[Scan]
initial_time=2015-12-16T00:19:33
final_time=2015-12-16T00:19:52
ip_count=19
run=1017
dataset=5
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09688E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.17919E-1
ql1_imon=2.68774E-9
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=6.16074E-10
ql3_vset=
ql3_vmon=-9.131E0
ql3_imon=5.79929E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=5.13661E-10
mult1=-9.52366E-9
mult2=-2.77251E-9
rf_tmon=-5.14329E-3
rf_agc=3.2156E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.84126E-3
ql5_imon=6.36578E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63731E0
bslens_imon=2.6813E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.97448E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12446E2
lens4a_imon=2.05242E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.17957E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04635E2
lens23_imon=1.02213E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.049E1
cs_ea1_imon=1.10839E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4227E0
lens1_imon=2.72731E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6451E1
os_ef1alow_imon=2.98356E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0418E1
cs_ea2_imon=1.39402E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84527E1
cs_ef1a_imon=3.03882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=2.22056E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=3.10693E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=1.96067E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63716E1
os_ef1bup_imon=3.0972E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27451E0
cs_ionrep_imon=9.2292E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91845E2
cs_nozzle_imon=1.93402E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01572E1
cs_anode1_imon=1.94585E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20558E0
olens4_imon=6.45645E-9
tplens_vset=1.4E-1
tplens_vmon=1.59542E0
tplens_imon=-5.85579E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.56178E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98647E-4
ql6_vset=1.0E-1
ql6_vmon=9.30309E-2
ql6_imon=1.01308E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23676E0
ionrepsh_imon=8.28772E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3374E1
lens5b_imon=2.20985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.76013E1
cs_ef2b_imon=3.13752E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.407E-1
os_ea2_imon=-8.15641E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06146E2
lens4b_imon=2.00711E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71165E1
cs_ef2a_imon=3.17296E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59728E0
os_ef2alow_imon=-2.55026E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.81968E-1
os_ef2bup_imon=-5.36174E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=2.97001E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.3145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01971E1
cs_anode2_imon=2.10328E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.08467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6783E1
iondef4_imon=1.07808E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.7485E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=1.27867E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13999E0
cs_ionaccel_imon=-9.02986E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47438E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.71912E-6
window_vset=0.0E0
window_vmon=2.02047E-1
window_imon=-8.9256E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82653E2
mask1_imon=2.39084E-4
mask2_vset=0.0E0
mask2_vmon=-1.86778E1
mask2_imon=-6.31916E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92653E3
multa_neg_imon=7.88069E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9368E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.59159E0
defgridb_imon=6.01188E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33357E1
os_fil1_imon=8.98759E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.8976E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65447E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31707E1
cs_fil1_imon=7.99405E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.64479E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67032E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97733E-2
os_fil2_imon=-2.92404E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.85647E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.79262E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31774E-1
cs_fil2_imon=-2.45488E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.0783E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22414E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=1.78722E-1
chamber_ion_pmon=1.16823E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.66157E-1
res40_imon=-2.51898E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.0965E0	-8.18181E-1	-7.98464E-1	-9.13053E0	-9.14202E0	5.67436E-3	9.30309E-2	2.73123E1	-3.26759E1	-3.26224E1	2.68172E1	1.16973E-7	2.51954E-3	2.51954E-3	6.31817E-3	1.77809E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.17919E-1	-7.98607E-1	-9.13091E0	-9.14195E0	5.4121E-3	9.29356E-2	2.73412E1	-3.26762E1	-3.26297E1	2.67992E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.77846E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09642E0	-8.18181E-1	-7.98202E-1	-9.13067E0	-9.14221E0	5.53131E-3	9.32217E-2	2.73145E1	-3.26083E1	-3.26514E1	2.67908E1	1.1699E-7	2.52921E-3	2.52921E-3	6.29624E-3	1.77412E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.18062E-1	-7.98345E-1	-9.13069E0	-9.14197E0	5.53131E-3	9.29117E-2	2.73128E1	-3.26779E1	-3.26437E1	2.68028E1	1.16973E-7	2.51739E-3	2.51739E-3	6.32356E-3	1.78265E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0965E0	-8.18014E-1	-7.98154E-1	-9.13112E0	-9.14199E0	5.65052E-3	9.29117E-2	2.72849E1	-3.26976E1	-3.25979E1	2.68178E1	1.16624E-7	2.52599E-3	2.52599E-3	6.31817E-3	1.78569E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09673E0	-8.18181E-1	-7.98297E-1	-9.13107E0	-9.14192E0	5.81741E-3	9.34362E-2	2.73452E1	-3.26531E1	-3.26797E1	2.68304E1	1.17249E-7	2.51693E-3	2.51693E-3	6.31299E-3	1.76629E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0968E0	-8.18253E-1	-7.98368E-1	-9.13081E0	-9.14226E0	5.19753E-3	9.31025E-2	2.73171E1	-3.26615E1	-3.26116E1	2.6783E1	1.16873E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.77961E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.18133E-1	-7.98559E-1	-9.1305E0	-9.14185E0	5.55515E-3	9.28402E-2	2.73213E1	-3.26422E1	-3.25948E1	2.68106E1	1.16373E-7	2.52209E-3	2.52209E-3	6.33486E-3	1.7831E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09603E0	-8.1799E-1	-7.98821E-1	-9.13093E0	-9.14183E0	5.36442E-3	9.30309E-2	2.72745E1	-3.26885E1	-3.26206E1	2.68442E1	1.1688E-7	2.52099E-3	2.52099E-3	6.31837E-3	1.77691E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09603E0	-8.17966E-1	-7.98512E-1	-9.13095E0	-9.14207E0	5.45979E-3	9.32217E-2	2.72624E1	-3.26909E1	-3.26416E1	2.68267E1	1.16727E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.77691E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.17704E-1	-7.9844E-1	-9.131E0	-9.14202E0	5.74589E-3	9.32693E-2	2.73151E1	-3.26573E1	-3.26467E1	2.68028E1	1.16973E-7	2.51739E-3	2.51739E-3	6.33436E-3	1.77961E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09619E0	-8.17728E-1	-7.98416E-1	-9.13079E0	-9.14185E0	5.34058E-3	9.30309E-2	2.73134E1	-3.26679E1	-3.26189E1	2.67884E1	1.16973E-7	2.51847E-3	2.51847E-3	6.28056E-3	1.77961E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.17752E-1	-7.99084E-1	-9.13088E0	-9.14185E0	5.62668E-3	9.2864E-2	2.73039E1	-3.26308E1	-3.26512E1	2.68088E1	1.16829E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.77691E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09603E0	-8.17895E-1	-7.98702E-1	-9.13095E0	-9.14223E0	5.45979E-3	9.29356E-2	2.72937E1	-3.26452E1	-3.26062E1	2.68196E1	1.16981E-7	2.52209E-3	2.52209E-3	6.32936E-3	1.78465E-1
1.8E1	4.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.17943E-1	-7.99251E-1	-9.13115E0	-9.14202E0	5.48363E-3	9.27687E-2	2.72947E1	-3.26652E1	-3.26303E1	2.67878E1	1.17032E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09627E0	-8.17847E-1	-7.9875E-1	-9.13103E0	-9.14171E0	5.79357E-3	9.27925E-2	2.72925E1	-3.26819E1	-3.26062E1	2.67818E1	1.16886E-7	2.51581E-3	2.51581E-3	6.27954E-3	1.77569E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.17919E-1	-7.98726E-1	-9.13112E0	-9.14145E0	5.79357E-3	9.30309E-2	2.73322E1	-3.26832E1	-3.26195E1	2.68364E1	1.1688E-7	2.51662E-3	2.51662E-3	6.28552E-3	1.7862E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09758E0	-8.17752E-1	-7.98273E-1	-9.13091E0	-9.14176E0	5.84126E-3	9.29356E-2	2.7254E1	-3.25761E1	-3.26074E1	2.68202E1	1.16923E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.77658E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0975E0	-8.1799E-1	-7.99084E-1	-9.1311E0	-9.14168E0	5.8651E-3	9.26495E-2	2.73057E1	-3.2672E1	-3.26001E1	2.6803E1	1.16727E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.7831E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09688E0	-8.17919E-1	-7.98655E-1	-9.131E0	-9.14178E0	5.84126E-3	9.30309E-2	2.72991E1	-3.26759E1	-3.2629E1	2.6783E1	1.16823E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78722E-1