[Scan]
initial_time=2015-12-16T00:22:13
final_time=2015-12-16T00:22:32
ip_count=19
run=1017
dataset=5
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08871E-4
ql1_vset=
ql1_vmon=-8.17513E-1
ql1_imon=2.72326E-9
ql2_vset=
ql2_vmon=-7.98059E-1
ql2_imon=6.1506E-10
ql3_vset=
ql3_vmon=-9.13119E0
ql3_imon=5.81002E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=4.60207E-10
mult1=-9.87765E-9
mult2=-2.72914E-9
rf_tmon=-4.9814E-3
rf_agc=3.23358E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.6818E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66974E0
bslens_imon=2.45484E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20289E1
lens5a_imon=1.99136E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.04938E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53634E1
cs_ef1b_imon=3.15965E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02355E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04682E1
cs_ea1_imon=1.09661E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.77568E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64704E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0333E1
cs_ea2_imon=1.39943E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84412E1
cs_ef1a_imon=3.02703E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=2.22627E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11562E1
os_restr1_imon=3.10668E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15618E1
os_ea1_imon=1.97118E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63647E1
os_ef1bup_imon=3.10343E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20343E0
cs_ionrep_imon=9.28262E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93676E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=1.9444E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=6.30357E-9
tplens_vset=1.4E-1
tplens_vmon=1.58435E0
tplens_imon=-4.54359E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26425E1
iondef3_imon=1.53065E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.56562E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98804E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=9.86731E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25931E0
ionrepsh_imon=8.30928E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.23326E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74778E1
cs_ef2b_imon=3.14272E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.71889E-1
os_ea2_imon=-8.18459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00954E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71234E1
cs_ef2a_imon=3.18092E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.58374E0
os_ef2alow_imon=-2.77447E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.91107E-1
os_ef2bup_imon=-5.17832E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11538E1
os_restr2_imon=2.93549E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23061E2
cs_ionfoca_imon=6.29099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01959E1
cs_anode2_imon=2.0882E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73541E1
iondef1_imon=1.13158E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68268E1
iondef4_imon=1.03187E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71789E1
olens3_imon=2.79053E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=1.2785E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12474E0
cs_ionaccel_imon=-5.86866E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02048E2
cs_ionfocb_imon=1.46848E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=8.81228E-6
window_vset=0.0E0
window_vmon=1.77699E-1
window_imon=-1.27522E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39117E-4
mask2_vset=0.0E0
mask2_vmon=-1.86494E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92554E3
multa_neg_imon=8.49674E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.37342E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50151E3
multb_neg_imon=6.73031E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48277E0
defgridb_imon=6.24725E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33358E1
os_fil1_imon=8.97473E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.83312E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65444E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31696E1
cs_fil1_imon=7.40712E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00801E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66915E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.16399E-2
os_fil2_imon=-2.99633E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.80605E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.98275E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28638E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22381E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=1.78775E-1
chamber_ion_pmon=1.1693E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.83919E-1
res40_imon=-2.57626E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.17847E-1	-7.98583E-1	-9.131E0	-9.14187E0	5.84126E-3	9.33886E-2	2.7288E1	-3.2688E1	-3.26296E1	2.681E1	1.16727E-7	2.51771E-3	2.51771E-3	6.32936E-3	1.78E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09541E0	-8.18038E-1	-7.98726E-1	-9.13112E0	-9.14183E0	5.50747E-3	9.29832E-2	2.73106E1	-3.2694E1	-3.26132E1	2.6802E1	1.17032E-7	2.51443E-3	2.51443E-3	6.3074E-3	1.78155E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09572E0	-8.17609E-1	-7.98559E-1	-9.13143E0	-9.14187E0	5.79357E-3	9.30786E-2	2.73358E1	-3.26793E1	-3.26295E1	2.67966E1	1.16886E-7	2.51693E-3	2.51693E-3	6.31858E-3	1.78199E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.17847E-1	-7.98178E-1	-9.13122E0	-9.14207E0	5.76973E-3	9.29594E-2	2.72898E1	-3.26787E1	-3.2596E1	2.6798E1	1.17014E-7	2.51919E-3	2.51919E-3	6.33388E-3	1.78371E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09456E0	-8.17895E-1	-7.98392E-1	-9.13124E0	-9.1419E0	5.76973E-3	9.30548E-2	2.73015E1	-3.27059E1	-3.26092E1	2.67962E1	1.1688E-7	2.52647E-3	2.52647E-3	6.31837E-3	1.77537E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17633E-1	-7.98225E-1	-9.13126E0	-9.14202E0	5.84126E-3	9.31025E-2	2.7278E1	-3.2662E1	-3.26366E1	2.68232E1	1.17134E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.78155E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.17823E-1	-7.98368E-1	-9.13141E0	-9.14192E0	5.62668E-3	9.29117E-2	2.73357E1	-3.26464E1	-3.26302E1	2.68088E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31014E-3	1.77537E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09541E0	-8.17728E-1	-7.98512E-1	-9.13143E0	-9.1419E0	5.72205E-3	9.30309E-2	2.73003E1	-3.26813E1	-3.2608E1	2.68157E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.17466E-1	-7.98416E-1	-9.13088E0	-9.14221E0	5.84126E-3	9.28164E-2	2.73213E1	-3.26482E1	-3.2626E1	2.68238E1	1.16724E-7	2.5131E-3	2.5131E-3	6.29128E-3	1.77961E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.17704E-1	-7.98368E-1	-9.13093E0	-9.14173E0	5.79357E-3	9.27925E-2	2.73113E1	-3.26601E1	-3.26568E1	2.68036E1	1.1693E-7	2.52428E-3	2.52428E-3	6.31837E-3	1.78155E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17347E-1	-7.98345E-1	-9.13112E0	-9.14207E0	5.57899E-3	9.29594E-2	2.73102E1	-3.26425E1	-3.26235E1	2.67963E1	1.17053E-7	2.52301E-3	2.52301E-3	6.31779E-3	1.78033E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.17251E-1	-7.98798E-1	-9.13122E0	-9.14192E0	5.74589E-3	9.34124E-2	2.73493E1	-3.26337E1	-3.26402E1	2.67884E1	1.17104E-7	2.52293E-3	2.52293E-3	6.29035E-3	1.78728E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.17323E-1	-7.98273E-1	-9.13086E0	-9.14149E0	5.60284E-3	9.33409E-2	2.73243E1	-3.27149E1	-3.2635E1	2.68995E1	1.16778E-7	2.52099E-3	2.52099E-3	6.31288E-3	1.77846E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.1749E-1	-7.98416E-1	-9.13079E0	-9.14168E0	5.24521E-3	9.31978E-2	2.73159E1	-3.26669E1	-3.2617E1	2.68172E1	1.16981E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.78155E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.17537E-1	-7.98225E-1	-9.13088E0	-9.14161E0	5.79357E-3	9.30548E-2	2.73322E1	-3.26856E1	-3.26154E1	2.68041E1	1.17032E-7	2.53087E-3	2.53087E-3	6.31837E-3	1.78E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09603E0	-8.17776E-1	-7.98678E-1	-9.13107E0	-9.1418E0	5.60284E-3	9.31263E-2	2.73387E1	-3.265E1	-3.26536E1	2.67974E1	1.16769E-7	2.51603E-3	2.51603E-3	6.32328E-3	1.78072E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09673E0	-8.178E-1	-7.98368E-1	-9.13072E0	-9.14199E0	5.57899E-3	9.33886E-2	2.72907E1	-3.26957E1	-3.2596E1	2.67968E1	1.16886E-7	2.52362E-3	2.52362E-3	6.32418E-3	1.78199E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17537E-1	-7.98559E-1	-9.13072E0	-9.14199E0	5.84126E-3	9.34839E-2	2.72269E1	-3.25831E1	-3.26886E1	2.67931E1	1.1688E-7	2.52538E-3	2.52538E-3	6.30192E-3	1.77691E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.17513E-1	-7.98535E-1	-9.13093E0	-9.14192E0	5.4121E-3	9.33409E-2	2.73255E1	-3.26933E1	-3.26398E1	2.68166E1	1.16867E-7	2.51498E-3	2.51498E-3	6.30212E-3	1.77774E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.17513E-1	-7.98059E-1	-9.13119E0	-9.14202E0	5.4121E-3	9.31978E-2	2.73541E1	-3.26561E1	-3.26425E1	2.68268E1	1.1693E-7	2.51771E-3	2.51771E-3	6.31288E-3	1.78775E-1