25519E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71366E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55491E0
os_ef2alow_imon=-2.47534E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.09727E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=2.9672E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23103E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01821E1
cs_anode2_imon=2.0936E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73081E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.10756E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.66178E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=1.27556E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-8.13916E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.3921E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-7.70669E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92676E3
multa_neg_imon=8.3201E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93688E3
defgrida_imon=6.44913E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5009E3
multb_neg_imon=6.66542E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.29028E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33351E1
os_fil1_imon=8.97509E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.84873E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65644E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31648E1
cs_fil1_imon=7.90567E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6686E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.07371E-2
os_fil2_imon=-2.88221E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.86011E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.8371E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.47376E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29239E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22328E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.78265E-1
chamber_ion_pmon=1.16973E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.78223E-1
res40_imon=-2.41768E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=182
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17871E-1	-7.98726E-1	-9.13112E0	-9.14192E0	5.34058E-3	9.2864E-2	2.73111E1	-3.26729E1	-3.26392E1	2.67949E1	1.16774E-7	2.52923E-3	2.52923E-3	6.31278E-3	1.77658E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.17895E-1	-7.98607E-1	-9.13119E0	-9.14195E0	5.62668E-3	9.28402E-2	2.72901E1	-3.26579E1	-3.26416E1	2.6825E1	1.16832E-7	2.52395E-3	2.52395E-3	6.32957E-3	1.78177E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.17943E-1	-7.98726E-1	-9.13141E0	-9.14171E0	5.72205E-3	9.3174E-2	2.72877E1	-3.26831E1	-3.26068E1	2.6807E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17704E-1	-7.9875E-1	-9.1311E0	-9.14176E0	5.74589E-3	9.30786E-2	2.72821E1	-3.26679E1	-3.25983E1	2.68041E1	1.16923E-7	2.51847E-3	2.51847E-3	6.31278E-3	1.78265E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0951E0	-8.17943E-1	-7.98368E-1	-9.13098E0	-9.14216E0	5.67436E-3	9.32217E-2	2.73273E1	-3.26639E1	-3.26488E1	2.68148E1	1.16873E-7	2.51847E-3	2.51847E-3	6.29128E-3	1.78417E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.17895E-1	-7.98726E-1	-9.1311E0	-9.1418E0	5.62668E-3	9.33647E-2	2.73369E1	-3.26573E1	-3.26392E1	2.68142E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.77383E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.18062E-1	-7.98297E-1	-9.13143E0	-9.14195E0	5.31673E-3	9.30309E-2	2.73117E1	-3.26411E1	-3.26415E1	2.68287E1	1.1688E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.78E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09549E0	-8.18396E-1	-7.98416E-1	-9.13124E0	-9.1414E0	5.79357E-3	9.29832E-2	2.73003E1	-3.26693E1	-3.26362E1	2.68106E1	1.16842E-7	2.51904E-3	2.51904E-3	6.3375E-3	1.77772E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.18014E-1	-7.98273E-1	-9.131E0	-9.14187E0	5.8651E-3	9.28402E-2	2.73186E1	-3.26689E1	-3.26327E1	2.68202E1	1.17185E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.77383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.17752E-1	-7.98774E-1	-9.13086E0	-9.14197E0	5.43594E-3	9.29117E-2	2.72877E1	-3.26512E1	-3.26512E1	2.67607E1	1.16886E-7	2.51581E-3	2.51581E-3	6.31858E-3	1.78515E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09657E0	-8.17561E-1	-7.98988E-1	-9.13084E0	-9.14204E0	5.48363E-3	9.2721E-2	2.73352E1	-3.26496E1	-3.26419E1	2.68286E1	1.16576E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.77075E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09673E0	-8.17823E-1	-7.98678E-1	-9.13107E0	-9.14183E0	5.65052E-3	9.28164E-2	2.73225E1	-3.26831E1	-3.26651E1	2.6804E1	1.16923E-7	2.51847E-3	2.51847E-3	6.32356E-3	1.78417E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09665E0	-8.1799E-1	-7.99131E-1	-9.13136E0	-9.14207E0	5.81741E-3	9.31978E-2	2.7298E1	-3.2649E1	-3.26472E1	2.68273E1	1.16981E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.77229E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09804E0	-8.17895E-1	-7.98869E-1	-9.13088E0	-9.14192E0	5.79357E-3	9.30309E-2	2.72907E1	-3.26831E1	-3.26506E1	2.68196E1	1.16823E-7	2.51847E-3	2.51847E-3	6.32896E-3	1.78722E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09789E0	-8.17847E-1	-7.98941E-1	-9.13095E0	-9.14199E0	5.74589E-3	9.29356E-2	2.73237E1	-3.26927E1	-3.26032E1	2.67631E1	1.17083E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.77537E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09727E0	-8.17823E-1	-7.99131E-1	-9.13074E0	-9.14204E0	5.67436E-3	9.34124E-2	2.73051E1	-3.2644E1	-3.26819E1	2.67782E1	1.17032E-7	2.52099E-3	2.52099E-3	6.34588E-3	1.77691E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09796E0	-8.1799E-1	-7.98821E-1	-9.13095E0	-9.14221E0	5.67436E-3	9.30309E-2	2.73027E1	-3.26627E1	-3.26236E1	2.6819E1	1.17185E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.77691E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09742E0	-8.18276E-1	-7.98893E-1	-9.13112E0	-9.14173E0	5.6982E-3	9.30071E-2	2.73104E1	-3.26897E1	-3.26331E1	2.68058E1	1.1693E-7	2.5199E-3	2.5199E-3	6.29098E-3	1.78E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0968E0	-8.18014E-1	-7.99036E-1	-9.131E0	-9.14199E0	6.41346E-3	9.31263E-2	2.72892E1	-3.27045E1	-3.26248E1	2.67995E1	1.16973E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.77961E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09742E0	-8.17966E-1	-7.98821E-1	-9.13086E0	-9.14156E0	5.84126E-3	9.32217E-2	2.73081E1	-3.26729E1	-3.26344E1	2.6798E1	1.16973E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78265E-1