[Scan]
initial_time=2015-12-16T00:20:53
final_time=2015-12-16T00:21:12
ip_count=19
run=1017
dataset=5
scan=304
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.0882E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=2.71703E-9
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=6.2139E-10
ql3_vset=
ql3_vmon=-9.13117E0
ql3_imon=5.82254E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=5.24151E-10
mult1=-9.83036E-9
mult2=-2.83889E-9
rf_tmon=-4.87521E-3
rf_agc=3.26071E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.45979E-3
ql5_imon=6.29056E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62551E0
bslens_imon=2.48309E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20308E1
lens5a_imon=1.98722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12479E2
lens4a_imon=2.04891E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=3.18582E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02358E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04799E1
cs_ea1_imon=1.09847E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44335E0
lens1_imon=2.69545E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64927E1
os_ef1alow_imon=2.97001E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03566E1
cs_ea2_imon=1.3972E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84244E1
cs_ef1a_imon=3.03326E-5
olens2_vset=9.7E-1
olens2_vmon=9.70006E-1
olens2_imon=2.23229E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11118E1
os_restr1_imon=3.09964E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15547E1
os_ea1_imon=1.98085E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6367E1
os_ef1bup_imon=3.0913E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.38494E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.95106E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20551E0
olens4_imon=6.48326E-9
tplens_vset=1.4E-1
tplens_vmon=1.5966E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26213E1
iondef3_imon=1.52179E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26956E1
iondef2_imon=1.57736E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98675E-4
ql6_vset=1.0E-1
ql6_vmon=9.28879E-2
ql6_imon=1.01562E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=8.2594E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33817E1
lens5b_imon=2.20702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7482E1
cs_ef2b_imon=3.12188E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.77274E-1
os_ea2_imon=-7.05919E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06115E2
lens4b_imon=2.00839E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.17609E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56195E0
os_ef2alow_imon=-2.49465E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.35632E-1
os_ef2bup_imon=-5.39301E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10845E1
os_restr2_imon=2.95646E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23074E2
cs_ionfoca_imon=6.29079E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.10467E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73051E1
iondef1_imon=1.11511E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.07669E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.70425E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=1.2762E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09771E0
cs_ionaccel_imon=-7.91778E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47181E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56405E1
einzel_imon=7.89288E-6
window_vset=0.0E0
window_vmon=2.00889E-1
window_imon=-9.16887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39265E-4
mask2_vset=0.0E0
mask2_vmon=-1.86431E1
mask2_imon=-6.59718E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92613E3
multa_neg_imon=7.58692E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93684E3
defgrida_imon=6.39413E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=6.86134E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55911E0
defgridb_imon=6.33396E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33352E1
os_fil1_imon=8.97746E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.83968E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65385E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31674E1
cs_fil1_imon=7.33954E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.91123E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6676E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.88349E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.94335E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82425E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32898E-1
cs_fil2_imon=-2.63443E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37948E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2239E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29684E-3
inlet_lpb_pmon=1.77328E-1
chamber_ion_pmon=1.16818E-7
chamber_cvt_pmon=2.52342E-3
foreline_cvt_pmon=2.52342E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.30449E-1
res40_imon=-2.35217E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17943E-1	-7.98535E-1	-9.13126E0	-9.14195E0	5.53131E-3	9.30786E-2	2.73011E1	-3.26425E1	-3.26294E1	2.68233E1	1.16923E-7	2.52384E-3	2.52384E-3	6.29128E-3	1.78265E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17871E-1	-7.98845E-1	-9.13112E0	-9.1419E0	5.6982E-3	9.30071E-2	2.73419E1	-3.2679E1	-3.26098E1	2.67857E1	1.16717E-7	2.52093E-3	2.52093E-3	6.34385E-3	1.7774E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17943E-1	-7.98965E-1	-9.13112E0	-9.14164E0	5.88894E-3	9.31501E-2	2.72877E1	-3.26863E1	-3.26301E1	2.68036E1	1.16311E-7	2.51527E-3	2.51527E-3	6.31902E-3	1.78128E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.17704E-1	-7.98655E-1	-9.13136E0	-9.14197E0	5.81741E-3	9.28402E-2	2.73139E1	-3.2662E1	-3.26172E1	2.68094E1	1.1672E-7	2.52131E-3	2.52131E-3	6.32328E-3	1.77476E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.17847E-1	-7.98798E-1	-9.13122E0	-9.1418E0	5.81741E-3	9.3174E-2	2.73015E1	-3.26891E1	-3.26164E1	2.68178E1	1.17023E-7	2.51739E-3	2.51739E-3	6.31817E-3	1.78417E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09727E0	-8.18062E-1	-7.9875E-1	-9.13119E0	-9.14185E0	5.76973E-3	9.31025E-2	2.72799E1	-3.26873E1	-3.26236E1	2.68178E1	1.16981E-7	2.52209E-3	2.52209E-3	6.30192E-3	1.77691E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09704E0	-8.17871E-1	-7.98392E-1	-9.1311E0	-9.1419E0	5.60284E-3	9.28879E-2	2.73423E1	-3.26779E1	-3.26242E1	2.6781E1	1.1688E-7	2.5188E-3	2.5188E-3	6.3074E-3	1.77383E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09627E0	-8.17919E-1	-7.98607E-1	-9.13115E0	-9.14202E0	5.76973E-3	9.30548E-2	2.73153E1	-3.26248E1	-3.26609E1	2.68376E1	1.17308E-7	2.52553E-3	2.52553E-3	6.3445E-3	1.77923E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09657E0	-8.1749E-1	-7.98559E-1	-9.1311E0	-9.14183E0	5.53131E-3	9.3174E-2	2.73033E1	-3.26655E1	-3.26614E1	2.68076E1	1.1688E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.77691E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09719E0	-8.18372E-1	-7.98607E-1	-9.1316E0	-9.14195E0	5.65052E-3	9.30309E-2	2.73231E1	-3.26494E1	-3.26368E1	2.67828E1	1.17032E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.7831E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09673E0	-8.17776E-1	-7.98249E-1	-9.13124E0	-9.14187E0	5.24521E-3	9.29832E-2	2.73213E1	-3.26789E1	-3.265E1	2.68113E1	1.16873E-7	2.51847E-3	2.51847E-3	6.3074E-3	1.77961E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09634E0	-8.1749E-1	-7.98416E-1	-9.1311E0	-9.14185E0	5.4121E-3	9.31025E-2	2.72841E1	-3.26987E1	-3.26873E1	2.6818E1	1.16938E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.78041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09734E0	-8.17657E-1	-7.98488E-1	-9.13136E0	-9.14178E0	5.76973E-3	9.32455E-2	2.73099E1	-3.26975E1	-3.26326E1	2.67627E1	1.16873E-7	2.51954E-3	2.51954E-3	6.35059E-3	1.77506E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09619E0	-8.17704E-1	-7.98631E-1	-9.13129E0	-9.14178E0	5.50747E-3	9.31978E-2	2.72937E1	-3.26807E1	-3.26278E1	2.67955E1	1.16628E-7	2.52027E-3	2.52027E-3	6.32978E-3	1.78199E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.17657E-1	-7.98607E-1	-9.13115E0	-9.14176E0	5.53131E-3	9.30548E-2	2.72666E1	-3.26603E1	-3.26026E1	2.682E1	1.16829E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.7831E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.1799E-1	-7.98821E-1	-9.13131E0	-9.14173E0	5.55515E-3	9.3174E-2	2.72991E1	-3.26945E1	-3.26242E1	2.68366E1	1.17032E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.78E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09719E0	-8.17728E-1	-7.98655E-1	-9.1311E0	-9.14161E0	5.43594E-3	9.28879E-2	2.72787E1	-3.26344E1	-3.26446E1	2.68176E1	1.17073E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.77809E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.17966E-1	-7.98392E-1	-9.13112E0	-9.14202E0	5.36442E-3	9.29117E-2	2.73051E1	-3.26531E1	-3.26425E1	2.67978E1	1.17042E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.77726E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.18038E-1	-7.98392E-1	-9.13124E0	-9.14166E0	5.72205E-3	9.31263E-2	2.73275E1	-3.26614E1	-3.2652E1	2.67966E1	1.16923E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.78722E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.17561E-1	-7.98321E-1	-9.13117E0	-9.14185E0	5.45979E-3	9.28879E-2	2.73051E1	-3.26956E1	-3.26213E1	2.681E1	1.16818E-7	2.52342E-3	2.52342E-3	6.29684E-3	1.77328E-1