[Scan]
initial_time=2015-12-16T00:20:26
final_time=2015-12-16T00:20:46
ip_count=19
run=1017
dataset=5
scan=303
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08868E-4
ql1_vset=
ql1_vmon=-8.17847E-1
ql1_imon=2.76937E-9
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=5.97703E-10
ql3_vset=
ql3_vmon=-9.13088E0
ql3_imon=6.39081E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=5.1229E-10
mult1=-9.81854E-9
mult2=-2.61547E-9
rf_tmon=-4.53307E-3
rf_agc=3.28785E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.60284E-3
ql5_imon=6.14953E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66494E0
bslens_imon=2.76486E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20193E1
lens5a_imon=1.98668E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12518E2
lens4a_imon=2.04927E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.1838E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02186E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.10815E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42483E0
lens1_imon=2.55217E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65023E1
os_ef1alow_imon=2.98955E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03534E1
cs_ea2_imon=1.39294E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84725E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.22139E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=3.12506E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=1.93909E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.71882E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91836E2
cs_nozzle_imon=1.93215E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01635E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20546E0
olens4_imon=6.38721E-9
tplens_vset=1.4E-1
tplens_vmon=1.60298E0
tplens_imon=-1.01074E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26107E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.59518E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98432E-4
ql6_vset=1.0E-1
ql6_vmon=9.2864E-2
ql6_imon=1.00124E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.64094E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34096E1
lens5b_imon=2.19648E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.46053E-1
os_ea2_imon=-4.90409E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71222E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56932E0
os_ef2alow_imon=-2.42849E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.71886E-1
os_ef2bup_imon=-5.32608E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11075E1
os_restr2_imon=2.99063E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.30793E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72915E1
iondef1_imon=1.07715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68111E1
iondef4_imon=1.11368E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=2.68872E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=1.27593E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56339E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-1.03376E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39394E-4
mask2_vset=0.0E0
mask2_vmon=-1.87005E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.22562E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32637E0
defgridb_imon=6.19678E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33369E1
os_fil1_imon=8.98049E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.87156E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65259E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31681E1
cs_fil1_imon=7.10078E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.37128E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66682E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21558E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.99827E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.86159E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.30557E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47859E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31798E-3
inlet_lpb_pmon=1.77923E-1
chamber_ion_pmon=1.17014E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83318E-1
res40_imon=-2.55824E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.18729E-1	-7.9937E-1	-9.13143E0	-9.14161E0	5.67436E-3	9.35078E-2	2.73104E1	-3.26661E1	-3.26744E1	2.67972E1	1.1693E-7	2.51552E-3	2.51552E-3	6.3074E-3	1.78465E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.18968E-1	-7.98702E-1	-9.13115E0	-9.14185E0	5.67436E-3	9.32455E-2	2.73144E1	-3.27129E1	-3.26521E1	2.68053E1	1.16873E-7	2.52169E-3	2.52169E-3	6.31817E-3	1.78113E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09696E0	-8.18181E-1	-7.99012E-1	-9.13103E0	-9.14173E0	5.88894E-3	9.34601E-2	2.73201E1	-3.26472E1	-3.26422E1	2.67932E1	1.16765E-7	2.52301E-3	2.52301E-3	6.3074E-3	1.78033E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09665E0	-8.17966E-1	-7.98798E-1	-9.13117E0	-9.14159E0	5.50747E-3	9.32693E-2	2.73116E1	-3.26832E1	-3.26219E1	2.6843E1	1.16841E-7	2.51498E-3	2.51498E-3	6.3131E-3	1.78244E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09673E0	-8.178E-1	-7.98488E-1	-9.131E0	-9.14166E0	5.6982E-3	9.32932E-2	2.72925E1	-3.26476E1	-3.26026E1	2.68233E1	1.16677E-7	2.52318E-3	2.52318E-3	6.3074E-3	1.78E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.178E-1	-7.99036E-1	-9.13115E0	-9.1418E0	5.53131E-3	9.29356E-2	2.73045E1	-3.26502E1	-3.26119E1	2.68142E1	1.16973E-7	2.51632E-3	2.51632E-3	6.33436E-3	1.77961E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.17847E-1	-7.98559E-1	-9.13091E0	-9.14202E0	5.55515E-3	9.30071E-2	2.72919E1	-3.26699E1	-3.26494E1	2.68178E1	1.16829E-7	2.52209E-3	2.52209E-3	6.32386E-3	1.77691E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.17943E-1	-7.98845E-1	-9.13105E0	-9.14197E0	5.55515E-3	9.31025E-2	2.72937E1	-3.26554E1	-3.2608E1	2.68106E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.77846E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0965E0	-8.17728E-1	-7.98845E-1	-9.13081E0	-9.14187E0	5.72205E-3	9.31501E-2	2.72955E1	-3.26837E1	-3.25948E1	2.681E1	1.17032E-7	2.5199E-3	2.5199E-3	6.30192E-3	1.77383E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09704E0	-8.17657E-1	-7.98321E-1	-9.13105E0	-9.14173E0	5.48363E-3	9.34124E-2	2.72889E1	-3.26747E1	-3.26266E1	2.6792E1	1.16923E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.77961E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09711E0	-8.17752E-1	-7.98726E-1	-9.13112E0	-9.14161E0	5.74589E-3	9.34601E-2	2.72927E1	-3.27074E1	-3.26048E1	2.68208E1	1.16829E-7	2.51552E-3	2.51552E-3	6.31837E-3	1.77846E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17704E-1	-7.99155E-1	-9.131E0	-9.14173E0	5.6982E-3	9.32455E-2	2.73271E1	-3.26707E1	-3.26321E1	2.67818E1	1.16778E-7	2.5199E-3	2.5199E-3	6.32386E-3	1.77846E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.1768E-1	-7.99179E-1	-9.13091E0	-9.14204E0	5.67436E-3	9.33647E-2	2.73116E1	-3.26602E1	-3.26378E1	2.68028E1	1.1668E-7	2.5225E-3	2.5225E-3	6.34099E-3	1.78673E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09627E0	-8.17657E-1	-7.98988E-1	-9.13115E0	-9.14207E0	5.50747E-3	9.27925E-2	2.73466E1	-3.26843E1	-3.26494E1	2.68047E1	1.16973E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.77809E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.17919E-1	-7.98774E-1	-9.13112E0	-9.14183E0	5.62668E-3	9.33647E-2	2.72871E1	-3.2644E1	-3.26242E1	2.68136E1	1.16923E-7	2.52169E-3	2.52169E-3	6.3074E-3	1.77809E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.18062E-1	-7.98893E-1	-9.13124E0	-9.14202E0	5.57899E-3	9.30071E-2	2.73411E1	-3.26443E1	-3.26266E1	2.68112E1	1.1693E-7	2.52757E-3	2.52757E-3	6.3074E-3	1.77537E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09549E0	-8.17919E-1	-7.98678E-1	-9.13122E0	-9.14202E0	5.60284E-3	9.31025E-2	2.73435E1	-3.26314E1	-3.26152E1	2.68214E1	1.17032E-7	2.51662E-3	2.51662E-3	6.30192E-3	1.7831E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09588E0	-8.1768E-1	-7.98416E-1	-9.13084E0	-9.14185E0	5.67436E-3	9.31501E-2	2.72325E1	-3.25511E1	-3.25487E1	2.67962E1	1.16727E-7	2.52099E-3	2.52099E-3	6.30192E-3	1.77691E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.17561E-1	-7.9844E-1	-9.13081E0	-9.14168E0	5.55515E-3	9.27687E-2	2.73312E1	-3.26834E1	-3.26422E1	2.6807E1	1.16873E-7	2.51739E-3	2.51739E-3	6.3074E-3	1.77809E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.17847E-1	-7.98225E-1	-9.13088E0	-9.14183E0	5.60284E-3	9.2864E-2	2.72915E1	-3.26697E1	-3.26107E1	2.68111E1	1.17014E-7	2.51814E-3	2.51814E-3	6.31798E-3	1.77923E-1