[Scan]
initial_time=2015-12-16T00:23:33
final_time=2015-12-16T00:23:52
ip_count=19
run=1017
dataset=5
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=27.0
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09734E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.1749E-1
ql1_imon=2.74771E-9
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=5.9756E-10
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=6.01375E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=5.47421E-10
mult1=-1.04628E-8
mult2=-2.79703E-9
rf_tmon=-4.57036E-3
rf_agc=3.28162E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.74589E-3
ql5_imon=6.57523E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70456E0
bslens_imon=2.5114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19659E1
lens5a_imon=1.98687E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12554E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53795E1
cs_ef1b_imon=3.17846E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04653E2
lens23_imon=1.02287E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05082E1
cs_ea1_imon=1.09529E-5
lens1_vset=-5.0E0
lens1_vmon=-5.3997E0
lens1_imon=2.43354E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6434E1
os_ef1alow_imon=2.99588E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03903E1
cs_ea2_imon=1.41525E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84444E1
cs_ef1a_imon=3.02383E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=2.22617E-7
os_restr1_vset=4.1E1
os_restr1_vmon=4.11306E1
os_restr1_imon=3.11689E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=1.9582E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63691E1
os_ef1bup_imon=3.07726E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25859E0
cs_ionrep_imon=9.45572E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91846E2
cs_nozzle_imon=1.93399E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01951E1
cs_anode1_imon=1.95699E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20563E0
olens4_imon=6.40085E-9
tplens_vset=1.4E-1
tplens_vmon=1.60958E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26249E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26648E1
iondef2_imon=1.58939E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98279E-4
ql6_vset=1.0E-1
ql6_vmon=9.29832E-2
ql6_imon=1.01845E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=8.63104E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3364E1
lens5b_imon=2.18649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74283E1
cs_ef2b_imon=3.12468E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-3.54858E-1
os_ea2_imon=-3.30742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06135E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71499E1
cs_ef2a_imon=3.19438E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.56557E0
os_ef2alow_imon=-2.61963E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-1.8498E-1
os_ef2bup_imon=-5.20269E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10752E1
os_restr2_imon=2.97535E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23072E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0198E1
cs_anode2_imon=2.08544E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72883E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68376E1
iondef4_imon=1.09397E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=2.73197E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=1.2806E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16847E0
cs_ionaccel_imon=-9.81337E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02057E2
cs_ionfocb_imon=1.47368E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56181E1
einzel_imon=7.54276E-6
window_vset=0.0E0
window_vmon=1.87735E-1
window_imon=-7.97338E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82654E2
mask1_imon=2.38996E-4
mask2_vset=0.0E0
mask2_vmon=-1.86698E1
mask2_imon=-4.04571E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92603E3
multa_neg_imon=7.325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.14284E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.12325E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.52072E0
defgridb_imon=5.96941E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33333E1
os_fil1_imon=8.98337E2
os_fil1_emis_iset=5.0E0
os_fil1_emis_imon=5.79459E-2
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.65622E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31668E1
cs_fil1_imon=7.44643E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.98231E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66857E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.12929E-2
os_fil2_imon=-2.96248E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.84056E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=1.83691E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30987E-1
cs_fil2_imon=-2.18402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54903E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22402E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=1.78155E-1
chamber_ion_pmon=1.16778E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=5.1E2
res40_vmon=3.30646E-1
res40_imon=-2.56302E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.17728E-1	-7.98154E-1	-9.13119E0	-9.14195E0	5.60284E-3	9.32932E-2	2.72732E1	-3.26537E1	-3.26425E1	2.68011E1	1.16774E-7	2.52169E-3	2.52169E-3	6.31278E-3	1.78265E-1
2.0E0	2.0E0	0.0E0	3.16E2	1.6E2	-2.09549E0	-8.1768E-1	-7.98535E-1	-9.13117E0	-9.14187E0	5.91278E-3	9.33409E-2	2.7325E1	-3.26317E1	-3.26659E1	2.67902E1	1.16973E-7	2.51954E-3	2.51954E-3	6.29665E-3	1.77355E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.178E-1	-7.98678E-1	-9.131E0	-9.14166E0	5.50747E-3	9.35078E-2	2.73382E1	-3.26148E1	-3.26191E1	2.67944E1	1.16765E-7	2.52301E-3	2.52301E-3	6.3074E-3	1.7818E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.17728E-1	-7.98821E-1	-9.13098E0	-9.14192E0	5.6982E-3	9.35793E-2	2.72979E1	-3.26494E1	-3.26008E1	2.68118E1	1.16893E-7	2.52066E-3	2.52066E-3	6.30171E-3	1.77122E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.17823E-1	-7.98559E-1	-9.131E0	-9.14183E0	5.74589E-3	9.31501E-2	2.72673E1	-3.26667E1	-3.26018E1	2.68154E1	1.16778E-7	2.52099E-3	2.52099E-3	6.34037E-3	1.7862E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.17704E-1	-7.98249E-1	-9.13105E0	-9.14176E0	5.76973E-3	9.3317E-2	2.73021E1	-3.26591E1	-3.26741E1	2.68364E1	1.16923E-7	2.52061E-3	2.52061E-3	6.32356E-3	1.77961E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17943E-1	-7.98535E-1	-9.13107E0	-9.14178E0	5.34058E-3	9.29117E-2	2.72892E1	-3.26484E1	-3.26543E1	2.68198E1	1.16576E-7	2.51334E-3	2.51334E-3	6.31837E-3	1.78155E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.17537E-1	-7.98821E-1	-9.13093E0	-9.14147E0	5.6982E-3	9.31263E-2	2.73069E1	-3.26939E1	-3.2626E1	2.68125E1	1.17023E-7	2.52384E-3	2.52384E-3	6.32896E-3	1.78417E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.17466E-1	-7.98273E-1	-9.13093E0	-9.14209E0	5.57899E-3	9.32455E-2	2.72733E1	-3.26476E1	-3.26524E1	2.68211E1	1.1688E-7	2.52099E-3	2.52099E-3	6.32936E-3	1.77691E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09627E0	-8.17537E-1	-7.98368E-1	-9.13095E0	-9.14195E0	5.29289E-3	9.30548E-2	2.72823E1	-3.26068E1	-3.26194E1	2.68022E1	1.16829E-7	2.51443E-3	2.51443E-3	6.31288E-3	1.7831E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09665E0	-8.17442E-1	-7.98631E-1	-9.13126E0	-9.14195E0	5.57899E-3	9.31025E-2	2.73081E1	-3.26603E1	-3.26164E1	2.67891E1	1.17145E-7	2.51025E-3	2.51025E-3	6.32418E-3	1.78831E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.17633E-1	-7.98631E-1	-9.13119E0	-9.14185E0	5.84126E-3	9.29356E-2	2.73193E1	-3.26844E1	-3.26378E1	2.67842E1	1.16674E-7	2.51847E-3	2.51847E-3	6.31817E-3	1.78113E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.17657E-1	-7.98488E-1	-9.13136E0	-9.14159E0	5.55515E-3	9.30786E-2	2.73315E1	-3.26699E1	-3.26615E1	2.68665E1	1.16923E-7	2.52599E-3	2.52599E-3	6.3074E-3	1.77961E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0968E0	-8.17704E-1	-7.98154E-1	-9.13162E0	-9.14149E0	5.67436E-3	9.32932E-2	2.73442E1	-3.26362E1	-3.26338E1	2.68424E1	1.1693E-7	2.5199E-3	2.5199E-3	6.32936E-3	1.7831E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.0968E0	-8.17943E-1	-7.98082E-1	-9.13174E0	-9.14149E0	6.00815E-3	9.3174E-2	2.73057E1	-3.26579E1	-3.26014E1	2.68418E1	1.1693E-7	2.51771E-3	2.51771E-3	6.3074E-3	1.78155E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09742E0	-8.17657E-1	-7.98178E-1	-9.13122E0	-9.14145E0	5.53131E-3	9.3317E-2	2.73122E1	-3.27068E1	-3.26284E1	2.67704E1	1.16525E-7	2.51552E-3	2.51552E-3	6.31288E-3	1.77537E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-2.09734E0	-8.17657E-1	-7.98607E-1	-9.13122E0	-9.14166E0	5.76973E-3	9.35316E-2	2.73411E1	-3.26621E1	-3.2641E1	2.68376E1	1.16426E-7	2.52276E-3	2.52276E-3	6.3074E-3	1.77961E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09742E0	-8.17633E-1	-7.98607E-1	-9.13098E0	-9.14195E0	5.79357E-3	9.29832E-2	2.73109E1	-3.26532E1	-3.26451E1	2.68186E1	1.16474E-7	2.52757E-3	2.52757E-3	6.31288E-3	1.77846E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.17633E-1	-7.98512E-1	-9.13119E0	-9.14197E0	5.96046E-3	9.29594E-2	2.7251E1	-3.26627E1	-3.26849E1	2.68204E1	1.16574E-7	2.51814E-3	2.51814E-3	6.32858E-3	1.77923E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09734E0	-8.1749E-1	-7.9844E-1	-9.13115E0	-9.14168E0	5.74589E-3	9.29832E-2	2.72883E1	-3.26648E1	-3.26249E1	2.68376E1	1.16778E-7	2.5199E-3	2.5199E-3	6.31837E-3	1.78155E-1