[Scan]
initial_time=2015-12-16T00:20:00
final_time=2015-12-16T00:20:19
ip_count=19
run=1017
dataset=5
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08799E-4
ql1_vset=
ql1_vmon=-8.18133E-1
ql1_imon=2.81162E-9
ql2_vset=
ql2_vmon=-7.98702E-1
ql2_imon=5.86665E-10
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=6.845E-10
ql4_vset=
ql4_vmon=-9.1418E0
ql4_imon=4.99129E-10
mult1=-9.86079E-9
mult2=-2.6707E-9
rf_tmon=-4.30814E-3
rf_agc=3.33877E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.6982E-3
ql5_imon=6.0122E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=1.98848E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12492E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.17299E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.09625E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39719E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.41601E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84514E1
cs_ef1a_imon=3.03568E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=2.22228E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=3.0955E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14909E1
os_ea1_imon=1.96144E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.10163E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27253E0
cs_ionrep_imon=9.47008E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91852E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01989E1
cs_anode1_imon=1.94404E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=6.318E-9
tplens_vset=1.4E-1
tplens_vmon=1.56933E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.47838E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.59229E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98238E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=1.01231E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=8.50034E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33586E1
lens5b_imon=2.17738E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74657E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.97123E-1
os_ea2_imon=-4.68779E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00594E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.18128E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.5483E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.71886E-1
os_ef2bup_imon=-5.18913E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=2.97261E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23088E2
cs_ionfoca_imon=6.3137E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01803E1
cs_anode2_imon=2.09468E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.06922E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=2.69245E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=1.27984E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-1.03736E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47161E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56219E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-9.47263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.0872E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93711E3
defgrida_imon=6.53564E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28126E0
defgridb_imon=6.31935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3336E1
os_fil1_imon=8.97539E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.82711E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6521E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31692E1
cs_fil1_imon=8.37418E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.72567E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66551E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15109E-2
os_fil2_imon=-3.10445E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.94421E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.84612E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.37765E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.22632E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2236E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=1.78569E-1
chamber_ion_pmon=1.17123E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.34375E-1
res40_imon=-2.58346E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=183
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.17871E-1	-7.98845E-1	-9.1311E0	-9.14197E0	5.88894E-3	9.32455E-2	2.73322E1	-3.26543E1	-3.26236E1	2.68331E1	1.16727E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.7831E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17752E-1	-7.98607E-1	-9.13084E0	-9.14171E0	5.76973E-3	9.29117E-2	2.72971E1	-3.26933E1	-3.26119E1	2.67708E1	1.16818E-7	2.52977E-3	2.52977E-3	6.30212E-3	1.78221E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.18038E-1	-7.98392E-1	-9.13115E0	-9.14187E0	5.81741E-3	9.28402E-2	2.72768E1	-3.26944E1	-3.25995E1	2.68208E1	1.17052E-7	2.52521E-3	2.52521E-3	6.31879E-3	1.78889E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.18539E-1	-7.98416E-1	-9.13107E0	-9.14187E0	5.76973E-3	9.30071E-2	2.73324E1	-3.26659E1	-3.26613E1	2.68054E1	1.16923E-7	2.51632E-3	2.51632E-3	6.3074E-3	1.77809E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.18181E-1	-7.98821E-1	-9.13095E0	-9.14211E0	5.57899E-3	9.29356E-2	2.72851E1	-3.26628E1	-3.26547E1	2.68194E1	1.16813E-7	2.51783E-3	2.51783E-3	6.30221E-3	1.78473E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.18157E-1	-7.98869E-1	-9.13072E0	-9.14171E0	5.4121E-3	9.32455E-2	2.72943E1	-3.26729E1	-3.262E1	2.68046E1	1.16577E-7	2.51838E-3	2.51838E-3	6.3131E-3	1.78084E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.18062E-1	-7.98702E-1	-9.13112E0	-9.14211E0	5.24521E-3	9.31025E-2	2.73075E1	-3.26537E1	-3.26213E1	2.6817E1	1.1693E-7	2.52318E-3	2.52318E-3	6.32386E-3	1.7831E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.18276E-1	-7.98559E-1	-9.13119E0	-9.14187E0	5.67436E-3	9.30071E-2	2.73123E1	-3.26621E1	-3.26428E1	2.68119E1	1.16973E-7	2.52169E-3	2.52169E-3	6.33436E-3	1.78722E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.18133E-1	-7.98535E-1	-9.13095E0	-9.14192E0	5.79357E-3	9.31025E-2	2.73267E1	-3.26482E1	-3.26296E1	2.68198E1	1.16829E-7	2.52538E-3	2.52538E-3	6.32386E-3	1.77691E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.18181E-1	-7.98559E-1	-9.13067E0	-9.14187E0	5.53131E-3	9.31025E-2	2.73015E1	-3.26561E1	-3.2614E1	2.68082E1	1.16923E-7	2.52599E-3	2.52599E-3	6.31278E-3	1.77961E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.18038E-1	-7.98559E-1	-9.13084E0	-9.14178E0	5.57899E-3	9.34362E-2	2.73139E1	-3.26626E1	-3.2629E1	2.68172E1	1.1693E-7	2.5188E-3	2.5188E-3	6.31288E-3	1.77537E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.1811E-1	-7.98798E-1	-9.13091E0	-9.14204E0	6.03199E-3	9.30548E-2	2.72943E1	-3.26921E1	-3.26434E1	2.67938E1	1.1693E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.77691E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.17871E-1	-7.98845E-1	-9.13124E0	-9.14183E0	5.67436E-3	9.31025E-2	2.73399E1	-3.2659E1	-3.26521E1	2.68169E1	1.16973E-7	2.52276E-3	2.52276E-3	6.29665E-3	1.78113E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09734E0	-8.17776E-1	-7.98345E-1	-9.13115E0	-9.14204E0	5.36442E-3	9.30548E-2	2.73466E1	-3.26296E1	-3.26014E1	2.68136E1	1.16873E-7	2.52276E-3	2.52276E-3	6.32356E-3	1.78417E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09503E0	-8.17919E-1	-7.9844E-1	-9.13115E0	-9.14176E0	5.45979E-3	9.30071E-2	2.72937E1	-3.26759E1	-3.2623E1	2.67686E1	1.1693E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.17943E-1	-7.97939E-1	-9.13081E0	-9.14178E0	5.6982E-3	9.30786E-2	2.73327E1	-3.26795E1	-3.26458E1	2.681E1	1.16778E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.77769E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.1799E-1	-7.98512E-1	-9.13105E0	-9.1419E0	5.79357E-3	9.29356E-2	2.73472E1	-3.26669E1	-3.25767E1	2.68112E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17728E-1	-7.98559E-1	-9.13115E0	-9.14187E0	5.4121E-3	9.30786E-2	2.72296E1	-3.25741E1	-3.26231E1	2.68148E1	1.1688E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17776E-1	-7.99012E-1	-9.13103E0	-9.14178E0	5.67436E-3	9.32932E-2	2.73333E1	-3.26717E1	-3.26224E1	2.67682E1	1.16823E-7	2.52384E-3	2.52384E-3	6.31817E-3	1.78113E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.18133E-1	-7.98702E-1	-9.13129E0	-9.1418E0	5.6982E-3	9.32455E-2	2.73009E1	-3.26627E1	-3.26212E1	2.68304E1	1.17123E-7	2.52815E-3	2.52815E-3	6.32896E-3	1.78569E-1