[Scan]
initial_time=2015-12-16T00:21:46
final_time=2015-12-16T00:22:06
ip_count=19
run=1017
dataset=5
scan=306
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09657E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=2.79475E-9
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=6.42359E-10
ql3_vset=
ql3_vmon=-9.13084E0
ql3_imon=6.00946E-10
ql4_vset=
ql4_vmon=-9.14161E0
ql4_imon=4.60351E-10
mult1=-8.81703E-9
mult2=-2.84948E-9
rf_tmon=-6.0434E-3
rf_agc=3.15518E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.91278E-3
ql5_imon=6.4981E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63153E0
bslens_imon=2.80233E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20013E1
lens5a_imon=1.96376E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12494E2
lens4a_imon=2.05173E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.18344E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.02013E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04756E1
cs_ea1_imon=1.08845E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44904E0
lens1_imon=2.35738E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=3.00108E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0358E1
cs_ea2_imon=1.42182E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84418E1
cs_ef1a_imon=3.0364E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=2.23326E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=3.09839E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=1.93352E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63821E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23124E0
cs_ionrep_imon=9.47664E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93086E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01713E1
cs_anode1_imon=1.95161E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20575E0
olens4_imon=6.40193E-9
tplens_vset=1.4E-1
tplens_vmon=1.57075E0
tplens_imon=-2.04587E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2622E1
iondef3_imon=1.48196E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26574E1
iondef2_imon=1.5859E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98461E-4
ql6_vset=1.0E-1
ql6_vmon=9.30071E-2
ql6_imon=1.00548E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25094E0
ionrepsh_imon=8.52416E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74375E1
cs_ef2b_imon=3.13263E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.05991E-1
os_ea2_imon=-7.81637E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00699E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71786E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.51346E0
os_ef2alow_imon=-2.38525E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.01318E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=2.96216E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.27808E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02037E1
cs_anode2_imon=2.11378E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73031E1
iondef1_imon=1.10583E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67727E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7179E1
olens3_imon=2.67936E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=1.27521E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.20222E0
cs_ionaccel_imon=-9.32847E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47356E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.42861E-1
window_imon=-8.93203E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86849E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92612E3
multa_neg_imon=8.04792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93713E3
defgrida_imon=6.67482E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=6.84863E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49351E0
defgridb_imon=5.68758E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33353E1
os_fil1_imon=8.98872E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.88898E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65462E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31695E1
cs_fil1_imon=6.82448E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.56349E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66783E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.19531E-2
os_fil2_imon=-2.87019E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=3.02229E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.82803E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31982E-1
cs_fil2_imon=-2.04729E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=3.25324E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22502E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=1.76902E-1
chamber_ion_pmon=1.16774E-7
chamber_cvt_pmon=2.52707E-3
foreline_cvt_pmon=2.52707E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.09748E-1
res40_imon=-2.5222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.17323E-1	-7.98488E-1	-9.13091E0	-9.14192E0	5.55515E-3	9.32693E-2	2.73021E1	-3.26807E1	-3.26368E1	2.67943E1	1.16973E-7	2.5131E-3	2.5131E-3	6.3074E-3	1.77658E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.1718E-1	-7.98726E-1	-9.13086E0	-9.14211E0	5.45979E-3	9.34601E-2	2.72666E1	-3.26518E1	-3.26849E1	2.68144E1	1.17023E-7	2.52061E-3	2.52061E-3	6.31817E-3	1.78722E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.1749E-1	-7.98345E-1	-9.13107E0	-9.14185E0	5.67436E-3	9.33409E-2	2.73474E1	-3.26405E1	-3.26237E1	2.68273E1	1.1668E-7	2.51693E-3	2.51693E-3	6.3074E-3	1.77726E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09549E0	-8.17299E-1	-7.98655E-1	-9.13093E0	-9.14187E0	5.81741E-3	9.32217E-2	2.72943E1	-3.26777E1	-3.26554E1	2.68169E1	1.16818E-7	2.51182E-3	2.51182E-3	6.3074E-3	1.77774E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09518E0	-8.17657E-1	-7.98655E-1	-9.1311E0	-9.1418E0	5.38826E-3	9.29832E-2	2.73165E1	-3.26789E1	-3.26206E1	2.67932E1	1.16873E-7	2.52276E-3	2.52276E-3	6.33436E-3	1.77204E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09549E0	-8.17704E-1	-7.99084E-1	-9.13107E0	-9.14166E0	5.55515E-3	9.32455E-2	2.73352E1	-3.26537E1	-3.26396E1	2.67955E1	1.16886E-7	2.51581E-3	2.51581E-3	6.32978E-3	1.78515E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.17609E-1	-7.98702E-1	-9.13098E0	-9.14159E0	5.72205E-3	9.32217E-2	2.72871E1	-3.26603E1	-3.26116E1	2.68154E1	1.16774E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.78265E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.17609E-1	-7.98798E-1	-9.1311E0	-9.14171E0	6.00815E-3	9.33409E-2	2.72768E1	-3.26703E1	-3.26549E1	2.68466E1	1.16774E-7	2.51954E-3	2.51954E-3	6.32896E-3	1.78113E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.17752E-1	-7.98297E-1	-9.13081E0	-9.14176E0	5.60284E-3	9.37223E-2	2.73237E1	-3.26993E1	-3.2638E1	2.68148E1	1.16727E-7	2.5199E-3	2.5199E-3	6.34588E-3	1.78E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.17609E-1	-7.98655E-1	-9.13103E0	-9.14185E0	5.43594E-3	9.32217E-2	2.7344E1	-3.26703E1	-3.26142E1	2.6847E1	1.16981E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.7862E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.17561E-1	-7.98535E-1	-9.13038E0	-9.14223E0	5.50747E-3	9.2864E-2	2.73196E1	-3.26503E1	-3.26306E1	2.68111E1	1.16818E-7	2.51919E-3	2.51919E-3	6.31798E-3	1.77774E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.0965E0	-8.1749E-1	-7.98321E-1	-9.13053E0	-9.14218E0	5.8651E-3	9.30548E-2	2.72703E1	-3.2637E1	-3.26434E1	2.67984E1	1.16724E-7	2.52492E-3	2.52492E-3	6.32356E-3	1.77658E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.17633E-1	-7.9844E-1	-9.13079E0	-9.14209E0	5.98431E-3	9.33647E-2	2.73457E1	-3.26653E1	-3.26516E1	2.68506E1	1.16769E-7	2.51814E-3	2.51814E-3	6.30212E-3	1.77923E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.17895E-1	-7.98392E-1	-9.13105E0	-9.14183E0	5.79357E-3	9.3317E-2	2.72763E1	-3.26705E1	-3.2641E1	2.68112E1	1.16999E-7	2.51952E-3	2.51952E-3	6.34737E-3	1.78084E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17513E-1	-7.98535E-1	-9.13098E0	-9.14176E0	5.88894E-3	9.3174E-2	2.73118E1	-3.26982E1	-3.25801E1	2.68346E1	1.1688E-7	2.52209E-3	2.52209E-3	6.31837E-3	1.78E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.1737E-1	-7.98345E-1	-9.1311E0	-9.1418E0	5.65052E-3	9.30071E-2	2.73269E1	-3.26661E1	-3.26178E1	2.67914E1	1.16677E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.78465E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0965E0	-8.17537E-1	-7.98559E-1	-9.13107E0	-9.14154E0	5.55515E-3	9.30309E-2	2.7364E1	-3.26362E1	-3.26669E1	2.68424E1	1.16823E-7	2.51525E-3	2.51525E-3	6.33436E-3	1.78113E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17633E-1	-7.98631E-1	-9.13088E0	-9.14154E0	5.79357E-3	9.31978E-2	2.72684E1	-3.26747E1	-3.27504E1	2.6792E1	1.1688E-7	2.52099E-3	2.52099E-3	6.3074E-3	1.78155E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.17418E-1	-7.98273E-1	-9.13069E0	-9.14173E0	5.65052E-3	9.30548E-2	2.73057E1	-3.26724E1	-3.26081E1	2.67769E1	1.16576E-7	2.52538E-3	2.52538E-3	6.32936E-3	1.78465E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09657E0	-8.17537E-1	-7.98726E-1	-9.13084E0	-9.14161E0	5.91278E-3	9.30071E-2	2.73031E1	-3.26574E1	-3.2622E1	2.67727E1	1.16774E-7	2.52707E-3	2.52707E-3	6.31278E-3	1.76902E-1