[Scan]
initial_time=2015-12-16T00:22:39
final_time=2015-12-16T00:22:59
ip_count=19
run=1017
dataset=5
scan=308
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08842E-4
ql1_vset=
ql1_vmon=-8.17537E-1
ql1_imon=2.67564E-9
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=5.84984E-10
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=6.1568E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=5.50842E-10
mult1=-9.64406E-9
mult2=-2.71262E-9
rf_tmon=-3.70131E-3
rf_agc=3.40005E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.4121E-3
ql5_imon=6.36017E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68957E0
bslens_imon=2.58822E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19923E1
lens5a_imon=1.99893E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53778E1
cs_ef1b_imon=3.19281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02251E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05066E1
cs_ea1_imon=1.08003E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41402E0
lens1_imon=2.62067E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64602E1
os_ef1alow_imon=2.98811E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04231E1
cs_ea2_imon=1.43332E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.0382E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=2.24106E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11159E1
os_restr1_imon=3.09947E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15474E1
os_ea1_imon=1.96036E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.45205E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01797E1
cs_anode1_imon=1.9498E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=6.4075E-9
tplens_vset=1.4E-1
tplens_vmon=1.59637E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2629E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.59986E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02955E2
lens6_imon=2.98508E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=9.98056E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30858E0
ionrepsh_imon=8.47511E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33267E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75114E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.70687E-1
os_ea2_imon=-5.40878E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06122E2
lens4b_imon=2.00352E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71029E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.59095E0
os_ef2alow_imon=-2.50057E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.73087E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10871E1
os_restr2_imon=2.96756E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30072E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02296E1
cs_anode2_imon=2.10946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73393E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68244E1
iondef4_imon=1.09026E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=2.72491E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=1.27491E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-8.96807E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-8.28332E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82689E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8662E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92666E3
multa_neg_imon=8.09299E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.4996E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50064E3
multb_neg_imon=7.75772E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4166E0
defgridb_imon=6.29772E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33348E1
os_fil1_imon=8.98548E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.80969E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65752E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31668E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.92389E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66866E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.02212E-2
os_fil2_imon=-2.83415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.83008E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.56255E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31853E-1
cs_fil2_imon=-2.00524E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38249E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22355E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32328E-3
inlet_lpb_pmon=1.77625E-1
chamber_ion_pmon=1.16379E-7
chamber_cvt_pmon=2.52553E-3
foreline_cvt_pmon=2.52553E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=4.47589E-1
res40_imon=-2.36002E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09642E0	-8.17394E-1	-7.98512E-1	-9.13076E0	-9.14185E0	5.8651E-3	9.31978E-2	2.72898E1	-3.26472E1	-3.26119E1	2.67816E1	1.16727E-7	2.51552E-3	2.51552E-3	6.33486E-3	1.77537E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.17561E-1	-7.98917E-1	-9.13093E0	-9.14185E0	5.53131E-3	9.32455E-2	2.72824E1	-3.26309E1	-3.26272E1	2.68269E1	1.17123E-7	2.53139E-3	2.53139E-3	6.33977E-3	1.77506E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09611E0	-8.17466E-1	-7.98559E-1	-9.13124E0	-9.14185E0	5.4121E-3	9.29832E-2	2.73022E1	-3.26822E1	-3.25907E1	2.6829E1	1.16727E-7	2.52209E-3	2.52209E-3	6.29098E-3	1.77691E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.17561E-1	-7.98392E-1	-9.13086E0	-9.14183E0	5.65052E-3	9.30786E-2	2.72925E1	-3.26579E1	-3.26296E1	2.67998E1	1.16823E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.78113E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.178E-1	-7.98202E-1	-9.13103E0	-9.14176E0	5.72205E-3	9.31978E-2	2.73369E1	-3.26651E1	-3.26446E1	2.67937E1	1.16778E-7	2.52428E-3	2.52428E-3	6.31288E-3	1.78155E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.18014E-1	-7.98392E-1	-9.13126E0	-9.14178E0	5.55515E-3	9.31025E-2	2.72925E1	-3.26771E1	-3.26428E1	2.68026E1	1.16873E-7	2.52276E-3	2.52276E-3	6.31817E-3	1.78417E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.17752E-1	-7.98392E-1	-9.13105E0	-9.14171E0	5.88894E-3	9.3174E-2	2.73279E1	-3.26422E1	-3.2611E1	2.67902E1	1.16886E-7	2.52473E-3	2.52473E-3	6.34099E-3	1.78199E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09642E0	-8.17847E-1	-7.98273E-1	-9.13093E0	-9.1419E0	6.05583E-3	9.31263E-2	2.72925E1	-3.26603E1	-3.26212E1	2.67361E1	1.16774E-7	2.51847E-3	2.51847E-3	6.30202E-3	1.7918E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09642E0	-8.17919E-1	-7.98059E-1	-9.13086E0	-9.14199E0	5.79357E-3	9.27925E-2	2.73147E1	-3.26813E1	-3.26152E1	2.6856E1	1.16731E-7	2.52362E-3	2.52362E-3	6.31858E-3	1.77569E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09711E0	-8.17847E-1	-7.98416E-1	-9.13086E0	-9.14161E0	5.55515E-3	9.34601E-2	2.72862E1	-3.26325E1	-3.26531E1	2.68141E1	1.16674E-7	2.51632E-3	2.51632E-3	6.29665E-3	1.77506E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.1768E-1	-7.98297E-1	-9.13079E0	-9.14202E0	6.17504E-3	9.32217E-2	2.73273E1	-3.26669E1	-3.26308E1	2.68436E1	1.16823E-7	2.52815E-3	2.52815E-3	6.31817E-3	1.78265E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09611E0	-8.17657E-1	-7.98249E-1	-9.13122E0	-9.14178E0	5.79357E-3	9.30071E-2	2.73195E1	-3.26609E1	-3.2623E1	2.68394E1	1.1688E-7	2.5199E-3	2.5199E-3	6.29645E-3	1.78E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.17561E-1	-7.98249E-1	-9.13131E0	-9.14159E0	6.22272E-3	9.32693E-2	2.73315E1	-3.26621E1	-3.26464E1	2.67776E1	1.17083E-7	2.51771E-3	2.51771E-3	6.32386E-3	1.78E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09688E0	-8.17752E-1	-7.97939E-1	-9.13107E0	-9.14195E0	5.79357E-3	9.32693E-2	2.73092E1	-3.2711E1	-3.2603E1	2.67686E1	1.16829E-7	2.52099E-3	2.52099E-3	6.32386E-3	1.78155E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09627E0	-8.17728E-1	-7.98392E-1	-9.13126E0	-9.14159E0	5.45979E-3	9.34362E-2	2.72967E1	-3.26356E1	-3.26434E1	2.68328E1	1.17073E-7	2.52169E-3	2.52169E-3	6.32896E-3	1.77355E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0958E0	-8.1768E-1	-7.98821E-1	-9.13095E0	-9.14154E0	5.34058E-3	9.31978E-2	2.73177E1	-3.26398E1	-3.26561E1	2.6807E1	1.16829E-7	2.52757E-3	2.52757E-3	6.29645E-3	1.77846E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.0958E0	-8.17752E-1	-7.98631E-1	-9.13115E0	-9.14171E0	5.76973E-3	9.32455E-2	2.72582E1	-3.26839E1	-3.2622E1	2.6813E1	1.16626E-7	2.52209E-3	2.52209E-3	6.34588E-3	1.78155E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09557E0	-8.17871E-1	-7.98249E-1	-9.13131E0	-9.14159E0	5.50747E-3	9.32693E-2	2.72859E1	-3.26813E1	-3.26248E1	2.68106E1	1.16774E-7	2.52169E-3	2.52169E-3	6.32356E-3	1.77658E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.17657E-1	-7.98488E-1	-9.13091E0	-9.1419E0	5.74589E-3	9.3317E-2	2.73664E1	-3.26726E1	-3.26832E1	2.67978E1	1.16829E-7	2.52428E-3	2.52428E-3	6.3074E-3	1.77846E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.17537E-1	-7.98368E-1	-9.13112E0	-9.14195E0	5.4121E-3	9.36747E-2	2.73393E1	-3.26603E1	-3.2629E1	2.68244E1	1.16379E-7	2.52553E-3	2.52553E-3	6.32328E-3	1.77625E-1