[Scan]
initial_time=2015-12-16T00:23:06
final_time=2015-12-16T00:23:26
ip_count=19
run=1017
dataset=5
scan=309
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08776E-4
ql1_vset=
ql1_vmon=-8.17728E-1
ql1_imon=2.72355E-9
ql2_vset=
ql2_vmon=-7.98392E-1
ql2_imon=6.10995E-10
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=5.3035E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=5.16355E-10
mult1=-1.00432E-8
mult2=-2.71738E-9
rf_tmon=-3.66592E-3
rf_agc=3.3256E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.88894E-3
ql5_imon=6.30522E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62648E0
bslens_imon=2.73242E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19556E1
lens5a_imon=1.9737E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.17876E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.1013E-5
lens1_vset=-5.0E0
lens1_vmon=-5.45067E0
lens1_imon=2.54857E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.65065E1
os_ef1alow_imon=2.99856E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03997E1
cs_ea2_imon=1.40231E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70411E-1
olens2_imon=2.23298E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=3.10487E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=1.94774E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.08722E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22566E0
cs_ionrep_imon=9.38356E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9183E2
cs_nozzle_imon=1.93568E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01731E1
cs_anode1_imon=1.94007E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20573E0
olens4_imon=6.42629E-9
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-6.34607E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26596E1
iondef3_imon=1.51947E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26791E1
iondef2_imon=1.56129E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98515E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=1.00778E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.30568E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33826E1
lens5b_imon=2.1817E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75582E1
cs_ef2b_imon=3.14019E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.38843E-1
os_ea2_imon=-5.73322E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.55371E0
os_ef2alow_imon=-2.19424E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.70684E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=2.97405E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23101E2
cs_ionfoca_imon=6.32524E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.08351E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73104E1
iondef1_imon=1.11103E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68262E1
iondef4_imon=1.09855E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.72902E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=1.27182E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-9.14827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02129E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56814E1
einzel_imon=7.63018E-6
window_vset=0.0E0
window_vmon=1.86709E-1
window_imon=-1.01934E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39401E-4
mask2_vset=0.0E0
mask2_vmon=-1.86626E1
mask2_imon=-5.9047E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92654E3
multa_neg_imon=8.43546E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.75915E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50112E3
multb_neg_imon=7.55585E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38653E0
defgridb_imon=6.16794E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33325E1
os_fil1_imon=8.98884E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.85894E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65458E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31657E1
cs_fil1_imon=7.25695E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01642E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.67072E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=1.97053E-2
os_fil2_imon=-2.8762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.83609E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.87706E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.22148E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.04011E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22431E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=5.15464E-1
res40_imon=-2.36362E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.17585E-1	-7.98059E-1	-9.13129E0	-9.1418E0	5.50747E-3	9.32455E-2	2.73155E1	-3.2655E1	-3.26486E1	2.68328E1	1.16677E-7	2.52538E-3	2.52538E-3	6.3074E-3	1.7831E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.17466E-1	-7.98488E-1	-9.13124E0	-9.14161E0	5.60284E-3	9.30309E-2	2.731E1	-3.26848E1	-3.26193E1	2.67788E1	1.16624E-7	2.52061E-3	2.52061E-3	6.3074E-3	1.78113E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17537E-1	-7.98821E-1	-9.13098E0	-9.1418E0	5.38826E-3	9.29356E-2	2.7319E1	-3.26654E1	-3.26382E1	2.68505E1	1.1693E-7	2.52209E-3	2.52209E-3	6.31288E-3	1.76921E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.17394E-1	-7.98774E-1	-9.13115E0	-9.14185E0	5.26905E-3	9.31025E-2	2.72997E1	-3.26711E1	-3.2647E1	2.67824E1	1.16774E-7	2.52815E-3	2.52815E-3	6.32356E-3	1.78569E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.178E-1	-7.98583E-1	-9.13095E0	-9.14178E0	5.81741E-3	9.30786E-2	2.73057E1	-3.26944E1	-3.26384E1	2.67962E1	1.17223E-7	2.52061E-3	2.52061E-3	6.32896E-3	1.77506E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.17657E-1	-7.98011E-1	-9.13088E0	-9.14171E0	5.67436E-3	9.27925E-2	2.72514E1	-3.26613E1	-3.26792E1	2.67797E1	1.16724E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.77809E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09603E0	-8.17466E-1	-7.98321E-1	-9.13105E0	-9.1418E0	5.67436E-3	9.31025E-2	2.73473E1	-3.26864E1	-3.26195E1	2.6787E1	1.16861E-7	2.51886E-3	2.51886E-3	6.3126E-3	1.77448E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09603E0	-8.17704E-1	-7.98178E-1	-9.13076E0	-9.14197E0	5.65052E-3	9.32932E-2	2.73558E1	-3.26714E1	-3.26242E1	2.67926E1	1.16847E-7	2.51874E-3	2.51874E-3	6.32483E-3	1.78128E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.17609E-1	-7.98655E-1	-9.13112E0	-9.14192E0	5.55515E-3	9.30786E-2	2.7349E1	-3.26134E1	-3.26819E1	2.68058E1	1.16823E-7	2.52061E-3	2.52061E-3	6.29128E-3	1.77506E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.17728E-1	-7.98869E-1	-9.13095E0	-9.14237E0	5.34058E-3	9.29594E-2	2.73151E1	-3.27133E1	-3.25871E1	2.67968E1	1.16727E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.77537E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09588E0	-8.17585E-1	-7.98297E-1	-9.13117E0	-9.14223E0	5.50747E-3	9.30309E-2	2.73093E1	-3.26747E1	-3.26194E1	2.67758E1	1.1688E-7	2.51771E-3	2.51771E-3	6.31837E-3	1.78465E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09688E0	-8.17585E-1	-7.98726E-1	-9.13098E0	-9.14226E0	5.88894E-3	9.29832E-2	2.72955E1	-3.26536E1	-3.26386E1	2.67818E1	1.16973E-7	2.52707E-3	2.52707E-3	6.33436E-3	1.77961E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0965E0	-8.17513E-1	-7.98821E-1	-9.13088E0	-9.14209E0	5.67436E-3	9.28402E-2	2.73228E1	-3.26992E1	-3.25983E1	2.67806E1	1.17032E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.7831E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.17275E-1	-7.98821E-1	-9.13103E0	-9.1418E0	5.43594E-3	9.30786E-2	2.72865E1	-3.27059E1	-3.26152E1	2.6801E1	1.17032E-7	2.51771E-3	2.51771E-3	6.30192E-3	1.7862E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17275E-1	-7.98678E-1	-9.13098E0	-9.14207E0	5.60284E-3	9.30548E-2	2.72845E1	-3.26296E1	-3.25942E1	2.68593E1	1.16774E-7	2.52492E-3	2.52492E-3	6.31278E-3	1.78265E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09642E0	-8.17418E-1	-7.98297E-1	-9.13086E0	-9.14192E0	5.55515E-3	9.32932E-2	2.7355E1	-3.26813E1	-3.2626E1	2.6869E1	1.1693E-7	2.52318E-3	2.52318E-3	6.31837E-3	1.7831E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.17561E-1	-7.98321E-1	-9.13138E0	-9.14187E0	5.74589E-3	9.32693E-2	2.73045E1	-3.26482E1	-3.26747E1	2.68112E1	1.16923E-7	2.51632E-3	2.51632E-3	6.31278E-3	1.77355E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0958E0	-8.17633E-1	-7.98225E-1	-9.13136E0	-9.14168E0	5.84126E-3	9.3317E-2	2.72833E1	-3.26437E1	-3.26826E1	2.6819E1	1.16373E-7	2.51552E-3	2.51552E-3	6.32386E-3	1.77691E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.1768E-1	-7.98225E-1	-9.13129E0	-9.14168E0	5.62668E-3	9.35316E-2	2.7337E1	-3.2672E1	-3.26054E1	2.68238E1	1.16351E-7	2.52546E-3	2.52546E-3	6.31548E-3	1.78113E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.17728E-1	-7.98392E-1	-9.13153E0	-9.14164E0	5.88894E-3	9.35555E-2	2.73104E1	-3.26791E1	-3.26596E1	2.68262E1